<?xml version="1.0" encoding="us-ascii"?>
<!DOCTYPE article PUBLIC "-//NLM//DTD Journal Publishing DTD v2.3 20070202//EN" "journalpublishing.dtd">
<article article-type="review-article" dtd-version="2.3" xml:lang="EN" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">
<front>
<journal-meta>
<journal-id journal-id-type="publisher-id">Front. Mater.</journal-id>
<journal-title>Frontiers in Materials</journal-title>
<abbrev-journal-title abbrev-type="pubmed">Front. Mater.</abbrev-journal-title>
<issn pub-type="epub">2296-8016</issn>
<publisher>
<publisher-name>Frontiers Media S.A.</publisher-name>
</publisher>
</journal-meta>
<article-meta>
<article-id pub-id-type="publisher-id">1373040</article-id>
<article-id pub-id-type="doi">10.3389/fmats.2024.1373040</article-id>
<article-categories>
<subj-group subj-group-type="heading">
<subject>Materials</subject>
<subj-group>
<subject>Review</subject>
</subj-group>
</subj-group>
</article-categories>
<title-group>
<article-title>Recent progress in piezoelectric thin films as self-powered devices: material and application</article-title>
<alt-title alt-title-type="left-running-head">Song et al.</alt-title>
<alt-title alt-title-type="right-running-head">
<ext-link ext-link-type="uri" xlink:href="https://doi.org/10.3389/fmats.2024.1373040">10.3389/fmats.2024.1373040</ext-link>
</alt-title>
</title-group>
<contrib-group>
<contrib contrib-type="author" corresp="yes">
<name>
<surname>Song</surname>
<given-names>Zhiqiang</given-names>
</name>
<xref ref-type="aff" rid="aff1">
<sup>1</sup>
</xref>
<xref ref-type="corresp" rid="c001">&#x2a;</xref>
<uri xlink:href="https://loop.frontiersin.org/people/2634507/overview"/>
<role content-type="https://credit.niso.org/contributor-roles/conceptualization/"/>
<role content-type="https://credit.niso.org/contributor-roles/writing-original-draft/"/>
<role content-type="https://credit.niso.org/contributor-roles/Writing - review &#x26; editing/"/>
</contrib>
<contrib contrib-type="author">
<name>
<surname>Hou</surname>
<given-names>Rongxi</given-names>
</name>
<xref ref-type="aff" rid="aff1">
<sup>1</sup>
</xref>
<role content-type="https://credit.niso.org/contributor-roles/investigation/"/>
<role content-type="https://credit.niso.org/contributor-roles/visualization/"/>
<role content-type="https://credit.niso.org/contributor-roles/Writing - review &#x26; editing/"/>
</contrib>
<contrib contrib-type="author">
<name>
<surname>Jiang</surname>
<given-names>Feng</given-names>
</name>
<xref ref-type="aff" rid="aff1">
<sup>1</sup>
</xref>
<xref ref-type="aff" rid="aff2">
<sup>2</sup>
</xref>
<role content-type="https://credit.niso.org/contributor-roles/conceptualization/"/>
<role content-type="https://credit.niso.org/contributor-roles/formal-analysis/"/>
<role content-type="https://credit.niso.org/contributor-roles/resources/"/>
<role content-type="https://credit.niso.org/contributor-roles/validation/"/>
<role content-type="https://credit.niso.org/contributor-roles/writing-original-draft/"/>
</contrib>
</contrib-group>
<aff id="aff1">
<sup>1</sup>
<institution>School of Automation</institution>, <institution>Wuxi University</institution>, <addr-line>Wuxi</addr-line>, <addr-line>Jiangsu</addr-line>, <country>China</country>
</aff>
<aff id="aff2">
<sup>2</sup>
<institution>School of Electrical and Information Engineering</institution>, <institution>Changzhou Institute of Technology</institution>, <addr-line>Changzhou</addr-line>, <addr-line>Jiangsu</addr-line>, <country>China</country>
</aff>
<author-notes>
<fn fn-type="edited-by">
<p>
<bold>Edited by:</bold> <ext-link ext-link-type="uri" xlink:href="https://loop.frontiersin.org/people/1989599/overview">Sumanta Kumar Karan</ext-link>, The Pennsylvania State University (PSU), United States</p>
</fn>
<fn fn-type="edited-by">
<p>
<bold>Reviewed by:</bold> <ext-link ext-link-type="uri" xlink:href="https://loop.frontiersin.org/people/2007005/overview">Nur Amin Hoque</ext-link>, Indian Institute of Science Education and Research Mohali, India</p>
<p>
<ext-link ext-link-type="uri" xlink:href="https://loop.frontiersin.org/people/1885384/overview">Ritamay Bhunia</ext-link>, Hanyang University, Republic of Korea</p>
</fn>
<corresp id="c001">&#x2a;Correspondence: Zhiqiang Song, <email>zqsong@cwxu.edu.cn</email>
</corresp>
</author-notes>
<pub-date pub-type="epub">
<day>25</day>
<month>04</month>
<year>2024</year>
</pub-date>
<pub-date pub-type="collection">
<year>2024</year>
</pub-date>
<volume>11</volume>
<elocation-id>1373040</elocation-id>
<history>
<date date-type="received">
<day>19</day>
<month>01</month>
<year>2024</year>
</date>
<date date-type="accepted">
<day>09</day>
<month>04</month>
<year>2024</year>
</date>
</history>
<permissions>
<copyright-statement>Copyright &#xa9; 2024 Song, Hou and Jiang.</copyright-statement>
<copyright-year>2024</copyright-year>
<copyright-holder>Song, Hou and Jiang</copyright-holder>
<license xlink:href="http://creativecommons.org/licenses/by/4.0/">
<p>This is an open-access article distributed under the terms of the Creative Commons Attribution License (CC BY). The use, distribution or reproduction in other forums is permitted, provided the original author(s) and the copyright owner(s) are credited and that the original publication in this journal is cited, in accordance with accepted academic practice. No use, distribution or reproduction is permitted which does not comply with these terms.</p>
</license>
</permissions>
<abstract>
<p>Piezoelectric materials have become a key component in sensors and actuators in many industrial fields, such as energy harvesting devices, self-powered structures, biomedical devices, nondestructive testing, owing to the novel properties including high piezoelectric coefficient and electromechanical coupling factors. Piezoelectric thin films integrated on silicon substrates are widely investigated for their high performance and low manufacturing costs to meet the requirement of sensor networks in internet of things (IoT). The aim of this work is to clarify the application and design structure of various piezoelectric thin films types, synthesis methods, and device processes. Based on latest literature, the process of fabricating thin film sensors is outlined, followed by a concise overview of techniques used in microelectromechanical systems (MEMS) processing that can integrate more complex functions to obtain relevant information in surrounding environment. Additionally, by addressing piezoelectric thin films sensors as a cutting-edge technology with the ability to produce self-powered electronic devices, this work delivers incisive conclusions on all aspects of piezoelectric sensor related features. A greater understanding of piezoelectricity is necessary regarding the future development and industry challenges.</p>
</abstract>
<kwd-group>
<kwd>piezoelectric</kwd>
<kwd>thin films</kwd>
<kwd>self-powered devices</kwd>
<kwd>wearable sensors</kwd>
<kwd>MEMS</kwd>
</kwd-group>
<custom-meta-wrap>
<custom-meta>
<meta-name>section-at-acceptance</meta-name>
<meta-value>Smart Materials</meta-value>
</custom-meta>
</custom-meta-wrap>
</article-meta>
</front>
<body>
<sec id="s1">
<title>1 Introduction</title>
<p>Thin film sensors are widely used in aerospace, mechanical manufacturing, civil engineering, mining and other industrial fields (<xref ref-type="bibr" rid="B227">Zhang et al., 2021a</xref>; <xref ref-type="bibr" rid="B164">Shalabi et al., 2022</xref>; <xref ref-type="bibr" rid="B174">Song et al., 2022</xref>). With thickness in range from a few hundred nanometers to tens of microns, thin film sensors can be integrated directly onto surface of component under test without changing environment inside the device, making integrated structure and sensing fabrication easy to implement (<xref ref-type="bibr" rid="B217">Yu et al., 2023</xref>; <xref ref-type="bibr" rid="B219">Yue et al., 2023</xref>). Using large area film preparation technology, thin film strain resistance is placed on metal elastic substrate, with high precision, good creep, and strong anti-interference ability, etc. (<xref ref-type="bibr" rid="B2">Agarwala et al., 2017</xref>; <xref ref-type="bibr" rid="B89">Kirthika et al., 2017</xref>; <xref ref-type="bibr" rid="B150">Qiao et al., 2018</xref>; <xref ref-type="bibr" rid="B152">Russell et al., 2022</xref>). Through the development of new material systems and new physical mechanisms, piezoelectric thin film sensors have made great progress in sensitivity, response range, response time, linearity, hysteresis, and stability, and have shifted from the development of a single sensor to the development and optimization of the system level. Piezoelectric materials play key roles in various electronic devices such as wireless sensor networks, mobile electronics, wearable and implantable biomedical devices. Piezoelectric thin films have found a broad range of lab-on-chip applications. Generated power from piezoelectric sensor can be used to drive low powered electronic devices. By combining hardware and software technologies, piezoelectric film sensors form an intelligent sensing platform for the internet of things (IoT), which will be widely used in health monitoring, home interconnection and intelligent manufacturing, et al. (<xref ref-type="bibr" rid="B208">Yamamoto et al., 2016</xref>; <xref ref-type="bibr" rid="B231">Zhang et al., 2021b</xref>; <xref ref-type="bibr" rid="B112">Liu et al., 2023a</xref>).</p>
<p>Internet of things is considered to be the third major innovation in information technology after the emergence of computers and internet (<xref ref-type="bibr" rid="B45">Fan et al., 2022</xref>; <xref ref-type="bibr" rid="B228">Zhang et al., 2023a</xref>; <xref ref-type="bibr" rid="B79">Kalyanasundaram Balasubramanian et al., 2023</xref>). Through connections between different entities, data is shared and numerous devices on the network are able to interact and collaborate (<xref ref-type="bibr" rid="B234">Zhao et al., 2020a</xref>; <xref ref-type="bibr" rid="B29">Chionh et al., 2020</xref>; <xref ref-type="bibr" rid="B114">Liu et al., 2023b</xref>; <xref ref-type="bibr" rid="B226">Zhang et al., 2023b</xref>; <xref ref-type="bibr" rid="B73">Huang et al., 2023</xref>; <xref ref-type="bibr" rid="B149">Portilla et al., 2023</xref>; <xref ref-type="bibr" rid="B190">Tsakanikas et al., 2023</xref>). There are three main layers in architecture of IoT, including perception layer, network layer and application layer (<xref ref-type="bibr" rid="B191">Uslu et al., 2020</xref>). The sensing layer obtains data from the external physical world through various means such as sensors or digital cameras, and transmits it through a series of short-range transmission technologies such as radio frequency identification (RFID), industrial fieldbus, Bluetooth and infrared (<xref ref-type="bibr" rid="B109">Liu et al., 2020</xref>; <xref ref-type="bibr" rid="B132">Mrabet et al., 2020</xref>; <xref ref-type="bibr" rid="B35">Cui et al., 2021</xref>; <xref ref-type="bibr" rid="B111">Liu et al., 2022a</xref>). With the rapid development of intelligent manufacturing, intelligent transportation, smart city and wearable technology (<xref ref-type="bibr" rid="B11">Atlam et al., 2018</xref>; <xref ref-type="bibr" rid="B43">Eini et al., 2021</xref>; <xref ref-type="bibr" rid="B115">Lopez-Casta&#xf1;o et al., 2021</xref>; <xref ref-type="bibr" rid="B130">Mondal and Rehena, 2022</xref>; <xref ref-type="bibr" rid="B39">Debeuckelaere et al., 2023</xref>), the IoT has a great demand for the miniaturization, integration, and low power consumption of sensors (<xref ref-type="bibr" rid="B19">Botta et al., 2016</xref>; <xref ref-type="bibr" rid="B172">Silvano and Marcelino, 2020</xref>). At present, new flexible sensors have been used in medical devices, such as electronic skin, personal medical devices and prosthetics (<xref ref-type="bibr" rid="B74">Hwang et al., 2015</xref>; <xref ref-type="bibr" rid="B106">Liao et al., 2015</xref>; <xref ref-type="bibr" rid="B24">Chen et al., 2016</xref>; <xref ref-type="bibr" rid="B30">Choi et al., 2016</xref>; <xref ref-type="bibr" rid="B32">Chortos et al., 2016</xref>; <xref ref-type="bibr" rid="B54">Ge et al., 2016</xref>; <xref ref-type="bibr" rid="B146">Park et al., 2016</xref>; <xref ref-type="bibr" rid="B221">Zang et al., 2016</xref>). Recently, the proliferation of new piezoelectric crystals, piezoelectric polymers, and lead-free piezoelectric materials has led to significant improvements in electromechanical coupling response, material properties, and applications. As shown in <xref ref-type="fig" rid="F1">Figure 1</xref>, this work will present the development status of thin film sensors from four aspects: material selection, synthesis, sensor processing technology, and sensor application.</p>
<fig id="F1" position="float">
<label>FIGURE 1</label>
<caption>
<p>Framework of piezoelectric thin-film sensors, including materials, processing, and applications.</p>
</caption>
<graphic xlink:href="fmats-11-1373040-g001.tif"/>
</fig>
</sec>
<sec id="s2">
<title>2 Piezoelectric materials</title>
<p>Piezoelectric materials present a mechanical-electric coupling effect that can cause mechanical bending when electric field applied and can also cause electric charges to build up on the two ends of material when it is bent (<xref ref-type="bibr" rid="B65">Hinchet et al., 2018</xref>). Owing to both positive and negative piezoelectric effects, piezoelectric materials can be used as both sensors and actuators (<xref ref-type="bibr" rid="B77">Joseph et al., 2018</xref>; <xref ref-type="bibr" rid="B9">Antony Jeyaseelan and Dutta, 2020</xref>; <xref ref-type="bibr" rid="B141">Ni et al., 2022</xref>). In 1880, brothers Pierre and Jacques Curie demonstrated the direct piezoelectric effect for the first time. They apply mechanical stress to a variety of single crystals such as tourmaline, quartz, topaz and Rochelle salt. The stress applied to the crystal produces a measurable surface charge. However, they did not initially show that it was also possible to generate electric-induced strain. The following year, mathematician Gabriel Lippmann predicted the inverse piezoelectric effect, which the Curie brothers soon confirmed. Through MEMS process, piezoelectric thin films can be integrated on silicon substrate to make tiny sensors and controller. Recently, due to the high piezoelectricity, biocompatibility, and low dielectric constant, bio-piezoelectric materials have become one of the most potential smart materials in biology (<xref ref-type="bibr" rid="B86">Kim et al., 2020</xref>; <xref ref-type="bibr" rid="B25">Chen et al., 2023a</xref>). In this part, the classification of piezoelectric materials will be introduced in detail.</p>
<p>In this work, we considered the most common crystal structures in piezoelectric applications. From a commercial perspective, polycrystalline ferroelectrics are possible for large-scale production. Due to the arbitrary orientation of crystals in ceramics, symmetry breaking elements must be introduced externally in order to obtain piezoelectric response. Therefore, ferroelectric materials can be used for piezoelectric ceramics. They can be polarized, meaning that their polar axis can be aligned with an external electric field, resulting in the required reversal of symmetry being disrupted. Therefore, among the 20 non centrosymmetric crystal point groups with potential to exhibit piezoelectric properties, piezoelectric ceramic materials only need to consider 10&#x201c;polar&#x201d; groups: 1 (triclinic), 2, m (monoclinic), 2 mm (orthorhombic), 3, 3 m (rhombohedral), 4, 4 mm (tetragonal), 6, and 6 mm (hexagonal). Among all possible crystal structures, perovskite structure may be the most common and technically relevant. The chemical composition of perovskite is ABO<sub>3</sub>. This structure can be described as a simple cubic cell with a large cation (a site) at the corner, a small cation (B site) at the center of the body, and oxygen at the center of the face.</p>
<sec id="s2-1">
<title>2.1 Piezoelectric crystal</title>
<p>Piezoelectric crystals commonly found in various applications include quartz and water-soluble crystals such as sodium potassium tartrate, diammonium ethylene tartrate, dipotassium tartrate, and potassium sulphate (<xref ref-type="bibr" rid="B237">Zu et al., 2016</xref>; <xref ref-type="bibr" rid="B118">Lutjes et al., 2021</xref>; <xref ref-type="bibr" rid="B42">Dong et al., 2022</xref>). For polycrystalline, notable piezoelectric materials include barium titanate, zirconium lead titanate, and lead niobium magnesium oxide, et al. (<xref ref-type="bibr" rid="B143">Okayasu and Watanabe, 2016</xref>; <xref ref-type="bibr" rid="B202">Wu et al., 2016</xref>; <xref ref-type="bibr" rid="B93">Kumar et al., 2023</xref>; <xref ref-type="bibr" rid="B167">Shi et al., 2023</xref>). In 1997, large S-E strain was found in lead based relaxor ferroelectric crystals, which is widely regarded as a significant advancement in piezoelectric materials (<xref ref-type="bibr" rid="B207">Xu et al., 2000</xref>). Sm-doped lead niobium magnesium oxide-lead titanate crystals exhibit high piezoelectric coefficients exceeding 4,000 pC/N and dielectric constants with value of 12,000. The uniformity of crystals rod properties is enhanced by leveraging the sub-condensation properties of Sm elements during crystal growth. This advancement establishes a solid basis for the development of piezoelectric crystals suitable for high frequency medical ultrasound probes and high precision actuators (<xref ref-type="bibr" rid="B99">Li et al., 2019</xref>).</p>
<p>Barium titanate (BaTiO<sub>3</sub>, BT) presents high dielectric properties, which is extensively manufactured as high-frequency circuit components (<xref ref-type="bibr" rid="B83">Karvounis et al., 2020</xref>; <xref ref-type="bibr" rid="B26">Chen et al., 2022</xref>), as shown in <xref ref-type="fig" rid="F2">Figure 2A</xref>. The thermal properties of BT can be enhanced by the process of Pb and Ca co-dopant (<xref ref-type="bibr" rid="B62">Hasan et al., 2023</xref>). The enhanced piezoelectric properties in BT-based ceramics can be achieved by use of ion-pair effect and A/B-site synergistic doping modification (<xref ref-type="bibr" rid="B205">Xie et al., 2022</xref>), as seen in <xref ref-type="fig" rid="F2">Figure 2B</xref>. High <italic>d</italic>
<sub>33</sub> value (30.5 pC/N) and Curie temperature (Tc &#x3d; 657&#xb0;C) were found in Bi<sub>4</sub>Ti<sub>3</sub>-x (Zn<sub>1/3</sub>Nb<sub>2/3</sub>)xO<sub>12</sub> ceramics. Additionally, the aligned ferroelectric domains demonstrate remarkable temperature stability (<xref ref-type="bibr" rid="B205">Xie et al., 2022</xref>). Lead zirconate titanate (PZT) is a solid-state solution consisting of lead titanate (PbTiO<sub>3</sub>) and lead zirconate (PbZrO<sub>3</sub>), which is extensively used as transducers materials owing to consistent piezoelectric properties and high Curie temperature (<xref ref-type="bibr" rid="B183">Tan et al., 2019</xref>), as shown in <xref ref-type="fig" rid="F2">Figure 2C</xref>. The ceramics exhibit various features, after small amounts of dopant, such as niobium, antimony, tin, manganese, tungsten, et al. (<xref ref-type="bibr" rid="B90">Koh et al., 2022</xref>; <xref ref-type="bibr" rid="B27">Chen et al., 2023b</xref>; <xref ref-type="bibr" rid="B60">Habeeb Khan et al., 2023</xref>). With the protection of environment, lead free piezoelectric materials are widely investigated. Quartz crystals integrated on silicon substrate is shown in <xref ref-type="fig" rid="F2">Figure 2D</xref>. <xref ref-type="fig" rid="F2">Figure 2E</xref> illustrates the schematic structure of AlN crystals (<xref ref-type="bibr" rid="B47">Fei et al., 2018</xref>). Commonly used lead-free piezoelectric systems include KNN-BNT, KNN-BT, BNT-BT, BKT-BT, BNT-BT-KNN, and BNT-BKT (<xref ref-type="bibr" rid="B126">Mayamae et al., 2017</xref>; <xref ref-type="bibr" rid="B224">Zhang et al., 2022a</xref>; <xref ref-type="bibr" rid="B194">Wang et al., 2022</xref>; <xref ref-type="bibr" rid="B154">Safari et al., 2023</xref>; <xref ref-type="bibr" rid="B181">Tai et al., 2023</xref>). The S-E strain in (K, Na) NbO<sub>3</sub> polycrystalline is enhanced by solid solution near phase border, which undergoes a phase transition, as shown in <xref ref-type="fig" rid="F2">Figure 2F</xref>.</p>
<fig id="F2" position="float">
<label>FIGURE 2</label>
<caption>
<p>Crystalline unit cell and microstructure of piezoelectric materials. <bold>(A)</bold>-I: Non centrosymmetric unit cell structure of BaTiO<sub>3</sub> for tetragonal phase (below Curie temperature), and centrosymmetric unit cell structure of BaTiO<sub>3</sub> for cubic phase (above Curie temperature). <bold>(A)</bold>-II and III: Variation of cell volume at different temperatures in BaTiO<sub>3</sub> crystals (<xref ref-type="bibr" rid="B83">Karvounis et al., 2020</xref>). <bold>(B)</bold>-I, II, and III: Schematic of BT-based crystal structure and ferroelectric domain walls. <bold>(B)</bold>-IV and V: Schematic migration model of the charge carriers (<xref ref-type="bibr" rid="B205">Xie et al., 2022</xref>). <bold>(C)</bold>-I: Relationships between polarization and applied electric field in PZT. <bold>(C)</bold>-II and III: Microstructure of as-deposited PZT thin film (<xref ref-type="bibr" rid="B183">Tan et al., 2019</xref>). <bold>(C)</bold>-IV: Schematic diagram of Mn<sup>3&#x2b;</sup> valence change to generate oxygen vacancies and strengthen pinning (<xref ref-type="bibr" rid="B27">Chen et al., 2023b</xref>). <bold>(C)</bold>-V: Comparison of Mn-doped PSN-PZT among other commercially PZT-based ceramics (<xref ref-type="bibr" rid="B61">Hao et al., 2019</xref>). <bold>(D)</bold>: Two different microstructures in &#x3b1;-quartz (100) film on silicon substrate (<xref ref-type="bibr" rid="B225">Zhang et al., 2019</xref>). <bold>(E)</bold>-I, II, and III: Schematic illustration of wurtzite structure of AlN. <bold>(E)</bold>-IV: Schematic diagram of functional AlN layer deposited on AlN seed layer. <bold>(E)</bold>-V and VI: Cross-section image of AlN layer. <bold>(F)</bold>-I: Piezoelectric coefficient <italic>d</italic>
<sub>33</sub> of KNN-BF solid solutions. <bold>(F)</bold>-II, III, and IV: Scanning transmission electron microscopy (HAADF-STEM) image of KNN-BF crystals (<xref ref-type="bibr" rid="B224">Zhang et al., 2022a</xref>).</p>
</caption>
<graphic xlink:href="fmats-11-1373040-g002.tif"/>
</fig>
</sec>
<sec id="s2-2">
<title>2.2 Piezoelectric polymers and composites</title>
<p>Polar polymers like polyvinylidene fluoride (PVDF) are good examples of polymer piezoelectric materials, which show low sound resistance, and can be made into thin parts (<xref ref-type="bibr" rid="B195">Wang et al., 2023a</xref>). Polymers can be used directly in actuator and sensor, owing to electrical and mechanical energy conversion (<xref ref-type="bibr" rid="B182">Takahashi and Tadokoro, 1980</xref>; <xref ref-type="bibr" rid="B91">Koseki et al., 2012</xref>; <xref ref-type="bibr" rid="B20">Bouad et al., 2022</xref>; <xref ref-type="bibr" rid="B223">Zhang et al., 2023c</xref>). Due to big dipole moments, &#x3b2; phases PVDF exhibit high dielectric and piezoelectric properties (<xref ref-type="bibr" rid="B139">Nasir et al., 2006</xref>; <xref ref-type="bibr" rid="B163">Satapathy et al., 2011</xref>; <xref ref-type="bibr" rid="B72">Huang et al., 2021</xref>). The <italic>d</italic>
<sub>33</sub> value can reach up to 62pC/N in &#x3b2;-phase PVDF films (<xref ref-type="bibr" rid="B72">Huang et al., 2021</xref>). Polytetrafluoroethylene (PTFE) is resistant to acids, alkalis, and a wide range of organic solvents (<xref ref-type="bibr" rid="B40">Dhanumalayan and Joshi, 2018</xref>; <xref ref-type="bibr" rid="B142">Niu et al., 2022</xref>). Neutral PTFE particles (d &#x3e; &#x223c;1&#x2013;5 &#xb5;m) can be turned into piezoelectric electrets using an easy-to-use ultrasound process at faster rate than piezoelectric catalysts (<xref ref-type="bibr" rid="B199">Wang et al., 2021</xref>).</p>
<p>Compared with the piezoelectric polymer, the inorganic piezoelectric ceramic particles have high piezoelectric constant and low breakdown strength. Therefore, through adding piezoelectric ceramics powder into polymers, the composite shows high piezoelectric coefficient and low poling field (<xref ref-type="bibr" rid="B64">Hema Malini et al., 2022</xref>). Compared with individual piezoelectric components, piezoelectric composite materials can overcome the temperature boundary of piezoelectric polymers and the inherent brittleness of inorganic piezoelectric biomaterials, while also allowing for large-scale manufacturing. The addition of barium titanate particles contributes the formation of &#x3b2;-phase in PVDF membrane (<xref ref-type="bibr" rid="B84">Khan et al., 2021</xref>), as shown in <xref ref-type="fig" rid="F3">Figure 3A</xref>. Guan measured heel pressure in a new hybrid film made of lead zirconate titanate powder and micro fibrillated cellulose (PZT/MFC), which is a bendable film made with a polarization process (<xref ref-type="bibr" rid="B57">Guan et al., 2022</xref>), as presented in <xref ref-type="fig" rid="F3">Figure 3B</xref>. Li made synthetic fabric films out of mixtures of PVDF and cellulose acetate (CA). Electrostatically spun PVDF/CA fiber membranes (EFMs) were used to make flexible nanogenerators (<xref ref-type="bibr" rid="B103">Li et al., 2022a</xref>), as shown in <xref ref-type="fig" rid="F3">Figure 3C</xref>. For TiO<sub>2</sub>/SiO<sub>2</sub>/polymethyl methacrylate (PMMA)/PVDF composites, the &#x3b2; -phase content in the PVDF matrix increase from 19% to 43% as TiO<sub>2</sub> or SiO<sub>2</sub> contents increase from 0% to 5%, which made piezoelectric properties of PVDF better (<xref ref-type="bibr" rid="B233">Zhao et al., 2012</xref>; <xref ref-type="bibr" rid="B102">Li et al., 2013</xref>). A flexible ZnO/PVDF hybrid piezoelectric films with TiO<sub>2</sub> particles addition were used to make nanogenerator, showing a voltage is 2.3 times higher than that of pure PVDF nanogenerator (<xref ref-type="bibr" rid="B88">Kim et al., 2018</xref>). In a three-phase hybrid nanogenerator out of PVDF, ZnO, and BT nanorods, the output increase from 3 V to 12 V (<xref ref-type="bibr" rid="B153">Sabry and Hussein, 2019</xref>). The addition of nanoparticles can improve the crystallinity and the mount of &#x3b2; phase of the fiber films (<xref ref-type="bibr" rid="B44">Fakhri et al., 2019</xref>; <xref ref-type="bibr" rid="B215">Ye et al., 2021</xref>). Kar made a new bendable piezoelectric nanogenerator based on two-dimensional SnO<sub>2</sub> nanosheets and PVDF composites, and presented a high output rate with value of 16.3% (<xref ref-type="bibr" rid="B81">Kar et al., 2019</xref>). A three-dimensional hybrid nanostructure of MnO2/Gr/multi-walled carbon nanotubes was also used to enhance the electrical properties of PVDF (<xref ref-type="bibr" rid="B214">Yang et al., 2018</xref>). Recently, nano-piezoelectric materials, including quantum dots, two-dimensional materials and topological insulators, have been added to PVDF to improve the power output of self-powered wearable devices and achieve excellent output performance (<xref ref-type="bibr" rid="B67">Hoque et al., 2017</xref>; <xref ref-type="bibr" rid="B18">Biswas et al., 2019</xref>; <xref ref-type="bibr" rid="B12">Bagchi et al., 2020</xref>; <xref ref-type="bibr" rid="B166">Shi et al., 2020</xref>; <xref ref-type="bibr" rid="B155">Saikh et al., 2021</xref>; <xref ref-type="bibr" rid="B160">Sarkar et al., 2023a</xref>; <xref ref-type="bibr" rid="B159">Sarkar et al., 2023b</xref>). A 2D halide chalcogenide transverse heterostructures prepared by liquid-phase epitaxy, which strongly suppressed the in-plane ionic diffusion in 2D halide chalcogenides by doping rigid &#x3c0;-conjugated organic ligands (<xref ref-type="bibr" rid="B166">Shi et al., 2020</xref>).</p>
<fig id="F3" position="float">
<label>FIGURE 3</label>
<caption>
<p>
<bold>(A)</bold>-I, II, and III: Conceptual illustration of BaTiO<sub>3</sub>-PVDF composite structure before and after stretching, including the applied uniaxial stretching mechanism, polymer matrix elongation, and conversion of &#x3b1; and &#x3b3; phase PVDF to &#x3b2; phase. <bold>(A)</bold>-IV and V: SEM images of composite films before and after stretching (<xref ref-type="bibr" rid="B84">Khan et al., 2021</xref>). <bold>(B)</bold>: Structure of thin films mixed of PZT powder and MFC (<xref ref-type="bibr" rid="B57">Guan et al., 2022</xref>). <bold>(C)</bold>-I: Chemical interactions between the CA and PVDF molecular chains. <bold>(C)</bold>-II: Picture of PVDF/CA PENG. <bold>(C)</bold>-III and IV: SEM images of pure PVDF and PVDF/CA (<xref ref-type="bibr" rid="B103">Li et al., 2022a</xref>). <bold>(D)</bold>-I: Schematic synthesis approach of piezoelectric glycine-PVA films over a large area. <bold>(D)</bold>-II: Photographs of wafer-sized as-grown film (left) and largely curved film showing the flexibility (right). <bold>(D)</bold>-III and IV: Cross-sectional SEM image and EDS mapping of a sandwich-structured films. <bold>(D)</bold>-V, VI, and VII: Crystallization process of glycine-PVA sandwich thin films (<xref ref-type="bibr" rid="B212">Yang et al., 2021</xref>). <bold>(E)</bold>-I: Schematic of bio-organic films printer and the synthesis of &#x3b2;-glycine nanocrystalline films. <bold>(E)</bold>-II: Photographs of films on 4-inch silicon wafer. <bold>(E)</bold>-III: Films on flexible gold-coated polyethylene terephthalate (PET) substrate (<xref ref-type="bibr" rid="B229">Zhang et al., 2023d</xref>). <bold>(F)</bold>-I and II: PFM image of SIS films. <bold>(F)</bold>-III: Cross-sectional SEM image of untreated SIS and peeled-off SIS films. <bold>(F)</bold>-IV: Picture of SIS ultrathin films (<xref ref-type="bibr" rid="B230">Zhang et al., 2022b</xref>).</p>
</caption>
<graphic xlink:href="fmats-11-1373040-g003.tif"/>
</fig>
</sec>
<sec id="s2-3">
<title>2.3 Bio-piezoelectric materials</title>
<p>Piezoelectric biomaterials are naturally suited for coupling mechanical and electrical forces in biological systems for real-time sensing, actuation, and power generation <italic>in vivo</italic>; however, large-scale synthesis and alignment of piezoelectric phases in bio-piezoelectric thin films still a major challenge (<xref ref-type="bibr" rid="B180">Swagata et al., 2017</xref>; <xref ref-type="bibr" rid="B66">Hoque et al., 2018</xref>; <xref ref-type="bibr" rid="B94">Lay et al., 2021</xref>; <xref ref-type="bibr" rid="B158">Sarkar et al., 2021</xref>; <xref ref-type="bibr" rid="B36">Das et al., 2022</xref>; <xref ref-type="bibr" rid="B129">Mondal et al., 2022</xref>). Piezoelectric biomaterials are low symmetry, highly ordered structures, lacking inversion centers. Therefore, linear electromechanical coupling is an inherent functional characteristic of most biomolecules. Piezoelectricity has been demonstrated in various biomaterials, such as wood and bone, as well as fibrillar proteins such as collagen, chitin, and elastin, which exist in highly ordered crystalline molecular forms in mammalian tissues. The classical piezoelectric principle has been applied to similar uniaxial oriented bioactive polymers, such as poly (lactic acid) (PLLA), poly (lactic acid) &#x3b3;- Benzylglutamic acid (PBG) and cellulose 3. These biodegradable polymers have been used as piezoelectric implants to promote pure and composite forms of bone formation. As is well known, the surface charge and wettability of the scaffold control the interaction between the material cell interfaces. The shape of the bracket can be controlled through various manufacturing processes, and the additional functionalization of the material can be used to fix biochemical substances. The morphological characteristics, piezoelectric constant, and ferroelectricity of piezoelectric materials can be modified to meet specific requirements. Nanostructured PZT in the form of nanoribbons or nanowires has been developed and applied in the construction of biomedical and energy harvesting devices. However, due to its cytotoxicity, the application of PZT ceramics in tissue engineering is limited. Therefore, lead-free piezoelectric ceramics have been developed to reduce people&#x2019;s concerns about lead exposure to toxic environments.</p>
<p>Two simple, portable, cost-effective, biocompatible, and environmentally friendly piezoelectric nanogenerators (PENGs) were designed using naturally biodegradable mud volcanic clay from the Andaman and Nicobar Islands in India. The output voltage of MPENG and BPENG is &#x223c;85V, and the short-circuit current is &#x223c;1.6 &#x3bc;A. The output voltage is&#x223c;125 V, and the short-circuit current is &#x223c;1.9 &#x3bc;A. The power density is 4115 respectively &#x3bc;W/cm<sup>3</sup> and 7187 &#x3bc; W/cm<sup>3</sup> (<xref ref-type="bibr" rid="B36">Das et al., 2022</xref>). Recently, a generator can produce electrical signals when squeezed by body movement, which will lead to a wide range of uses for muscle-powered electromechanical treatments (<xref ref-type="bibr" rid="B31">Chorsi et al., 2019</xref>). A self-assemble method using lysine as a piezoelectric generator has presented a way to make a product through chemical qualities of a material, as shown in <xref ref-type="fig" rid="F3">Figure 3D</xref>. This fast self-assembly technology could greatly cut the cost of these kinds of gadgets and make them much easier to get and use.</p>
<p>A biodegradable poly nanofiber was designed to get chondrocytes and cartilage tissue grow back, which can create piezoelectric effect when stressed or loaded in a joint (<xref ref-type="bibr" rid="B212">Yang et al., 2021</xref>), as shown in <xref ref-type="fig" rid="F3">Figure 3E</xref>. Without extra battery, cartilage can be regrown by implanting the disposable PLA support and producing microcurrents while walking. After 1&#x2013;2 months of exercise, hyaline cartilage grown back in rabbits with serious osteoarticular flaws that had received piezoelectric scaffold grafts. The fully healed cartilage tissue was surrounded by a large number of chondrocytes and type II collagen. An active self-assemble method to shape piezoelectric biomaterial films is presented in <xref ref-type="fig" rid="F3">Figure 3F</xref>. Nanoconfinement caused uniform nucleation, which will get rid of dependence on interface of films (<xref ref-type="bibr" rid="B113">Liu et al., 2022b</xref>). During the process of van der waals exfoliation, ultrathin films are thinned to effective piezoelectric domain thickness (<xref ref-type="bibr" rid="B229">Zhang et al., 2023d</xref>).</p>
</sec>
</sec>
<sec id="s3">
<title>3 Synthesis of piezoelectric thin films</title>
<p>There are many ways to make piezoelectric thin films, such as vacuum evaporation, sputtering coating, chemical vapor deposition, molecular beam epitaxy, and sol-gel method. Here, a list of the most common ways to make thin films, such as AlN, KNN, ZnO, PZT, and PVDF, et al.</p>
<sec id="s3-1">
<title>3.1 AlN piezoelectric films</title>
<p>AlN thin films is a hot topic of research in RF field because they are often used in high frequency sound resonators. These films can be made by blasting with a magnetron. Zhao reported a high-quality bendable AIN piezoelectric film made with micro- and nano-fabrication technology (<xref ref-type="bibr" rid="B230">Zhang et al., 2022b</xref>). The Mo/AIN/Al structure on silicon {100} was made by blasting, and then ion etching was used to remove the silicon used as a support to get a bendable Mo/AIN/Al sandwich film (<xref ref-type="bibr" rid="B232">Zhao et al., 2020b</xref>). Wen used an RF magnetron sputtering method with aluminum-rich AlN (Al-AlN) targets to make AlN films on Si surfaces with a low number of defects (<xref ref-type="bibr" rid="B200">Wen et al., 2022</xref>). Al vacancies and O impurity defects in AlN films can be cut down with the help of modulation in AlN films. Patidar used a highly detailed oblique angle deposition method to make c-axis oriented AlN (0002) films with reactive metal ions that were timed with HiPIMS (<xref ref-type="bibr" rid="B147">Patidar et al., 2023</xref>). As shown in <xref ref-type="fig" rid="F4">Figure 4A</xref>, combining HiPIMS with a small substrate bias of only &#x2212;30 V greatly improves the crystalline quality and texture of the films. Process gas doping and point defect formation can be further reduced by synchronizing the negative substrate bias with Al. The films have a clear out-of-plane pattern and regular grain polarization.</p>
<fig id="F4" position="float">
<label>FIGURE 4</label>
<caption>
<p>
<bold>(A)</bold>: Schematic of AlN films growth using DCMS and HiPIMS methods (<xref ref-type="bibr" rid="B147">Patidar et al., 2023</xref>). <bold>(B)</bold>-I: Crystal growth diagram of PZT ferroelectric thin films with seed islands. <bold>(B)</bold>-II, III, and IV: Cross-section images of PZT (52/48) and PTO/PZT films (<xref ref-type="bibr" rid="B57">Liu et al., 2022</xref>). <bold>(C)</bold>: BNBT crystals grown by self-flux method (<xref ref-type="bibr" rid="B122">M et al., 2020</xref>). <bold>(D)</bold>-I and II: Synthesized KNN/PVDF/MWCNT films and PENG (<xref ref-type="bibr" rid="B1">Abdullah et al., 2021</xref>). <bold>(E)</bold>: Schematic of fabrication procedure of KNN/PVDF-based nanogenerator (<xref ref-type="bibr" rid="B134">Nair et al., 2022</xref>). <bold>(F)</bold>: Schematic of synthesis and fabrication of Sr<sub>x</sub>Zn<sub>1-x</sub>O nanostructured humidity sensor (<xref ref-type="bibr" rid="B6">Alg&#xfc;n et al., 2023</xref>). <bold>(G)</bold>: Schematic of transparent ZnO thin films grown on glass substrates (<xref ref-type="bibr" rid="B34">Cuadra et al., 2023</xref>). <bold>(H)</bold>: Schematic illustration of PVDF/PZT NPs fiber films preparation (<xref ref-type="bibr" rid="B218">Yuan et al., 2023</xref>). <bold>(I)</bold>: Schematic preparation of Cu<sub>x</sub>O/PVDF films (<xref ref-type="bibr" rid="B220">Zakria et al., 2023</xref>).</p>
</caption>
<graphic xlink:href="fmats-11-1373040-g004.tif"/>
</fig>
<p>One of the best ways to enhance piezoelectric response of AlN thin films is to mix it with other elements to make conformal films. By mixing transition metals (TMs, TM &#x3d; Sc, Cr, Sr, Mo, Ru, and Rh, etc.), TM-N bonds become weak and move the TM atoms closer to the centers of the three nearby N atoms. It was found that the place of the TMs was strongly linked to their group number (<xref ref-type="bibr" rid="B4">Akiyama et al., 2009a</xref>; <xref ref-type="bibr" rid="B3">Akiyama et al., 2009b</xref>; <xref ref-type="bibr" rid="B117">Luo et al., 2009</xref>; <xref ref-type="bibr" rid="B107">Liu et al., 2013</xref>; <xref ref-type="bibr" rid="B127">Mayrhofer et al., 2015</xref>; <xref ref-type="bibr" rid="B69">Hu et al., 2018</xref>; <xref ref-type="bibr" rid="B125">Manna et al., 2018</xref>; <xref ref-type="bibr" rid="B211">Yanagitani and Jia, 2019</xref>; <xref ref-type="bibr" rid="B49">Fiedler et al., 2021</xref>; <xref ref-type="bibr" rid="B48">Feng et al., 2022</xref>; <xref ref-type="bibr" rid="B121">Lv et al., 2023a</xref>; <xref ref-type="bibr" rid="B147">Patidar et al., 2023</xref>; <xref ref-type="bibr" rid="B222">Zha et al., 2023</xref>). For Mo dopant, piezoelectric coefficient <italic>d</italic>
<sub>33</sub> of AlN: Mo (3.46%) films reached to 7.33 pm/V (<xref ref-type="bibr" rid="B48">Feng et al., 2022</xref>). In the past few years, research has been done to figure out how to make high-quality mixed epitaxial films of AlN. Using nanopatterned AlN/sapphire templates with regular hexagonal holes, the dislocation, etch pit density in AlN heteroepitaxial thin films was reduced to about 104 cm<sup>-2</sup>, which is close to value in AlN bulk crystals, by controlling the separation and grouping of the columns (<xref ref-type="bibr" rid="B176">A strategy for obtaining AlN, 2023</xref>).</p>
</sec>
<sec id="s3-2">
<title>3.2 PZT piezoelectric films</title>
<p>PZT piezoelectric thin films are widely used, which can be made by various methods, such as magnetron sputtering (<xref ref-type="bibr" rid="B15">Bekle&#x161;ovas et al., 2022</xref>), chemical vapour deposition (<xref ref-type="bibr" rid="B10">Aratani et al., 2001</xref>), molecular beam epitaxial growth, hydrothermal synthesis (<xref ref-type="bibr" rid="B17">Bian et al., 2016</xref>), pulsed laser deposition (<xref ref-type="bibr" rid="B53">Gatabi et al., 2017</xref>), and sol-gel (<xref ref-type="bibr" rid="B96">Lee et al., 2021</xref>).</p>
<p>High performance PZT films were obtained on fluorine-doped tin oxide (FTO)-coated aluminum borosilicate glass (AG) surfaces using a modified sol-gel method (<xref ref-type="bibr" rid="B41">Di Marco et al., 2023</xref>). Liu made Pb (Zr<sub>0.52</sub>Ti<sub>0.48</sub>)O<sub>3</sub> thin films with islands of Pb(Zr<sub>x</sub>Ti<sub>1-x</sub>)O<sub>3</sub> solid species using the sol-gel method (<xref ref-type="bibr" rid="B110">Liu et al., 2022c</xref>), as shown in <xref ref-type="fig" rid="F4">Figure 4B</xref>. The Pb(Zr<sub>0.52</sub>Ti<sub>0.48</sub>)O<sub>3</sub> films have been changed by Pb(Zr<sub>x</sub>Ti<sub>1-x</sub>)O<sub>3</sub> crystalline seed islands with different Zr/Ti ratios, presenting higher dielectric constant, lower coercive electric field, and less leakage current density. Furthermore, PbZr<sub>0.52</sub>Ti<sub>0.48</sub>O<sub>3</sub> thin films were successfully made by the sol-gel method at ultra-low temperature (450 &#xb0;C) in an oxygen plasma-assisted environment in Ref. (<xref ref-type="bibr" rid="B112">Li et al., 2023a</xref>), which can be used to make modern CMOS devices.</p>
<p>After fast thermal annealing at 620&#xb0;C, a high energy storage density of 10.0 J/cm<sup>3</sup> was obtained in PbZr<sub>0.52</sub>Ti<sub>0.48</sub>O<sub>3</sub> (PZT)/PbZrO<sub>3</sub> (PZ) hybrid films on a LaNiO<sub>3</sub>/SiO<sub>2</sub>/Si substrate synthesized by sol-gel method (<xref ref-type="bibr" rid="B213">Yang et al., 2023</xref>). Rhun grown thick PZT films on platinum-coated silicon plates using sol-gel method, and move PZT films and ITO electrodes onto glass substrates (<xref ref-type="bibr" rid="B98">Le Rhun et al., 2022</xref>). In visual range, the average amount of light that get through PZT stacks on glass was 70%, which makes it possible to make clear piezoelectric motors on glass for high-performance haptic devices and other new uses, like self-cleaning or making smart windows.</p>
</sec>
<sec id="s3-3">
<title>3.3 Relaxor ferroelectric crystals</title>
<p>Flexible piezoelectric films composed of lead magnesium niobate and lead titanate (PMN-PT) and multi-walled carbon nanotubes (MW-CNTs) were prepared in polyvinylidene fluoride (PVDF) matrix for green energy harvesting and self-power supply (<xref ref-type="bibr" rid="B38">Das et al., 2017</xref>; <xref ref-type="bibr" rid="B238">Das et al., 2018</xref>). Fully artificial transparent Sm-doped Pb(Mg<sub>1/3</sub>Nb<sub>2/3</sub>)O<sub>3</sub>-PbTiO<sub>3</sub> (Sm:PMN-PT) thin films on mica substrates were fabricated by one step sol-gel process. The films show high <italic>d</italic>
<sub>33</sub> with value of 380 pm/V, indicating potential use for mechanical energy gathering, motion tracking, and human-computer interaction (<xref ref-type="bibr" rid="B38">Das et al., 2017</xref>; <xref ref-type="bibr" rid="B120">Lv et al., 2022</xref>).Using a self-flux method, large size of lead free 0.94 (Bi<sub>1/2</sub> Na<sub>1/2</sub>) TiO<sub>3</sub> -0.06BaTiO<sub>3</sub> (BNBT) piezoelectric crystals were grown by self-flux method, as shown in <xref ref-type="fig" rid="F4">Figure 4C</xref>.</p>
</sec>
<sec id="s3-4">
<title>3.4 KNN piezoelectric films</title>
<p>Several methods are used to make KNN-based piezoelectric films, such as alkaline methods, pulsed laser methods, and sol-gel methods (<xref ref-type="bibr" rid="B13">Bai et al., 2011</xref>; <xref ref-type="bibr" rid="B85">Khorrami et al., 2017</xref>; <xref ref-type="bibr" rid="B5">Akmal et al., 2018</xref>; <xref ref-type="bibr" rid="B165">Sharma et al., 2019</xref>; <xref ref-type="bibr" rid="B46">Fast et al., 2020</xref>; <xref ref-type="bibr" rid="B92">Kovacova et al., 2020</xref>; <xref ref-type="bibr" rid="B1">Abdullah et al., 2021</xref>; <xref ref-type="bibr" rid="B28">Cheng et al., 2022</xref>; <xref ref-type="bibr" rid="B134">Nair et al., 2022</xref>). Because of the advances in flexible piezoelectric nanogenerators, alkali metal niobates have received a lot of attention and are considered an environmentally friendly choice for lead-based piezoelectric materials. Abu used potassium sodium niobate (KNN) to make an energetic film (<xref ref-type="bibr" rid="B1">Abdullah et al., 2021</xref>), as shown in <xref ref-type="fig" rid="F4">Figure 4D</xref>. It was used to make copper plates for a piezoelectric nanogenerator (PENG). It was also shown that KNN-based energy films could be used for multipurpose uses (like force and pressure sensors) and lead-free energy harvesting. As shown in <xref ref-type="fig" rid="F4">Figure 4E</xref>, Nair made a lead-free foldable piezoelectric nanogenerator out of KNN-PVDF nanocomposites (<xref ref-type="bibr" rid="B134">Nair et al., 2022</xref>). Cheng investigated the strengthening effect of CuO-doped KNN-based ceramics, and found that Cu doping strongly upset the ferroelectric ordering (<xref ref-type="bibr" rid="B28">Cheng et al., 2022</xref>). An idea of using solution synthesis to keep the alkali chemistry of the Mn-doped KNN films uniform was given in Ref. (<xref ref-type="bibr" rid="B92">Kovacova et al., 2020</xref>). A uniform grain size of 80 nm and a leakage current density of 2.8&#x2a;10<sup>&#x2212;8</sup> A/cm<sup>2</sup> under an electric field of up to 600 kV/cm were obtained in chemically uniform KNN thin films.</p>
</sec>
<sec id="s3-5">
<title>3.5 ZnO piezoelectric films</title>
<p>ZnO thin films can be made by blasting with an RF magnetron (<xref ref-type="bibr" rid="B101">Li et al., 2018</xref>; <xref ref-type="bibr" rid="B175">Sonklin et al., 2022</xref>; <xref ref-type="bibr" rid="B6">Alg&#xfc;n et al., 2023</xref>; <xref ref-type="bibr" rid="B34">Cuadra et al., 2023</xref>; <xref ref-type="bibr" rid="B78">Kahveci et al., 2023</xref>; <xref ref-type="bibr" rid="B133">Murthy et al., 2023</xref>; <xref ref-type="bibr" rid="B187">Toma et al., 2023</xref>). {002} oriented Li-doped ZnO thin films on SiO<sub>2</sub>/Si was obtained using RF magnetron sputtering, when the sputtering power was 220 W and the Li-doped concentration was 5% (<xref ref-type="bibr" rid="B108">Li et al., 2018</xref>). As shown in <xref ref-type="fig" rid="F4">Figure 4F</xref>, nanoparticles of undoped zinc oxide (ZnO) and Sr<sub>x</sub>Zn<sub>1-x</sub> (x &#x3d; 0.01, 0.02, 0.03, 0.04, and 0.10) were synthesized using the sol-gel method (<xref ref-type="bibr" rid="B6">Alg&#xfc;n et al., 2023</xref>), as shown in <xref ref-type="fig" rid="F4">Figure 4F</xref>. As shown in <xref ref-type="fig" rid="F4">Figure 4G</xref>, high crystallinity ZnO thin films were synthesized by a spray pyrolysis method, show antibacterial qualities when exposed to UV light (<xref ref-type="bibr" rid="B34">Cuadra et al., 2023</xref>). Transparent conductive films were made by sputtering Ga-doped and (Ga &#x2b; Nd)-doped ZnO films with an RF magnetron (<xref ref-type="bibr" rid="B187">Toma et al., 2023</xref>). It was found that undoped ZnO has a resolution of 85% in the visible range. Using sol-gel dip coating method, Murthy putted thin plates of aluminum and rubidium-doped ZnO on glass surfaces (<xref ref-type="bibr" rid="B133">Murthy et al., 2023</xref>), and found that the quality of crystals gets worse because of lattice stress after Rb particles added to a ZnO host lattice.</p>
</sec>
<sec id="s3-6">
<title>3.6 PVDF piezoelectric films</title>
<p>There are several ways to make PVDF films, such as electrostatic spinning, solution casting, solution casting, spin coating method, electro-spinning technique, stretching, vacuum evaporation, and homogenization, etc (<xref ref-type="bibr" rid="B76">Jin et al., 2021</xref>; <xref ref-type="bibr" rid="B216">Yen et al., 2022</xref>; <xref ref-type="bibr" rid="B37">Das et al., 2023</xref>; <xref ref-type="bibr" rid="B55">Ghosh et al., 2023</xref>; <xref ref-type="bibr" rid="B128">Mishra et al., 2023</xref>; <xref ref-type="bibr" rid="B161">Sarkar et al., 2024</xref>). The scratch spraying method was used to make polyvinylidene fluoride-trifluoro ethylene (PVDF-TrFE) copolymers (<xref ref-type="bibr" rid="B173">Singh et al., 2018</xref>; <xref ref-type="bibr" rid="B16">Bhunia et al., 2019</xref>; <xref ref-type="bibr" rid="B59">Gupta et al., 2019</xref>; <xref ref-type="bibr" rid="B157">Sapkota et al., 2022</xref>). In first step, cobalt ferrite (CoFe<sub>2</sub>O<sub>4</sub>) nanoparticles were made using acoustic chemistry. In second step, cobalt ferrite nanoparticles with different weight percentages (0, 2.5, 5, and 10%) were added to PVDF-TrFE to make nanocomposites. As shown in <xref ref-type="fig" rid="F4">Figure 4H</xref>, an electrostatic spinning process was employed to make polyvinylidene difluoride matrix fiber membranes with modified lead zirconate titanate nanoparticles (PZT NPs) (<xref ref-type="bibr" rid="B218">Yuan et al., 2023</xref>). The inserted particles changed the distribution of polarized electric field, which helped to polarize PVDF. As shown in <xref ref-type="fig" rid="F4">Figure 4I</xref>, thin films substrate is made of flexible hollow fiber polymer membranes sprayed with thin layers of photocatalyst (<xref ref-type="bibr" rid="B220">Zakria et al., 2023</xref>). Copper oxide/polyvinylidene fluoride thin film hollow fiber membranes (Cu<sub>x</sub>O/PVDF TF HFM) were made by spraying Cu<sub>x</sub>O on PVDF hollow fiber membranes (HFM) with a radio frequency (RF) magnetron. As much as 91% of the BPA was taken out of the cleaned wastewater by irradiation. After three rounds in a row, the efficiency of recycling hit about 71.3%. Flexible nanocomposite films were made by adding BFO powder to copolymers PVDF-TrFE and PVDF-HFP, showing high output voltage (<xref ref-type="bibr" rid="B188">Tripathy et al., 2023</xref>). Dielectric constant was reached up to 40 in an independent flexible hybrid film made of polyvinylidene fluoride (PVDF) and molybdenum disulphide (MoS<sub>2</sub>) nanoflakes synthesized by sol-gel method, which was to be 5 times more than that of pure PVDF (<xref ref-type="bibr" rid="B75">Jangra et al., 2023</xref>). A lead-free, facile, low-cost, sol-gel-processed reduced graphene oxide (rGO)/P(VDF-TrFE) nanocomposite with multipurpose capability demonstration as a piezoelectric nanogenerator (PENG) and hybrid piezoelectric triboelectric nanogenerator (HPTENG) devices is presented in Ref.171. The maximum output power densities of hybrid piezo-triboelectric and piezoelectric devices are 0.28 W/cm3 and 0.34 mW/cm3, respectively. The triboelectric device demonstrates the direct illumination of 45 blue light-emitting diodes, which are connected in series to collect the mechanical energy generated by repeated finger taps (<xref ref-type="bibr" rid="B16">Bhunia et al., 2019</xref>).</p>
</sec>
</sec>
<sec id="s4">
<title>4 Applications in self-powered IoT devices</title>
<sec id="s4-1">
<title>4.1 Energy harvesting</title>
<p>Gathering energy from surrounding environment, like mechanical vibration, heat, fluid flow, electromagnetic radiation in form of light and radio waves (RF), and energy from body can provide clean power to run electronic devices like wireless sensor networks, mobile electronics, and wearable and implantable biomedical devices (<xref ref-type="bibr" rid="B170">Shirvanimoghaddam et al., 2016</xref>; <xref ref-type="bibr" rid="B108">Liu et al., 2018</xref>; <xref ref-type="bibr" rid="B201">Won et al., 2018</xref>; <xref ref-type="bibr" rid="B7">Ali et al., 2019</xref>). Mechanical energy is the most common type of energy that can be turned into useful power (<xref ref-type="bibr" rid="B197">Wang, 2012</xref>; <xref ref-type="bibr" rid="B68">Hu et al., 2019</xref>; <xref ref-type="bibr" rid="B82">Karan et al., 2019</xref>; <xref ref-type="bibr" rid="B178">Sun et al., 2019</xref>; <xref ref-type="bibr" rid="B209">Yan et al., 2019</xref>). Piezoelectric energy harvesting is a very easy way to turn mechanical energy in the environment into electrical energy. Because piezoelectric effect is based on intrinsic polarization of the material and does not need a separate voltage source, a magnetic field, or contact with another material, like electrostatic, electromagnetic, and friction electrical energy harvesting (<xref ref-type="bibr" rid="B206">Xie and Wang, 2015</xref>; <xref ref-type="bibr" rid="B193">Wang et al., 2018</xref>). Compared to other energy harvesting methods, their density output and voltage output are 3&#x2013;5 times higher (<xref ref-type="bibr" rid="B87">Kim et al., 2011</xref>; <xref ref-type="bibr" rid="B204">Wu et al., 2015</xref>; <xref ref-type="bibr" rid="B168">Shi et al., 2018</xref>; <xref ref-type="bibr" rid="B22">Chen et al., 2019</xref>; <xref ref-type="bibr" rid="B56">Guan et al., 2020</xref>). Piezoelectric units are easy to integrate to microelectromechanical systems (<xref ref-type="bibr" rid="B123">Madinei et al., 2016</xref>; <xref ref-type="bibr" rid="B236">Zhou et al., 2020</xref>). It has been used in many fields, such as buildings, transportation, wireless electronics, MEMS, the Internet of Things (IoT), personal and internal healthcare devices (<xref ref-type="bibr" rid="B171">Siang et al., 2018</xref>).</p>
<p>Gao suggested a cantilever energy harvester using PIN-PMN-PT crystals, showing high power output with value of 102 W/m<sup>3</sup>. The designed energy generator worked well to power wireless devices for tracking and sending data, which could help to give power supply of IoT systems in a safe way (<xref ref-type="bibr" rid="B52">Gao et al., 2020</xref>). As shown in <xref ref-type="fig" rid="F5">Figure 5A</xref>, a droplet-based generator (DEG) for gathering energy from the natural environment has been designed (<xref ref-type="bibr" rid="B105">Li et al., 2022b</xref>). The self-capacitance effect of upper electrode enables an ultra-high instantaneous peak output power with value of 765 W/m<sup>2</sup>. As shown in <xref ref-type="fig" rid="F5">Figure 5B</xref>, Petritz presents an energy harvesting system used ferroelectric polymer transducers and organic diodes (<xref ref-type="bibr" rid="B148">Petritz et al., 2021</xref>). These components are seamlessly integrated onto ultrathin substrates with 1 &#xb5;m in thickness.</p>
<fig id="F5" position="float">
<label>FIGURE 5</label>
<caption>
<p>
<bold>(A)</bold>-I: Application of SCE-DEG on building&#x2019;s roofs. <bold>(A)</bold>-II: Output voltage of SCE-DEG (<xref ref-type="bibr" rid="B105">Li et al., 2022b</xref>). <bold>(B)</bold>-I: Photograph of ultra-flexible P(VDF:TrFE)70:30-based transducer. <bold>(B)</bold>-II, III, and IV: Electrical properties of ferroelectric layers (<xref ref-type="bibr" rid="B148">Petritz et al., 2021</xref>). <bold>(C)</bold>-I: Thermoelectric conversion test system. <bold>(C)</bold>-II to V: Electrical properties of various PPM films (<xref ref-type="bibr" rid="B203">Wu et al., 2023</xref>). <bold>(D)</bold>-I: Structures of flexible ZnO@CF/PVDF composite films. <bold>(D)</bold>-II: Strain&#x2013;stress curve of ZnO@CF/PVDF composite films (<xref ref-type="bibr" rid="B104">Li et al., 2023b</xref>). <bold>(E)</bold>-I: NiO epidermal temperature sensors attached at various facial positions. <bold>(E)</bold>-II: Continuous monitoring of breathing. <bold>(E)</bold>-III: Real-time monitoring of hyperventilation recorded in conjunction with SpO<sub>2</sub> change during incremental exercise test (<xref ref-type="bibr" rid="B169">Shin et al., 2020</xref>). <bold>(F)</bold>-I: Voiceprint and humidity signals during speaking of different volunteers. <bold>(F)</bold>-II: Response of sensors to different frequencies of human respiration. <bold>(F)</bold>-III: Voiceprint and humidity response signal of sensors in noisy environment (<xref ref-type="bibr" rid="B63">Sun et al., 2023</xref>). <bold>(G)</bold>-I: Schematic diagram of bent SPAS. <bold>(G)</bold>-II and III: Output voltage of BG ZnO NRs from bending parallel and vertically along rubbing direction. <bold>(G)</bold>-IV to VII: Output voltage and current density in devices connected in forward and reverse directions (<xref ref-type="bibr" rid="B95">Lee et al., 2014</xref>). <bold>(H)</bold>-I: Schematic fabrication of flexible breathable electronic sensor by elaborately assembling conductive MXene nanosheets and AgNWs. <bold>(H)</bold>-II and III: Performance of flexible breathable sensors before and after therapy. <bold>(H)</bold>-IV: NIR thermal images of wrist bending (<xref ref-type="bibr" rid="B21">Chao et al., 2023</xref>).</p>
</caption>
<graphic xlink:href="fmats-11-1373040-g005.tif"/>
</fig>
<p>The progress of CMOS has significantly contribution to self-powered direct current (DC-type) energy harvesters operating at low input voltages, enhancing the overall performance of these energy harvesters (<xref ref-type="bibr" rid="B192">Wang and Li, 2016</xref>). Lei presented a surface engineering approach for transparent conductive membranes using self-assembled monolayers (SAMs) in conjunction with silver nanowires (AgNWs) for triboelectric nanogenerators (TENGs) and self-powered pressure sensors (<xref ref-type="bibr" rid="B97">Lei et al., 2023</xref>). The enhanced.</p>
<p>TENG has a notable capability to function as a pressure sensor array (4 &#xd7; 4 pixels) for trajectory tracking, with a high sensitivity of 221 V-kPa-1. As shown in <xref ref-type="fig" rid="F5">Figure 5C</xref>, Wu developed sensors using composite thin-film infrared sensor arrays for imaging human hand (<xref ref-type="bibr" rid="B203">Wu et al., 2023</xref>), indicating potential use of self-powered infrared sensor in wearable non-visual sensing and smart sensing applications. As shown in <xref ref-type="fig" rid="F5">Figure 5D</xref>, piezoelectric sensors were designed for real-time monitoring of meteorological wind and rain (<xref ref-type="bibr" rid="B104">Li et al., 2023b</xref>). The ZnO@CF/PVDF composite thin film PNG demonstrates a maximum output power of 7.9 &#x3bc;W under an external load of 10 M&#x3a9;. Furthermore, the remarkable washing resistance, longevity exceeding 50,000 cycles, and sustained stability over a period of 12 months make the composite film as a viable candidate for deployment of weather sensor in autonomous vehicles. Finally, self-powered physiological monitoring devices have the capability to consistently monitor and transmit electrocardiogram (ECG), blood pressure, temperature, and exercise parameters of the human body (<xref ref-type="bibr" rid="B210">Yan et al., 2023</xref>).</p>
</sec>
<sec id="s4-2">
<title>4.2 Flexible sensors</title>
<sec id="s4-2-1">
<title>4.2.1 Bio-medical sensors</title>
<p>Due to the pressing demands of industry, flexible sensors have been significant investigated and focused on strain sensors for accurate motion detection, particularly in relation to human muscles (<xref ref-type="bibr" rid="B58">Gullapalli et al., 2010</xref>). Photodetectors designed for biomonitoring, such as continuous glucose monitoring, have experienced substantial growth in research efforts (<xref ref-type="bibr" rid="B33">Chung et al., 2019</xref>; <xref ref-type="bibr" rid="B186">Teymourian et al., 2020</xref>; <xref ref-type="bibr" rid="B235">Zhou et al., 2021</xref>). In addition, there is emerging interest in the advancement of temperature and humidity sensors (<xref ref-type="bibr" rid="B145">Park et al., 2012</xref>; <xref ref-type="bibr" rid="B70">Huang et al., 2013</xref>; <xref ref-type="bibr" rid="B144">Pandey et al., 2014</xref>; <xref ref-type="bibr" rid="B136">Nakajima and Tsuchiya, 2015</xref>; <xref ref-type="bibr" rid="B51">Fujita et al., 2016</xref>; <xref ref-type="bibr" rid="B135">Nakajima et al., 2017</xref>; <xref ref-type="bibr" rid="B137">Nakajima and Tsuchiya, 2020</xref>; <xref ref-type="bibr" rid="B169">Shin et al., 2020</xref>; <xref ref-type="bibr" rid="B189">Trudeau et al., 2020</xref>). There has been a notable surge in use of flexible gas sensors (<xref ref-type="bibr" rid="B131">Monereo et al., 2011</xref>; <xref ref-type="bibr" rid="B8">Alrammouz et al., 2018</xref>; <xref ref-type="bibr" rid="B50">Fioravanti and Carotta, 2020</xref>; <xref ref-type="bibr" rid="B177">Sugahara et al., 2020</xref>) and electrochemical sensors (<xref ref-type="bibr" rid="B71">Huang et al., 2011</xref>; <xref ref-type="bibr" rid="B156">Santos et al., 2014</xref>; <xref ref-type="bibr" rid="B124">Manjakkal et al., 2020</xref>) on purpose of real-time monitoring. This monitoring approach involves the analysis of human breath and sweat to effectively identify pre-symptomatic conditions with a high level of accuracy. Furthermore, flexible magnetic sensors have been extensively investigated for muscles and brain applications (<xref ref-type="bibr" rid="B162">Satake et al., 2019</xref>).</p>
<p>As shown in <xref ref-type="fig" rid="F5">Figure 5E</xref>, Shin presented a novel conceptual framework for artificial skin using negative temperature coefficient (NTC) materials (<xref ref-type="bibr" rid="B169">Shin et al., 2020</xref>). Utilizing a network of physiological temperature sensors to evaluate the performance of temperature-sensitive artificial skin in the measurement of exhaled breath temperature, the early advancement of pathogenic conditions inside the respiratory system was identified.</p>
<p>On purpose of healthcare monitoring, Nakajima produced thermistor-on-a-polyimide sheet thin-film sensor arrays using strontium- and nickel-doped chalcogenide SmMnO3 (<xref ref-type="bibr" rid="B137">Nakajima and Tsuchiya, 2020</xref>). At bending angles of 60&#xb0; and 20&#xb0;, thermistor sensor exhibited notable resilience when subjected to a bending angle of 60&#xb0; and a minimal bending radius of 500 &#x3bc;m. During a bending test including over 1,000 cycles, the observed temperature variation remained within a narrow range of 0.1&#xb0;C. Sun developed a humidity sensor with a flexible design using multi-walled carbon nanotubes (MWCNTs) that were securely affixed to the surface folds of a natural latex membrane (<xref ref-type="bibr" rid="B63">Sun et al., 2023</xref>), as shown in <xref ref-type="fig" rid="F5">Figure 5F</xref>. The sensor has a rapid reaction time of 0.7 s and a broad humidity detection range (0%&#x2013;100%) due to the weak contact link between multi-walled carbon nanotubes (MWCNTs) and water molecules. Consequently, it can effectively detect human breathing at a frequency of 1 Hz.</p>
<p>As shown in <xref ref-type="fig" rid="F5">Figure 5G</xref>, Lee presented a cutting-edge development in the form of an ultrathin self-powered artificial skin (SPAS) that relies on the utilization of piezoelectric nanogenerators (<xref ref-type="bibr" rid="B95">Lee et al., 2014</xref>). The sensor is capable of gathering and storing elastic deformation energy produced as by bending and stretching movements of skin. Rim shown a novel approach including a conformal biosensor for fabrication of highly responsive field effect transistors (FETs) based on 2O<sub>3</sub> (<xref ref-type="bibr" rid="B151">Rim et al., 2015</xref>). Ultrathin films with a thickness of 3.5 nm were fabricated, exhibiting high density and uniformity over a large surface area. Wang fabricated a flexible strain sensor by incorporating silver nanowires onto carbon black-modified electrostatically spun thermoplastic polyurethane fabric sheets, demonstrating high level of sensitivity with a strain factor over 16,000 (<xref ref-type="bibr" rid="B198">Wang et al., 2023b</xref>). It also possesses a wide strain range, spanning from 360.0% to 1%. Chao developed a permeable epidermal sensor by arranging conductive MXene nanosheets and silver nanowires on electrostatically spun elastic substrate (<xref ref-type="bibr" rid="B21">Chao et al., 2023</xref>).</p>
<p>As shown in <xref ref-type="fig" rid="F5">Figure 5H</xref>, He presented a method for fabrication of robust nanocomposite organic hydrogel (NCO hydrogel) strain sensors and their integration into a flexible wearable device (<xref ref-type="bibr" rid="B63">He et al., 2023</xref>). The NCO hydrogel was affixed to substrate and linked to Bluetooth module in order to developing a portable wearable device for surveillance of human motion. Flexible sensors possess a broad spectrum of potential applications for monitoring and tracking human health in real-time (<xref ref-type="bibr" rid="B116">Luo et al., 2023</xref>). Nevertheless, the primary material used in flexible sensors is thin films.</p>
</sec>
<sec id="s4-2-2">
<title>4.2.2 Flexible RFID</title>
<p>Several challenges still need to be addressed in field of industry, particularly the design of flexible micro-nano mechanical sensors and measurement of various physical quantities such as pressure, piezoelectricity, and strain. Additionally, the synthesis of sensitive materials, conductive inks, large-area printed electronics for mass production, require further resolution.</p>
<p>The prevailing technology for authentication in the internet of things (IoT) is radio frequency identification (RFID). RFID is a wireless, non-contact automatic identification technology that enables the identification of specific targets, and reading and writing of relevant data through radio signals. Wang designed a detection system that utilized reeds and switch-based proximity sensors (<xref ref-type="bibr" rid="B196">Wang et al., 2023c</xref>). The integration of sensors with distinct passive RFID tags has been shown in <xref ref-type="fig" rid="F6">Figure 6A</xref>. RFID technology can be effectively used in field of structural health monitoring (SHM), a critical aspect in guaranteeing operational safety, such as pipelines, storage tanks, aero planes, ships, and automobiles (<xref ref-type="bibr" rid="B14">Baumbauer et al., 2020</xref>; <xref ref-type="bibr" rid="B140">Nesser et al., 2023</xref>). As shown in <xref ref-type="fig" rid="F6">Figure 6B</xref>, high sensitivity strain measurement data can be wireless transferred by RFID. As shown in <xref ref-type="fig" rid="F6">Figure 6C</xref>, Tekcin designed a pliable sensor that relies on an inductive-capacitive (LC) circuit and a parallel-plate capacitive sensing unit (<xref ref-type="bibr" rid="B184">Tekcin et al., 2022</xref>). The piezoresistive properties were enhanced through the addition of tailored fractures. Lv presented a novel flexible sensor integrated pyramidal micropatterns with ion-gel nanofibers, enabling it to effectively detect both normal and tangential forces (<xref ref-type="bibr" rid="B119">Lv et al., 2023b</xref>). As shown in <xref ref-type="fig" rid="F6">Figure 6D</xref>, Kanazawa presented a flexible sensor designed for measuring the distribution of wind pressure (<xref ref-type="bibr" rid="B80">Kanazawa and Ushijima, 2020</xref>). To enhance the mechanical mobility of resistive strain sensor matrix against wind, a suspension structure was integrated into a plastic sheet. The use of mechanically functionalized substrates gives an opportunity for the advancement of flexible electronics. Chen designed anisotropic magneto resistive (AMR) sensors on flexible substrates (<xref ref-type="bibr" rid="B23">Chen and Zhang, 2023</xref>). The AMR sensors demonstrated a maximum bending radius of around 2.3 cm under mechanical bending, illustrating the practicality of producing compact AMR sensors on flexible substrates for detecting magnetic fields in non-planar scenarios, as shown in <xref ref-type="fig" rid="F6">Figure 6E</xref>.</p>
<fig id="F6" position="float">
<label>FIGURE 6</label>
<caption>
<p>
<bold>(A)</bold>: Multiple smart screen-printed flexible RFID enabled self-powered sensor tags (<xref ref-type="bibr" rid="B196">Wang et al., 2023c</xref>). <bold>(B)</bold>-I and II: Photographic of designed LC sensor. <bold>(B)</bold>-III: SEM image of electrodes on sensors. <bold>(B)</bold>-IV: Resistance variation of cracked Cr/Au film under strain steps. <bold>(B)</bold>-V: Application of supersensitive passive RFID strain sensors (<xref ref-type="bibr" rid="B140">Nesser et al., 2023</xref>). <bold>(C)</bold>: Experimental apparatus for impedance measurement (<xref ref-type="bibr" rid="B184">Tekcin et al., 2022</xref>). <bold>(D)</bold>-I: A kind of wind pressure distribution sensor. <bold>(D)</bold>-II: Deflection of suspended structure and resistance recorded by single sensor for different wind pressures (<xref ref-type="bibr" rid="B80">Kanazawa and Ushijima, 2020</xref>). <bold>(E)</bold>-I and II: Micro-structures of PNG flexible composite films and experimental instrument. <bold>(E)</bold>-III: Current output of the devices (<xref ref-type="bibr" rid="B119">Lv et al., 2023b</xref>).</p>
</caption>
<graphic xlink:href="fmats-11-1373040-g006.tif"/>
</fig>
</sec>
</sec>
</sec>
<sec sec-type="conclusion" id="s5">
<title>5 Conclusion</title>
<p>The emergence of self-powered flexible electronic systems represents a huge paradigm shift in the future of electronics in the field of human friendliness or human integration. In particular, by capturing permanent energy and generating electricity from abundant mechanical energy, such systems are of direct interest for applications in sensor networks and wearable electronics. The rapid development of wearable devices and portable electronic systems has raised the demand for transferable, adaptable, wearable, flexible, mechanically robust and stable energy sources that can provide the required power from renewable sources. In this work, we highlight the latest advances and achievements in field of piezoelectric thin film used as self-powered sensors. Firstly, piezoelectric energy conversion materials are the core of sensor function. Crystalline structure, morphology and electrical properties in several kinds of piezoelectric thin films, especially high-performance lead-based films, lead free films, and biofilms, are reviewed. In addition, piezoelectric properties of films doped with various elements are summarized and the corresponding synthesis processes are analyzed. Second, manufacturing process of thin film sensors is outlined, followed by a brief overview of techniques used in microelectromechanical system (MEMS) processing. Furthermore, industrial practices regarding batch fabrication of MEMS are analyzed. Thirdly, the application scenarios of latest thin film sensors used in internet of things are introduced, including energy harvesting, biosensors, RF sensors, et al. It highlights the significant performance improvements presented by these advanced thin film sensors in different application areas. Finally, the existing thin film technique is subject to several restrictions, including challenges in industrial preparation and processing, as well as issues related to dimensional accuracy, among others. Future research should consider improving film quality and developing ecologically sustainable film production methods. Piezoelectric self-powered nanogenerators can be used in wearable electronic products, medical devices, automotive sensors, and wireless sensor monitoring systems without affecting the environment. This review is aimed at guiding the next-generation to pay more attention to piezoelectric flexibility sensors.</p>
</sec>
</body>
<back>
<sec id="s6">
<title>Author contributions</title>
<p>ZS: Conceptualization, Writing&#x2013;original draft, Writing&#x2013;review and editing. RH: Investigation, Visualization, Writing&#x2013;review and editing. FJ: Conceptualization, Formal Analysis, Resources, Validation, Writing&#x2013;original draft.</p>
</sec>
<sec sec-type="funding-information" id="s7">
<title>Funding</title>
<p>The author(s) declare that financial support was received for the research, authorship, and/or publication of this article. This work was funded by Major Project of Colleges and Universities Natural Science Foundation in Jiangsu Province (21KJA470003) and Wuxi University Research Start-up Fund for Introduced Talents (2021r001, 2023r022).</p>
</sec>
<sec sec-type="COI-statement" id="s8">
<title>Conflict of interest</title>
<p>The authors declare that the research was conducted in the absence of any commercial or financial relationships that could be construed as a potential conflict of interest.</p>
</sec>
<sec sec-type="disclaimer" id="s9">
<title>Publisher&#x2019;s note</title>
<p>All claims expressed in this article are solely those of the authors and do not necessarily represent those of their affiliated organizations, or those of the publisher, the editors and the reviewers. Any product that may be evaluated in this article, or claim that may be made by its manufacturer, is not guaranteed or endorsed by the publisher.</p>
</sec>
<ref-list>
<title>References</title>
<ref id="B1">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Abdullah</surname>
<given-names>A. M.</given-names>
</name>
<name>
<surname>Sadaf</surname>
<given-names>M. U. K.</given-names>
</name>
<name>
<surname>Tasnim</surname>
<given-names>F.</given-names>
</name>
<name>
<surname>Vasquez</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Lozano</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Uddin</surname>
<given-names>M. J.</given-names>
</name>
</person-group> (<year>2021</year>). <article-title>KNN based piezo-triboelectric lead-free hybrid energy films</article-title>. <source>Nano Energy</source> <volume>86</volume>, <fpage>106133</fpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2021.106133</pub-id>
</citation>
</ref>
<ref id="B2">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Agarwala</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Goh</surname>
<given-names>G. L.</given-names>
</name>
<name>
<surname>Yap</surname>
<given-names>Y. L.</given-names>
</name>
<name>
<surname>Goh</surname>
<given-names>G. D.</given-names>
</name>
<name>
<surname>Yu</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Yeong</surname>
<given-names>W. Y.</given-names>
</name>
<etal/>
</person-group> (<year>2017</year>). <article-title>Development of bendable strain sensor with embedded microchannels using 3D printing</article-title>. <source>Sensors Actuators A Phys.</source> <volume>263</volume>, <fpage>593</fpage>&#x2013;<lpage>599</lpage>. <pub-id pub-id-type="doi">10.1016/j.sna.2017.07.025</pub-id>
</citation>
</ref>
<ref id="B3">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Akiyama</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Kamohara</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Kano</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Teshigahara</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Takeuchi</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Kawahara</surname>
<given-names>N.</given-names>
</name>
</person-group> (<year>2009b</year>). <article-title>Enhancement of piezoelectric response in scandium aluminum nitride alloy thin films prepared by dual reactive cosputtering</article-title>. <source>Adv. Mat.</source> <volume>21</volume> (<issue>5</issue>), <fpage>593</fpage>&#x2013;<lpage>596</lpage>. <pub-id pub-id-type="doi">10.1002/adma.200802611</pub-id>
</citation>
</ref>
<ref id="B4">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Akiyama</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Kano</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Teshigahara</surname>
<given-names>A.</given-names>
</name>
</person-group> (<year>2009a</year>). <article-title>Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films</article-title>. <source>Appl. Phys. Lett.</source> <volume>95</volume> (<issue>16</issue>), <fpage>162107</fpage>. <pub-id pub-id-type="doi">10.1063/1.3251072</pub-id>
</citation>
</ref>
<ref id="B5">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Akmal</surname>
<given-names>M. H. M.</given-names>
</name>
<name>
<surname>Warikh</surname>
<given-names>A. R. M.</given-names>
</name>
<name>
<surname>Azlan</surname>
<given-names>U. A. A.</given-names>
</name>
<name>
<surname>Azmi</surname>
<given-names>N. A.</given-names>
</name>
<name>
<surname>Salleh</surname>
<given-names>M. S.</given-names>
</name>
<name>
<surname>Kasim</surname>
<given-names>M. S.</given-names>
</name>
</person-group> (<year>2018</year>). <article-title>Optimizing the processing conditions of sodium potassium niobate thin films prepared by sol-gel spin coating technique</article-title>. <source>Ceram. Int.</source> <volume>44</volume> (<issue>1</issue>), <fpage>317</fpage>&#x2013;<lpage>325</lpage>. <pub-id pub-id-type="doi">10.1016/j.ceramint.2017.09.175</pub-id>
</citation>
</ref>
<ref id="B6">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Alg&#xfc;n</surname>
<given-names>G.</given-names>
</name>
<name>
<surname>Ak&#xe7;ay</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>&#xd6;ztel</surname>
<given-names>H. O.</given-names>
</name>
<name>
<surname>Can</surname>
<given-names>M. M.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>Synthesis and ultrafast humidity sensing performance of Sr doped ZnO nanostructured thin films: the effect of Sr concentration</article-title>. <source>J. Sol-Gel Sci. Technol.</source> <volume>107</volume> (<issue>3</issue>), <fpage>640</fpage>&#x2013;<lpage>658</lpage>. <pub-id pub-id-type="doi">10.1007/s10971-023-06148-0</pub-id>
</citation>
</ref>
<ref id="B7">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Ali</surname>
<given-names>F.</given-names>
</name>
<name>
<surname>Raza</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Gul</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Kim</surname>
<given-names>K.-H.</given-names>
</name>
</person-group> (<year>2019</year>). <article-title>Piezoelectric energy harvesters for biomedical applications</article-title>. <source>Nano Energy</source> <volume>57</volume>, <fpage>879</fpage>&#x2013;<lpage>902</lpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2019.01.012</pub-id>
</citation>
</ref>
<ref id="B8">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Alrammouz</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Podlecki</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Abboud</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Sorli</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Habchi</surname>
<given-names>R.</given-names>
</name>
</person-group> (<year>2018</year>). <article-title>A review on flexible gas sensors: from materials to devices</article-title>. <source>Sensors Actuators A Phys.</source> <volume>284</volume>, <fpage>209</fpage>&#x2013;<lpage>231</lpage>. <pub-id pub-id-type="doi">10.1016/j.sna.2018.10.036</pub-id>
</citation>
</ref>
<ref id="B9">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Antony Jeyaseelan</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Dutta</surname>
<given-names>S.</given-names>
</name>
</person-group> (<year>2020</year>). <article-title>Improvement in piezoelectric properties of PLZT thin film with large cation doping at A-site</article-title>. <source>J. Alloys Compd.</source> <volume>826</volume>, <fpage>153956</fpage>. <pub-id pub-id-type="doi">10.1016/j.jallcom.2020.153956</pub-id>
</citation>
</ref>
<ref id="B10">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Aratani</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Oikawa</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Ozeki</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Funakubo</surname>
<given-names>H.</given-names>
</name>
</person-group> (<year>2001</year>). <article-title>Epitaxial-grade polycrystalline Pb(Zr,Ti)O3 film deposited at low temperature by pulsed-metalorganic chemical vapor deposition</article-title>. <source>Appl. Phys. Lett.</source> <volume>79</volume> (<issue>7</issue>), <fpage>1000</fpage>&#x2013;<lpage>1002</lpage>. <pub-id pub-id-type="doi">10.1063/1.1391229</pub-id>
</citation>
</ref>
<ref id="B11">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Atlam</surname>
<given-names>H. F.</given-names>
</name>
<name>
<surname>Walters</surname>
<given-names>R. J.</given-names>
</name>
<name>
<surname>Wills</surname>
<given-names>G. B.</given-names>
</name>
</person-group> (<year>2018</year>). <article-title>Internet of things: state-of-the-art, challenges, applications, and open issues</article-title>. <source>J. Netw. Comput. Appl.</source> <volume>67</volume>, <fpage>99</fpage>&#x2013;<lpage>117</lpage>. <pub-id pub-id-type="doi">10.1016/j.jnca.2016.01.010</pub-id>
</citation>
</ref>
<ref id="B12">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Bagchi</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Hoque</surname>
<given-names>N. A.</given-names>
</name>
<name>
<surname>Janowicz</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>Das</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Tiwari</surname>
<given-names>M. K.</given-names>
</name>
</person-group> (<year>2020</year>). <article-title>Re-useable self-poled piezoelectric/piezocatalytic films with exceptional energy harvesting and water remediation capability</article-title>. <source>Nano Energy</source> <volume>78</volume>, <fpage>105339</fpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2020.105339</pub-id>
</citation>
</ref>
<ref id="B13">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Bai</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Zhu</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Qiu</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Zhu</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Gu</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Ji</surname>
<given-names>H.</given-names>
</name>
</person-group> (<year>2011</year>). <article-title>Synthesis of (K,Na)NbO3 particles by traditional hydrothermal method and high-temperature mixing method under hydrothermal&#x2013;solvothermal conditions</article-title>. <source>Res. Chem. Intermed.</source> <volume>37</volume> (<issue>2</issue>), <fpage>185</fpage>&#x2013;<lpage>193</lpage>. <pub-id pub-id-type="doi">10.1007/s11164-011-0265-3</pub-id>
</citation>
</ref>
<ref id="B14">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Baumbauer</surname>
<given-names>C. L.</given-names>
</name>
<name>
<surname>Anderson</surname>
<given-names>M. G.</given-names>
</name>
<name>
<surname>Ting</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Sreekumar</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Rabaey</surname>
<given-names>J. M.</given-names>
</name>
<name>
<surname>Arias</surname>
<given-names>A. C.</given-names>
</name>
<etal/>
</person-group> (<year>2020</year>). <article-title>Printed, flexible, compact UHF-RFID sensor tags enabled by hybrid electronics</article-title>. <source>Sci. Rep.</source> <volume>10</volume> (<issue>1</issue>), <fpage>16543</fpage>. <pub-id pub-id-type="doi">10.1038/s41598-020-73471-9</pub-id>
</citation>
</ref>
<ref id="B15">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Bekle&#x161;ovas</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Iljinas</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Stankus</surname>
<given-names>V.</given-names>
</name>
<name>
<surname>&#x10c;yvien&#x117;</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Andrulevi&#x10d;ius</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Ivanov</surname>
<given-names>M.</given-names>
</name>
<etal/>
</person-group> (<year>2022</year>). <article-title>Structural, morphologic, and ferroelectric properties of PZT films deposited through layer-by-layer reactive DC magnetron sputtering</article-title>. <source>Coatings</source> <volume>12</volume> (<issue>6</issue>), <fpage>717</fpage>. <pub-id pub-id-type="doi">10.3390/coatings12060717</pub-id>
</citation>
</ref>
<ref id="B16">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Bhunia</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Gupta</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Fatma</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Gupta</surname>
<given-names>R. K.</given-names>
</name>
<name>
<surname>Garg</surname>
<given-names>A.</given-names>
</name>
</person-group> (<year>2019</year>). <article-title>Milli-watt power harvesting from dual triboelectric and piezoelectric effects of multifunctional green and robust reduced graphene oxide/P(VDF-TrFE) composite flexible films</article-title>. <source>ACS Appl. Mater. Interfaces</source> <volume>11</volume>, <fpage>38177</fpage>&#x2013;<lpage>38189</lpage>. <pub-id pub-id-type="doi">10.1021/acsami.9b13360</pub-id>
</citation>
</ref>
<ref id="B17">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Bian</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Gu</surname>
<given-names>Q.</given-names>
</name>
<name>
<surname>Zhu</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Zhu</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>J.</given-names>
</name>
<etal/>
</person-group> (<year>2016</year>). <article-title>Improved sintering activity and piezoelectric properties of PZT ceramics from hydrothermally synthesized powders with Pb excess</article-title>. <source>J. Mater. Sci. Mater. Electron.</source> <volume>27</volume> (<issue>8</issue>), <fpage>8573</fpage>&#x2013;<lpage>8579</lpage>. <pub-id pub-id-type="doi">10.1007/s10854-016-4875-9</pub-id>
</citation>
</ref>
<ref id="B18">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Biswas</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Hoque</surname>
<given-names>N. A.</given-names>
</name>
<name>
<surname>Thakur</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Saikh</surname>
<given-names>M. M.</given-names>
</name>
<name>
<surname>Roy</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Khatun</surname>
<given-names>F.</given-names>
</name>
<etal/>
</person-group> (<year>2019</year>). <article-title>Highly efficient and durable piezoelectric nanogenerator and photo-power cell based on CTAB modified montmorillonite incorporated PVDF film</article-title>. <source>ACS Sustain. Chem. Eng.</source> <volume>7</volume>, <fpage>4801</fpage>&#x2013;<lpage>4813</lpage>. <pub-id pub-id-type="doi">10.1021/acssuschemeng.8b05080</pub-id>
</citation>
</ref>
<ref id="B19">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Botta</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Donato</surname>
<given-names>Wd</given-names>
</name>
<name>
<surname>Persico</surname>
<given-names>V.</given-names>
</name>
<name>
<surname>Ajfgcs</surname>
<given-names>P.</given-names>
</name>
</person-group> (<year>2016</year>). <article-title>Integration of cloud computing and internet of things: a survey</article-title>. <source>Future Gener. Comput. Syst.</source> <volume>56</volume>, <fpage>684</fpage>&#x2013;<lpage>700</lpage>. <pub-id pub-id-type="doi">10.1016/j.future.2015.09.021</pub-id>
</citation>
</ref>
<ref id="B20">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Bouad</surname>
<given-names>V.</given-names>
</name>
<name>
<surname>Fadel</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Mohan</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Hamieh</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Tahon</surname>
<given-names>J.-F.</given-names>
</name>
<name>
<surname>Lyskawa</surname>
<given-names>J.</given-names>
</name>
<etal/>
</person-group> (<year>2022</year>). <article-title>Utilization of catechol end-functionalized PMMA as a macromolecular coupling agent for ceramic/fluoropolymer piezoelectric composites</article-title>. <source>ACS Appl. Polym. Mater.</source> <volume>4</volume> (<issue>10</issue>), <fpage>7258</fpage>&#x2013;<lpage>7267</lpage>. <pub-id pub-id-type="doi">10.1021/acsapm.2c00883</pub-id>
</citation>
</ref>
<ref id="B21">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Chao</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Di</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Yuan</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Xu</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Zhang</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Wan</surname>
<given-names>P.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>Flexible breathable photothermal-therapy epidermic sensor with MXene for ultrasensitive wearable human-machine interaction</article-title>. <source>Nano Energy</source> <volume>108</volume>, <fpage>108201</fpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2023.108201</pub-id>
</citation>
</ref>
<ref id="B22">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Chen</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Oh</surname>
<given-names>S. K.</given-names>
</name>
<name>
<surname>Nabulsi</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>Johnson</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Ryou</surname>
<given-names>J.-H.</given-names>
</name>
</person-group> (<year>2019</year>). <article-title>Biocompatible and sustainable power supply for self-powered wearable and implantable electronics using III-nitride thin-film-based flexible piezoelectric generator</article-title>. <source>Nano Energy</source> <volume>57</volume>, <fpage>670</fpage>&#x2013;<lpage>679</lpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2018.12.080</pub-id>
</citation>
</ref>
<ref id="B23">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Chen</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Zhang</surname>
<given-names>Z.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>A flexible anisotropic magnetoresistance sensor for magnetic field detection</article-title>. <source>J. Mater. Sci. Mater. Electron.</source> <volume>34</volume> (<issue>1</issue>), <fpage>73</fpage>. <pub-id pub-id-type="doi">10.1007/s10854-022-09400-5</pub-id>
</citation>
</ref>
<ref id="B24">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Chen</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Gao</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Emaminejad</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Kiriya</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Ota</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Nyein</surname>
<given-names>H. Y. Y.</given-names>
</name>
<etal/>
</person-group> (<year>2016</year>). <article-title>Printed carbon nanotube electronics and sensor systems</article-title>. <source>Adv. Mat.</source> <volume>28</volume> (<issue>22</issue>), <fpage>4397</fpage>&#x2013;<lpage>4414</lpage>. <pub-id pub-id-type="doi">10.1002/adma.201504958</pub-id>
</citation>
</ref>
<ref id="B25">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Chen</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Zhu</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Mao</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Wu</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Lin</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Xu</surname>
<given-names>D.</given-names>
</name>
<etal/>
</person-group> (<year>2023a</year>). <article-title>Piezocatalytic medicine: an emerging frontier using piezoelectric materials for biomedical applications</article-title>. <source>Adv. Mat.</source> <volume>35</volume> (<issue>25</issue>), <fpage>2208256</fpage>. <pub-id pub-id-type="doi">10.1002/adma.202208256</pub-id>
</citation>
</ref>
<ref id="B26">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Chen</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Sun</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Guo</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Yu</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>W.</given-names>
</name>
<etal/>
</person-group> (<year>2022</year>). <article-title>Effect of the particle size on the performance of BaTiO3 piezoelectric ceramics produced by additive manufacturing</article-title>. <source>Ceram. Int.</source> <volume>48</volume> (<issue>1</issue>), <fpage>1285</fpage>&#x2013;<lpage>1292</lpage>. <pub-id pub-id-type="doi">10.1016/j.ceramint.2021.09.213</pub-id>
</citation>
</ref>
<ref id="B27">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Chen</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Hao</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Huang</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Zhou</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Liang</surname>
<given-names>R.</given-names>
</name>
</person-group> (<year>2023b</year>). <article-title>Poling above the Curie temperature driven large enhancement in piezoelectric performance of Mn doped PZT-based piezoceramics</article-title>. <source>Nano Energy</source> <volume>113</volume>, <fpage>108546</fpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2023.108546</pub-id>
</citation>
</ref>
<ref id="B28">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Cheng</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Fan</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Chen</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Xie</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Xing</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Tan</surname>
<given-names>Z.</given-names>
</name>
<etal/>
</person-group> (<year>2022</year>). <article-title>Hardening effect in lead-free KNN-based piezoelectric ceramics with CuO doping</article-title>. <source>ACS Appl. Mater. Interfaces</source> <volume>14</volume> (<issue>50</issue>), <fpage>55803</fpage>&#x2013;<lpage>55811</lpage>. <pub-id pub-id-type="doi">10.1021/acsami.2c18015</pub-id>
</citation>
</ref>
<ref id="B29">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Chionh</surname>
<given-names>C. Y.</given-names>
</name>
<name>
<surname>Soh</surname>
<given-names>D. Y.</given-names>
</name>
<name>
<surname>Tan</surname>
<given-names>C. H.</given-names>
</name>
<name>
<surname>Khaw</surname>
<given-names>J. Y.</given-names>
</name>
<name>
<surname>Wong</surname>
<given-names>Y. C.</given-names>
</name>
<name>
<surname>Roy</surname>
<given-names>D. M.</given-names>
</name>
<etal/>
</person-group> (<year>2020</year>). <article-title>A device for surveillance of vascular access sites for bleeding: results from a clinical evaluation trial</article-title>. <source>Sci. Rep.</source> <volume>23</volume>, <fpage>18153</fpage>. <pub-id pub-id-type="doi">10.1038/s41598-020-74571-2</pub-id>
</citation>
</ref>
<ref id="B30">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Choi</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Lee</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Ghaffari</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Hyeon</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Kim</surname>
<given-names>D.-H.</given-names>
</name>
</person-group> (<year>2016</year>). <article-title>Recent advances in flexible and stretchable bio-electronic devices integrated with nanomaterials</article-title>. <source>Adv. Mat.</source> <volume>28</volume> (<issue>22</issue>), <fpage>4203</fpage>&#x2013;<lpage>4218</lpage>. <pub-id pub-id-type="doi">10.1002/adma.201504150</pub-id>
</citation>
</ref>
<ref id="B31">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Chorsi</surname>
<given-names>M. T.</given-names>
</name>
<name>
<surname>Curry</surname>
<given-names>E. J.</given-names>
</name>
<name>
<surname>Chorsi</surname>
<given-names>H. T.</given-names>
</name>
<name>
<surname>Das</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Baroody</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Purohit</surname>
<given-names>P. K.</given-names>
</name>
<etal/>
</person-group> (<year>2019</year>). <article-title>Piezoelectric biomaterials for sensors and actuators</article-title>. <source>Adv. Mat.</source> <volume>31</volume> (<issue>1</issue>), <fpage>1802084</fpage>. <pub-id pub-id-type="doi">10.1002/adma.201802084</pub-id>
</citation>
</ref>
<ref id="B32">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Chortos</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Bao</surname>
<given-names>Z.</given-names>
</name>
</person-group> (<year>2016</year>). <article-title>Pursuing prosthetic electronic skin</article-title>. <source>Nat. Mater.</source> <volume>15</volume> (<issue>9</issue>), <fpage>937</fpage>&#x2013;<lpage>950</lpage>. <pub-id pub-id-type="doi">10.1038/nmat4671</pub-id>
</citation>
</ref>
<ref id="B33">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Chung</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Fortunato</surname>
<given-names>G.</given-names>
</name>
<name>
<surname>Radacsi</surname>
<given-names>N.</given-names>
</name>
</person-group> (<year>2019</year>). <article-title>Wearable flexible sweat sensors for healthcare monitoring: a review</article-title>. <source>J. R. Soc. Interface.</source> <volume>16</volume> (<issue>159</issue>), <fpage>20190217</fpage>. <pub-id pub-id-type="doi">10.1098/rsif.2019.0217</pub-id>
</citation>
</ref>
<ref id="B34">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Cuadra</surname>
<given-names>J. G.</given-names>
</name>
<name>
<surname>Estrada</surname>
<given-names>A. C.</given-names>
</name>
<name>
<surname>Oliveira</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Abderrahim</surname>
<given-names>L. A.</given-names>
</name>
<name>
<surname>Porcar</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Fraga</surname>
<given-names>D.</given-names>
</name>
<etal/>
</person-group> (<year>2023</year>). <article-title>Functional properties of transparent ZnO thin films synthetized by using spray pyrolysis for environmental and biomedical applications</article-title>. <source>Ceram. Int.</source> <volume>49</volume> (<issue>20</issue>), <fpage>32779</fpage>&#x2013;<lpage>32788</lpage>. <pub-id pub-id-type="doi">10.1016/j.ceramint.2023.07.246</pub-id>
</citation>
</ref>
<ref id="B35">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Cui</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>F.</given-names>
</name>
<name>
<surname>Jing</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Mu</surname>
<given-names>J.</given-names>
</name>
</person-group> (<year>2021</year>). <article-title>Integrating sensing and communications for ubiquitous IoT: applications, trends, and challenges</article-title>. <source>IEEE Netw.</source> <volume>35</volume>, <fpage>158</fpage>&#x2013;<lpage>167</lpage>. <pub-id pub-id-type="doi">10.1109/mnet.010.2100152</pub-id>
</citation>
</ref>
<ref id="B36">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Das</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>Sarkar</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Saikh</surname>
<given-names>M. M.</given-names>
</name>
<name>
<surname>Biswas</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Das</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Hoque</surname>
<given-names>N. A.</given-names>
</name>
<etal/>
</person-group> (<year>2022</year>). <article-title>Piezoelectric activity assessment of size-dependent naturally acquired mud volcano clay nanoparticles assisted highly pressure sensitive nanogenerator for green mechanical energy harvesting and body motion sensing</article-title>. <source>Nano Energy</source> <volume>102</volume>, <fpage>107628</fpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2022.107628</pub-id>
</citation>
</ref>
<ref id="B37">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Das</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>Sarkar</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Yadav</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>Ali</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Das</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Pratim Ray</surname>
<given-names>P.</given-names>
</name>
<etal/>
</person-group> (<year>2023</year>). <article-title>Development of a lead-free, high-frequency ultrasound transducer with broad bandwidth and enhanced pulse-echo response, employing &#x3b2;-Ni(OH)2/PVDF-TrFE piezoelectric composite</article-title>. <source>Chem. Eng. J.</source> <volume>475</volume>, <fpage>146322</fpage>. <pub-id pub-id-type="doi">10.1016/j.cej.2023.146322</pub-id>
</citation>
</ref>
<ref id="B38">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Das</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Biswal</surname>
<given-names>A. K.</given-names>
</name>
<name>
<surname>Roy</surname>
<given-names>A.</given-names>
</name>
</person-group> (<year>2017</year>). <article-title>Fabrication of flexible piezoelectric PMN-PT based composite films for energy harvesting</article-title>. <source>IOP Conf. Ser. Mater. Sci. Eng.</source> <volume>178</volume> (<issue>1</issue>), <fpage>012020</fpage>. <pub-id pub-id-type="doi">10.1088/1757-899x/178/1/012020</pub-id>
</citation>
</ref>
<ref id="B238">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Das</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Biswal</surname>
<given-names>A. K.</given-names>
</name>
<name>
<surname>Parida</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Choudhary</surname>
<given-names>R. N. P.</given-names>
</name>
<name>
<surname>Roy</surname>
<given-names>A.</given-names>
</name>
</person-group>(<year>2018</year>). <article-title>Electrical and mechanical behavior of PMN-PT/CNT based polymer composite film for energy harvesting</article-title>. <source>Appl. Surf. Sci.</source> <volume>428</volume>, <fpage>356</fpage>&#x2013;<lpage>363</lpage>. <pub-id pub-id-type="doi">10.1016/j.apsusc.2017.09.077</pub-id>
</citation>
</ref>
<ref id="B39">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Debeuckelaere</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Janssens</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Asensio</surname>
<given-names>E. S.</given-names>
</name>
<name>
<surname>Wenseleers</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Jacquemyn</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Pozo</surname>
<given-names>M. I.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>A wireless, user-friendly, and unattended robotic flower system to assess pollinator foraging behaviour</article-title>. <source>biorxiv</source>. <pub-id pub-id-type="doi">10.1101/2022.06.14.496104</pub-id>
</citation>
</ref>
<ref id="B40">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Dhanumalayan</surname>
<given-names>E.</given-names>
</name>
<name>
<surname>Joshi</surname>
<given-names>G. M.</given-names>
</name>
</person-group> (<year>2018</year>). <article-title>Performance properties and applications of polytetrafluoroethylene (PTFE)&#x2014;a review</article-title>. <source>Adv. Compos. Hybrid Mater.</source> <volume>1</volume> (<issue>2</issue>), <fpage>247</fpage>&#x2013;<lpage>268</lpage>. <pub-id pub-id-type="doi">10.1007/s42114-018-0023-8</pub-id>
</citation>
</ref>
<ref id="B41">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Di Marco</surname>
<given-names>M. B.</given-names>
</name>
<name>
<surname>Imhoff</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Rold&#xe1;n</surname>
<given-names>M. V.</given-names>
</name>
<name>
<surname>Barolin</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Stachiotti</surname>
<given-names>M. G.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>Sol&#x2013;gel synthesis and characterization of PZT thin films on FTO/aluminoborosilicate glass substrates</article-title>. <source>J. Mater. Sci. Mater. Electron.</source> <volume>34</volume> (<issue>14</issue>), <fpage>1171</fpage>. <pub-id pub-id-type="doi">10.1007/s10854-023-10596-3</pub-id>
</citation>
</ref>
<ref id="B42">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Dong</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Sun</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Zhu</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Xu</surname>
<given-names>X.</given-names>
</name>
<etal/>
</person-group> (<year>2022</year>). <article-title>Bi3TeBO9: a borate piezoelectric crystal with a high piezoelectric coefficient</article-title>. <source>Cryst. Growth and Des.</source> <volume>22</volume> (<issue>7</issue>), <fpage>4243</fpage>&#x2013;<lpage>4249</lpage>. <pub-id pub-id-type="doi">10.1021/acs.cgd.2c00260</pub-id>
</citation>
</ref>
<ref id="B43">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Eini</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Linkous</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Zohrabi</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>Abdelwahed</surname>
<given-names>S. J.</given-names>
</name>
</person-group> (<year>2021</year>). <article-title>Smart building management system: performance specifications and design requirements</article-title>. <source>J. Build. Eng.</source> <volume>39</volume>, <fpage>102222</fpage>. <pub-id pub-id-type="doi">10.1016/j.jobe.2021.102222</pub-id>
</citation>
</ref>
<ref id="B44">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Fakhri</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Amini</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Bagherzadeh</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Kashfi</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Latifi</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Yavari</surname>
<given-names>N.</given-names>
</name>
<etal/>
</person-group> (<year>2019</year>). <article-title>Flexible hybrid structure piezoelectric nanogenerator based on ZnO nanorod/PVDF nanofibers with improved output</article-title>. <source>RSC Adv.</source> <volume>9</volume> (<issue>18</issue>), <fpage>10117</fpage>&#x2013;<lpage>10123</lpage>. <pub-id pub-id-type="doi">10.1039/c8ra10315a</pub-id>
</citation>
</ref>
<ref id="B45">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Fan</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Qian</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Jia</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Ding</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>D.</given-names>
</name>
<etal/>
</person-group> (<year>2022</year>). <article-title>Homeostatic neuro-metasurfaces for dynamic wireless channel management</article-title>. <source>Sci. Adv.</source> <volume>8</volume> (<issue>27</issue>), <fpage>eabn7905</fpage>. <pub-id pub-id-type="doi">10.1126/sciadv.abn7905</pub-id>
</citation>
</ref>
<ref id="B46">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Fast</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Clark</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Fullmer</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Grove</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Nyman</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Gibbons</surname>
<given-names>B.</given-names>
</name>
<etal/>
</person-group> (<year>2020</year>). <article-title>Using simple aqueous precursors for a green synthetic pathway to potassium sodium niobate thin films</article-title>. <source>Thin Solid Films</source> <volume>710</volume>, <fpage>138270</fpage>. <pub-id pub-id-type="doi">10.1016/j.tsf.2020.138270</pub-id>
</citation>
</ref>
<ref id="B47">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Fei</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Zhu</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Yang</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Yang</surname>
<given-names>Y.</given-names>
</name>
<etal/>
</person-group> (<year>2018</year>). <article-title>AlN piezoelectric thin films for energy harvesting and acoustic devices</article-title>. <source>Nano Energy</source> <volume>51</volume>, <fpage>146</fpage>&#x2013;<lpage>161</lpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2018.06.062</pub-id>
</citation>
</ref>
<ref id="B48">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Feng</surname>
<given-names>G.-H.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>C.-Y.</given-names>
</name>
<name>
<surname>Chen</surname>
<given-names>Y.-H.</given-names>
</name>
<name>
<surname>Ho</surname>
<given-names>Y.-C.</given-names>
</name>
<name>
<surname>Chu</surname>
<given-names>S.-Y.</given-names>
</name>
<name>
<surname>Tsai</surname>
<given-names>C.-C.</given-names>
</name>
<etal/>
</person-group> (<year>2022</year>). <article-title>Investigation of Mo doping effects on the properties of AlN-based piezoelectric films using a sputtering technique</article-title>. <source>ECS J. Solid State Sci. Technol.</source> <volume>11</volume> (<issue>12</issue>), <fpage>123005</fpage>. <pub-id pub-id-type="doi">10.1149/2162-8777/aca796</pub-id>
</citation>
</ref>
<ref id="B49">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Fiedler</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Leveneur</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Mitchell</surname>
<given-names>D. R. G.</given-names>
</name>
<name>
<surname>Arulkumaran</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Ng</surname>
<given-names>G. I.</given-names>
</name>
<name>
<surname>Alphones</surname>
<given-names>A.</given-names>
</name>
<etal/>
</person-group> (<year>2021</year>). <article-title>Enhancing the piezoelectric modulus of wurtzite AlN by ion beam strain engineering</article-title>. <source>Appl. Phys. Lett.</source> <volume>118</volume> (<issue>1</issue>). <pub-id pub-id-type="doi">10.1063/5.0031047</pub-id>
</citation>
</ref>
<ref id="B50">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Fioravanti</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Carotta</surname>
<given-names>M. C.</given-names>
</name>
</person-group> (<year>2020</year>). <article-title>Year 2020: a snapshot of the last progress in flexible printed gas sensors</article-title>. <source>Appl. Sci.</source> <volume>10</volume> (<issue>5</issue>), <fpage>1741</fpage>. <pub-id pub-id-type="doi">10.3390/app10051741</pub-id>
</citation>
</ref>
<ref id="B51">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Fujita</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Tanaka</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Inaba</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Nagatomo</surname>
<given-names>N.</given-names>
</name>
</person-group> (<year>2016</year>). <article-title>Development and electrical properties of wurtzite (Al,Ti)N materials for thin film thermistors</article-title>. <source>J. Ceram. Soc. Jpn.</source> <volume>124</volume>, <fpage>653</fpage>&#x2013;<lpage>658</lpage>. <pub-id pub-id-type="doi">10.2109/jcersj2.15316</pub-id>
</citation>
</ref>
<ref id="B52">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Gao</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Qiu</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>G.</given-names>
</name>
<name>
<surname>Ma</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Yang</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Xu</surname>
<given-names>Z.</given-names>
</name>
<etal/>
</person-group> (<year>2020</year>). <article-title>High output power density of a shear-mode piezoelectric energy harvester based on Pb(In<sub>1/2</sub>Nb<sub>1/2</sub>)O<sub>3 -</sub>Pb(Mg<sub>1/3</sub>Nb<sub>2/3</sub>)O<sub>3</sub>-PbTiO<sub>3</sub> single crystals</article-title>. <source>Appl. Energy</source> <volume>271</volume>, <fpage>115193</fpage>. <pub-id pub-id-type="doi">10.1016/j.apenergy.2020.115193</pub-id>
</citation>
</ref>
<ref id="B53">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Gatabi</surname>
<given-names>J. R.</given-names>
</name>
<name>
<surname>Rahman</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Amaro</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Nash</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Rojas-Ramirez</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Pandey</surname>
<given-names>R. K.</given-names>
</name>
<etal/>
</person-group> (<year>2017</year>). <article-title>Tuning electrical properties of PZT film deposited by Pulsed Laser Deposition</article-title>. <source>Ceram. Int.</source> <volume>43</volume> (<issue>8</issue>), <fpage>6008</fpage>&#x2013;<lpage>6012</lpage>. <pub-id pub-id-type="doi">10.1016/j.ceramint.2017.01.139</pub-id>
</citation>
</ref>
<ref id="B54">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Ge</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Sun</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Zhang</surname>
<given-names>F.-R.</given-names>
</name>
<name>
<surname>Zhang</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Shi</surname>
<given-names>L.-A.</given-names>
</name>
<name>
<surname>Zhao</surname>
<given-names>H.-Y.</given-names>
</name>
<etal/>
</person-group> (<year>2016</year>). <article-title>A stretchable electronic fabric artificial skin with pressure-lateral strain-and flexion-sensitive properties</article-title>. <source>Adv. Mat.</source> <volume>28</volume> (<issue>4</issue>), <fpage>722</fpage>&#x2013;<lpage>728</lpage>. <pub-id pub-id-type="doi">10.1002/adma.201504239</pub-id>
</citation>
</ref>
<ref id="B55">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Ghosh</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Bardhan</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Mondal</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Sarkar</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Roy</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Roy</surname>
<given-names>S.</given-names>
</name>
<etal/>
</person-group> (<year>2023</year>). <article-title>Natural hematite-based self-poled piezo-responsive membrane for harvesting energy from water flow and catalytic removal of organic dye</article-title>. <source>Ceram. Int.</source> <volume>49</volume>, <fpage>14710</fpage>&#x2013;<lpage>14718</lpage>. <pub-id pub-id-type="doi">10.1016/j.ceramint.2023.01.067</pub-id>
</citation>
</ref>
<ref id="B56">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Guan</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Xu</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Gong</surname>
<given-names>J.</given-names>
</name>
</person-group> (<year>2020</year>). <article-title>Hierarchically architected polydopamine modified BaTiO3@P(VDF-TrFE) nanocomposite fiber mats for flexible piezoelectric nanogenerators and self-powered sensors</article-title>. <source>Nano Energy</source> <volume>70</volume>, <fpage>104516</fpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2020.104516</pub-id>
</citation>
</ref>
<ref id="B57">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Guan</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Bai</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>Q.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>G.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>C.</given-names>
</name>
<etal/>
</person-group> (<year>2022</year>). <article-title>A plantar wearable pressure sensor based on hybrid lead zirconate-titanate/microfibrillated cellulose piezoelectric composite films for human health monitoring</article-title>. <source>Lab a Chip</source> <volume>22</volume> (<issue>12</issue>), <fpage>2376</fpage>&#x2013;<lpage>2391</lpage>. <pub-id pub-id-type="doi">10.1039/d2lc00051b</pub-id>
</citation>
</ref>
<ref id="B58">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Gullapalli</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Vemuru</surname>
<given-names>V. S. M.</given-names>
</name>
<name>
<surname>Kumar</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Botello-Mendez</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Vajtai</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Terrones</surname>
<given-names>M.</given-names>
</name>
<etal/>
</person-group> (<year>2010</year>). <article-title>Flexible piezoelectric ZnO&#x2013;paper nanocomposite strain sensor</article-title>. <source>Small</source> <volume>6</volume> (<issue>15</issue>), <fpage>1641</fpage>&#x2013;<lpage>1646</lpage>. <pub-id pub-id-type="doi">10.1002/smll.201000254</pub-id>
</citation>
</ref>
<ref id="B59">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Gupta</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Bhunia</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Fatma</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Maurya</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Singh</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Gupta</surname>
<given-names>R.</given-names>
</name>
<etal/>
</person-group> (<year>2019</year>). <article-title>Multifunctional and flexible polymeric nanocomposite films with improved ferroelectric and piezoelectric properties for energy generation devices</article-title>. <source>ACS Appl. Energy Mater.</source> <volume>2</volume>, <fpage>6364</fpage>&#x2013;<lpage>6374</lpage>. <pub-id pub-id-type="doi">10.1021/acsaem.9b01000</pub-id>
</citation>
</ref>
<ref id="B60">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Habeeb Khan</surname>
<given-names>A. M.</given-names>
</name>
<name>
<surname>Prabu</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Khan</surname>
<given-names>A. K.</given-names>
</name>
<name>
<surname>Sreeja</surname>
<given-names>T. K.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>Dielectric and ferroelectric characterization of niobium doped pzt (52/48) nanoceramics</article-title>. <source>J. Alloys Compd.</source> <volume>967</volume>, <fpage>171529</fpage>. <pub-id pub-id-type="doi">10.1016/j.jallcom.2023.171529</pub-id>
</citation>
</ref>
<ref id="B61">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Hao</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Zhai</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Chen</surname>
<given-names>H.</given-names>
</name>
</person-group> (<year>2019</year>). <article-title>Progress in high-strain perovskite piezoelectric ceramics</article-title>. <source>Mater. Sci. Eng. R Rep.</source> <volume>135</volume>, <fpage>1</fpage>&#x2013;<lpage>57</lpage>. <pub-id pub-id-type="doi">10.1016/j.mser.2018.08.001</pub-id>
</citation>
</ref>
<ref id="B62">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Hasan</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Rahman</surname>
<given-names>M. A.</given-names>
</name>
<name>
<surname>Das</surname>
<given-names>D. K.</given-names>
</name>
<name>
<surname>Rouf</surname>
<given-names>H. K.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>Influence of Ca doping in structural, electronic, optical and mechanical properties of Ba1&#x2212;xCaxTiO3 perovskite from first-principles investigation</article-title>. <source>Sci. Rep.</source> <volume>13</volume> (<issue>1</issue>), <fpage>10487</fpage>. <pub-id pub-id-type="doi">10.1038/s41598-023-36719-8</pub-id>
</citation>
</ref>
<ref id="B63">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>He</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Hua</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Zou</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Shu</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Sun</surname>
<given-names>W.</given-names>
</name>
<etal/>
</person-group> (<year>2023</year>). <article-title>A facilely prepared notch-insensitive nanocomposite organohydrogel-based flexible wearable device for long-term outdoor human motion monitoring and recognition</article-title>. <source>J. Mater. Chem. C</source> <volume>11</volume> (<issue>6</issue>), <fpage>2316</fpage>&#x2013;<lpage>2327</lpage>. <pub-id pub-id-type="doi">10.1039/d2tc05038b</pub-id>
</citation>
</ref>
<ref id="B64">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Hema Malini</surname>
<given-names>V.</given-names>
</name>
<name>
<surname>B</surname>
<given-names>I.</given-names>
</name>
<name>
<surname>Gunasekhar</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Anand Prabu</surname>
<given-names>A.</given-names>
</name>
</person-group> (<year>2022</year>). <article-title>A review on electrospun PVDF-doped metal oxide nanoparticles for sensor applications</article-title>. <source>ECS Trans.</source> <volume>107</volume> (<issue>1</issue>), <fpage>14675</fpage>&#x2013;<lpage>14685</lpage>. <pub-id pub-id-type="doi">10.1149/10701.14675ecst</pub-id>
</citation>
</ref>
<ref id="B65">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Hinchet</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Khan</surname>
<given-names>U.</given-names>
</name>
<name>
<surname>Falconi</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Kim</surname>
<given-names>S.-W.</given-names>
</name>
</person-group> (<year>2018</year>). <article-title>Piezoelectric properties in two-dimensional materials: simulations and experiments</article-title>. <source>Mater. Today</source> <volume>21</volume> (<issue>6</issue>), <fpage>611</fpage>&#x2013;<lpage>630</lpage>. <pub-id pub-id-type="doi">10.1016/j.mattod.2018.01.031</pub-id>
</citation>
</ref>
<ref id="B66">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Hoque</surname>
<given-names>N. A.</given-names>
</name>
<name>
<surname>Thakur</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Biswas</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Saikh</surname>
<given-names>M. M.</given-names>
</name>
<name>
<surname>Roy</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Bagchi</surname>
<given-names>B.</given-names>
</name>
<etal/>
</person-group> (<year>2018</year>). <article-title>Biowaste crab shell-extracted chitin nanofiber-based superior piezoelectric nanogenerator</article-title>. <source>J. Mater. Chem. A</source> <volume>6</volume>, <fpage>13848</fpage>&#x2013;<lpage>13858</lpage>. <pub-id pub-id-type="doi">10.1039/C8TA04074E</pub-id>
</citation>
</ref>
<ref id="B67">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Hoque</surname>
<given-names>N. A.</given-names>
</name>
<name>
<surname>Thakur</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Roy</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Kool</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Bagchi</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Biswas</surname>
<given-names>P.</given-names>
</name>
<etal/>
</person-group> (<year>2017</year>). <article-title>Er3&#x2b;/Fe3&#x2b; stimulated electroactive, visible light emitting, and high dielectric flexible PVDF film based piezoelectric nanogenerators: a simple and superior self-powered energy harvester with remarkable power density</article-title>. <source>ACS Appl. Mater. Interfaces</source> <volume>9</volume>, <fpage>23048</fpage>&#x2013;<lpage>23059</lpage>. <pub-id pub-id-type="doi">10.1021/acsami.7b08008</pub-id>
</citation>
</ref>
<ref id="B68">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Hu</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Yao</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Fan</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Ma</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Fan</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>M.</given-names>
</name>
</person-group> (<year>2019</year>). <article-title>Strategies to achieve high performance piezoelectric nanogenerators</article-title>. <source>Nano Energy</source> <volume>55</volume>, <fpage>288</fpage>&#x2013;<lpage>304</lpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2018.10.053</pub-id>
</citation>
</ref>
<ref id="B69">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Hu</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Tai</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Yang</surname>
<given-names>C.</given-names>
</name>
</person-group> (<year>2018</year>). <article-title>Preparation and characterization of Er-doped AlN films by RF magnetron sputtering</article-title>. <source>Mater. Lett.</source> <volume>217</volume>, <fpage>281</fpage>&#x2013;<lpage>283</lpage>. <pub-id pub-id-type="doi">10.1016/j.matlet.2017.12.111</pub-id>
</citation>
</ref>
<ref id="B70">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Huang</surname>
<given-names>C.-C.</given-names>
</name>
<name>
<surname>Kao</surname>
<given-names>Z.-K.</given-names>
</name>
<name>
<surname>Liao</surname>
<given-names>Y.-C.</given-names>
</name>
</person-group> (<year>2013</year>). <article-title>Flexible miniaturized nickel oxide thermistor arrays via inkjet printing technology</article-title>. <source>ACS Appl. Mater. interfaces</source> <volume>5</volume> (<issue>24</issue>), <fpage>12954</fpage>&#x2013;<lpage>12959</lpage>. <pub-id pub-id-type="doi">10.1021/am404872j</pub-id>
</citation>
</ref>
<ref id="B71">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Huang</surname>
<given-names>W.-D.</given-names>
</name>
<name>
<surname>Cao</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Deb</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Chiao</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Chiao</surname>
<given-names>J. C.</given-names>
</name>
</person-group> (<year>2011</year>). <article-title>A flexible pH sensor based on the iridium oxide sensing film</article-title>. <source>Sensors Actuators A Phys.</source> <volume>169</volume> (<issue>1</issue>), <fpage>1</fpage>&#x2013;<lpage>11</lpage>. <pub-id pub-id-type="doi">10.1016/j.sna.2011.05.016</pub-id>
</citation>
</ref>
<ref id="B72">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Huang</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Rui</surname>
<given-names>G.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>Q.</given-names>
</name>
<name>
<surname>Allahyarov</surname>
<given-names>E.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Fukuto</surname>
<given-names>M.</given-names>
</name>
<etal/>
</person-group> (<year>2021</year>). <article-title>Enhanced piezoelectricity from highly polarizable oriented amorphous fractions in biaxially oriented poly(vinylidene fluoride) with pure &#x3b2; crystals</article-title>. <source>Nat. Commun.</source> <volume>12</volume> (<issue>1</issue>), <fpage>675</fpage>. <pub-id pub-id-type="doi">10.1038/s41467-020-20662-7</pub-id>
</citation>
</ref>
<ref id="B73">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Huang</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Wu</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Xue</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Sun</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Pan</surname>
<given-names>Q.</given-names>
</name>
<etal/>
</person-group> (<year>2023</year>). <article-title>Wearable perovskite solar cells by aligned liquid crystal elastomers</article-title>. <source>Nat. Commun.</source> <volume>14</volume>, <fpage>1204</fpage>. <pub-id pub-id-type="doi">10.1038/s41467-023-36938-7</pub-id>
</citation>
</ref>
<ref id="B74">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Hwang</surname>
<given-names>S.-W.</given-names>
</name>
<name>
<surname>Lee</surname>
<given-names>C. H.</given-names>
</name>
<name>
<surname>Cheng</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Jeong</surname>
<given-names>J.-W.</given-names>
</name>
<name>
<surname>Kang</surname>
<given-names>S.-K.</given-names>
</name>
<name>
<surname>Kim</surname>
<given-names>J.-H.</given-names>
</name>
<etal/>
</person-group> (<year>2015</year>). <article-title>Biodegradable elastomers and silicon nanomembranes/nanoribbons for stretchable, transient electronics, and biosensors</article-title>. <source>Nano Lett.</source> <volume>15</volume> (<issue>5</issue>), <fpage>2801</fpage>&#x2013;<lpage>2808</lpage>. <pub-id pub-id-type="doi">10.1021/nl503997m</pub-id>
</citation>
</ref>
<ref id="B75">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Jangra</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Thakur</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Dam</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Chatterjee</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Hussain</surname>
<given-names>S.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>Enhanced dielectric properties of MoS2/PVDF free-standing, flexible films for energy harvesting applications</article-title>. <source>Mater. Today Commun.</source> <volume>34</volume>, <fpage>105109</fpage>. <pub-id pub-id-type="doi">10.1016/j.mtcomm.2022.105109</pub-id>
</citation>
</ref>
<ref id="B76">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Jin</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Lei</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Wu</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Hu</surname>
<given-names>N.</given-names>
</name>
</person-group> (<year>2021</year>). <article-title>Influences of poling temperature and elongation ratio on PVDF-HFP piezoelectric films</article-title>. <source>Nanotechnol. Rev.</source> <volume>10</volume> (<issue>1</issue>), <fpage>1009</fpage>&#x2013;<lpage>1017</lpage>. <pub-id pub-id-type="doi">10.1515/ntrev-2021-0070</pub-id>
</citation>
</ref>
<ref id="B77">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Joseph</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Singh</surname>
<given-names>S. G.</given-names>
</name>
<name>
<surname>Vanjari</surname>
<given-names>S. R. K.</given-names>
</name>
</person-group> (<year>2018</year>). <article-title>Piezoelectric micromachined ultrasonic transducer using silk piezoelectric thin film</article-title>. <source>IEEE Electron Device Lett.</source> <volume>39</volume> (<issue>5</issue>), <fpage>749</fpage>&#x2013;<lpage>752</lpage>. <pub-id pub-id-type="doi">10.1109/led.2018.2816646</pub-id>
</citation>
</ref>
<ref id="B78">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Kahveci</surname>
<given-names>O.</given-names>
</name>
<name>
<surname>Akkaya</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Y&#xfc;cel</surname>
<given-names>E.</given-names>
</name>
<name>
<surname>Ayd&#x131;n</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>&#x15e;ahin</surname>
<given-names>B.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>Production of p-CuO/n-ZnO:Co nanocomposite heterostructure thin films: an optoelectronic study</article-title>. <source>Ceram. Int.</source> <volume>49</volume> (<issue>10</issue>), <fpage>16458</fpage>&#x2013;<lpage>16466</lpage>. <pub-id pub-id-type="doi">10.1016/j.ceramint.2023.02.007</pub-id>
</citation>
</ref>
<ref id="B79">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Kalyanasundaram Balasubramanian</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Foster</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>Zini</surname>
<given-names>G.</given-names>
</name>
<name>
<surname>Cavallo</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Becchio</surname>
<given-names>C.</given-names>
</name>
<etal/>
</person-group> (<year>2023</year>). <article-title>Neural network-based Bluetooth synchronization of multiple wearable devices</article-title>. <source>Nat. Commun.</source> <volume>14</volume>, <fpage>4472</fpage>. <pub-id pub-id-type="doi">10.1038/s41467-023-40114-2</pub-id>
</citation>
</ref>
<ref id="B80">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Kanazawa</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Ushijima</surname>
<given-names>H.</given-names>
</name>
</person-group> (<year>2020</year>). <article-title>Development of a strain sensor matrix on mobilized flexible substrate for the imaging of wind pressure distribution</article-title>. <source>Micromachines</source> <volume>11</volume> (<issue>2</issue>), <fpage>232</fpage>. <pub-id pub-id-type="doi">10.3390/mi11020232</pub-id>
</citation>
</ref>
<ref id="B81">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Kar</surname>
<given-names>E.</given-names>
</name>
<name>
<surname>Bose</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>Dutta</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Banerjee</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Mukherjee</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>Mukherjee</surname>
<given-names>S.</given-names>
</name>
</person-group> (<year>2019</year>). <article-title>2D SnO2 nanosheet/PVDF composite based flexible, self-cleaning piezoelectric energy harvester</article-title>. <source>Energy Convers. Manag.</source> <volume>184</volume>, <fpage>600</fpage>&#x2013;<lpage>608</lpage>. <pub-id pub-id-type="doi">10.1016/j.enconman.2019.01.073</pub-id>
</citation>
</ref>
<ref id="B82">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Karan</surname>
<given-names>S. K.</given-names>
</name>
<name>
<surname>Maiti</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Agrawal</surname>
<given-names>A. K.</given-names>
</name>
<name>
<surname>Das</surname>
<given-names>A. K.</given-names>
</name>
<name>
<surname>Maitra</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Paria</surname>
<given-names>S.</given-names>
</name>
<etal/>
</person-group> (<year>2019</year>). <article-title>Designing high energy conversion efficient bio-inspired vitamin assisted single-structured based self-powered piezoelectric/wind/acoustic multi-energy harvester with remarkable power density</article-title>. <source>Nano Energy</source> <volume>59</volume>, <fpage>169</fpage>&#x2013;<lpage>183</lpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2019.02.031</pub-id>
</citation>
</ref>
<ref id="B83">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Karvounis</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Timpu</surname>
<given-names>F.</given-names>
</name>
<name>
<surname>Vogler-Neuling</surname>
<given-names>V. V.</given-names>
</name>
<name>
<surname>Savo</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Grange</surname>
<given-names>R.</given-names>
</name>
</person-group> (<year>2020</year>). <article-title>Barium titanate nanostructures and thin films for photonics</article-title>. <source>Adv. Opt. Mat.</source> <volume>8</volume> (<issue>24</issue>), <fpage>2001249</fpage>. <pub-id pub-id-type="doi">10.1002/adom.202001249</pub-id>
</citation>
</ref>
<ref id="B84">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Khan</surname>
<given-names>F.</given-names>
</name>
<name>
<surname>Kowalchik</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Roundy</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Warren</surname>
<given-names>R.</given-names>
</name>
</person-group> (<year>2021</year>). <article-title>Stretching-induced phase transitions in barium titanate-poly(vinylidene fluoride) flexible composite piezoelectric films</article-title>. <source>Scr. Mater.</source> <volume>193</volume>, <fpage>64</fpage>&#x2013;<lpage>70</lpage>. <pub-id pub-id-type="doi">10.1016/j.scriptamat.2020.10.036</pub-id>
</citation>
</ref>
<ref id="B85">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Khorrami</surname>
<given-names>G. H.</given-names>
</name>
<name>
<surname>Mousavi</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Dowran</surname>
<given-names>M.</given-names>
</name>
</person-group> (<year>2017</year>). <article-title>Structural and optical properties of KNN nanoparticles synthesized by a sol&#x2013;gel combustion method</article-title>. <source>Mod. Phys. Lett. B</source> <volume>31</volume> (<issue>15</issue>), <fpage>1750175</fpage>. <pub-id pub-id-type="doi">10.1142/s0217984917501755</pub-id>
</citation>
</ref>
<ref id="B86">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Kim</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Han</surname>
<given-names>S. A.</given-names>
</name>
<name>
<surname>Kim</surname>
<given-names>J. H.</given-names>
</name>
<name>
<surname>Lee</surname>
<given-names>J.-H.</given-names>
</name>
<name>
<surname>Kim</surname>
<given-names>S.-W.</given-names>
</name>
<name>
<surname>Lee</surname>
<given-names>S.-W.</given-names>
</name>
</person-group> (<year>2020</year>). <article-title>Biomolecular piezoelectric materials: from amino acids to living tissues</article-title>. <source>Adv. Mat.</source> <volume>32</volume> (<issue>14</issue>), <fpage>1906989</fpage>. <pub-id pub-id-type="doi">10.1002/adma.201906989</pub-id>
</citation>
</ref>
<ref id="B87">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Kim</surname>
<given-names>H. S.</given-names>
</name>
<name>
<surname>Kim</surname>
<given-names>J.-H.</given-names>
</name>
<name>
<surname>Kim</surname>
<given-names>J.</given-names>
</name>
</person-group> (<year>2011</year>). <article-title>A review of piezoelectric energy harvesting based on vibration</article-title>. <source>Int. J. Precis. Eng. Manuf.</source> <volume>12</volume> (<issue>6</issue>), <fpage>1129</fpage>&#x2013;<lpage>1141</lpage>. <pub-id pub-id-type="doi">10.1007/s12541-011-0151-3</pub-id>
</citation>
</ref>
<ref id="B88">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Kim</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Wu</surname>
<given-names>Y. S.</given-names>
</name>
<name>
<surname>Kan</surname>
<given-names>E. C.</given-names>
</name>
<name>
<surname>Fan</surname>
<given-names>J.</given-names>
</name>
</person-group> (<year>2018</year>). <article-title>Breathable and flexible piezoelectric ZnO@PVDF fibrous nanogenerator for wearable applications</article-title>. <source>Polymers</source> <volume>10</volume>, <fpage>745</fpage>. <pub-id pub-id-type="doi">10.3390/polym10070745</pub-id>
</citation>
</ref>
<ref id="B89">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Kirthika</surname>
<given-names>S. K.</given-names>
</name>
<name>
<surname>Ponraj</surname>
<given-names>G.</given-names>
</name>
<name>
<surname>Ren</surname>
<given-names>H.</given-names>
</name>
</person-group> (<year>2017</year>). <article-title>Fabrication and comparative study on sensing characteristics of soft textile-layered tactile sensors</article-title>. <source>IEEE Sensors Lett.</source> <volume>1</volume> (<issue>3</issue>), <fpage>1</fpage>&#x2013;<lpage>4</lpage>. <pub-id pub-id-type="doi">10.1109/lsens.2017.2708425</pub-id>
</citation>
</ref>
<ref id="B90">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Koh</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Ko</surname>
<given-names>S. W.</given-names>
</name>
<name>
<surname>Yang</surname>
<given-names>J. I.</given-names>
</name>
<name>
<surname>Akkopru-Akgun</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Trolier-McKinstry</surname>
<given-names>S.</given-names>
</name>
</person-group> (<year>2022</year>). <article-title>Effect of Mg-doping and Fe-doping in lead zirconate titanate (PZT) thin films on electrical reliability</article-title>. <source>J. Appl. Phys.</source> <volume>132</volume> (<issue>17</issue>). <pub-id pub-id-type="doi">10.1063/5.0101308</pub-id>
</citation>
</ref>
<ref id="B91">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Koseki</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Aimi</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Ando</surname>
<given-names>S.</given-names>
</name>
</person-group> (<year>2012</year>). <article-title>Crystalline structure and molecular mobility of PVDF chains in PVDF/PMMA blend films analyzed by solid-state 19F MAS NMR spectroscopy</article-title>. <source>Polym. J.</source> <volume>44</volume> (<issue>8</issue>), <fpage>757</fpage>&#x2013;<lpage>763</lpage>. <pub-id pub-id-type="doi">10.1038/pj.2012.76</pub-id>
</citation>
</ref>
<ref id="B92">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Kovacova</surname>
<given-names>V.</given-names>
</name>
<name>
<surname>Yang</surname>
<given-names>J. I.</given-names>
</name>
<name>
<surname>Jacques</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Ko</surname>
<given-names>S. W.</given-names>
</name>
<name>
<surname>Zhu</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Trolier-McKinstry</surname>
<given-names>S.</given-names>
</name>
</person-group> (<year>2020</year>). <article-title>Comparative solution synthesis of Mn doped (Na,K)NbO3 thin films</article-title>. <source>Chem. - A Eur. J.</source> <volume>26</volume> (<issue>42</issue>), <fpage>9356</fpage>&#x2013;<lpage>9364</lpage>. <pub-id pub-id-type="doi">10.1002/chem.202000537</pub-id>
</citation>
</ref>
<ref id="B93">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Kumar</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>De</surname>
<given-names>P. S.</given-names>
</name>
<name>
<surname>Roy</surname>
<given-names>A.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>Revisiting lead magnesium niobate-lead titanate piezoceramics for low-frequency mechanical vibration-based energy harvesting</article-title>. <source>J. Alloys Compd.</source> <volume>945</volume>, <fpage>169298</fpage>. <pub-id pub-id-type="doi">10.1016/j.jallcom.2023.169298</pub-id>
</citation>
</ref>
<ref id="B94">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Lay</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Deijs</surname>
<given-names>G. S.</given-names>
</name>
<name>
<surname>Malmstr&#xf6;m</surname>
<given-names>J.</given-names>
</name>
</person-group> (<year>2021</year>). <article-title>The intrinsic piezoelectric properties of materials &#x2013; a review with a focus on biological materials</article-title>. <source>RSC Adv.</source> <volume>11</volume> (<issue>49</issue>), <fpage>30657</fpage>&#x2013;<lpage>30673</lpage>. <pub-id pub-id-type="doi">10.1039/d1ra03557f</pub-id>
</citation>
</ref>
<ref id="B95">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Lee</surname>
<given-names>T. I.</given-names>
</name>
<name>
<surname>Jang</surname>
<given-names>W. S.</given-names>
</name>
<name>
<surname>Lee</surname>
<given-names>E.</given-names>
</name>
<name>
<surname>Kim</surname>
<given-names>Y. S.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>Z. L.</given-names>
</name>
<name>
<surname>Baik</surname>
<given-names>H. K.</given-names>
</name>
<etal/>
</person-group> (<year>2014</year>). <article-title>Ultrathin self-powered artificial skin</article-title>. <source>Energy and Environ. Sci.</source> <volume>7</volume> (<issue>12</issue>), <fpage>3994</fpage>&#x2013;<lpage>3999</lpage>. <pub-id pub-id-type="doi">10.1039/c4ee02358g</pub-id>
</citation>
</ref>
<ref id="B96">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Lee</surname>
<given-names>Y.-C.</given-names>
</name>
<name>
<surname>Tsai</surname>
<given-names>C.-C.</given-names>
</name>
<name>
<surname>Liou</surname>
<given-names>Y.-C.</given-names>
</name>
<name>
<surname>Hong</surname>
<given-names>C.-S.</given-names>
</name>
<name>
<surname>Chu</surname>
<given-names>S.-Y.</given-names>
</name>
</person-group> (<year>2021</year>). <article-title>Effects of Nb doping on crystalline orientation, microstructure and electrical properties of non-stoichiometric PZT thick films via hybrid sol-gel method</article-title>. <source>ECS J. Solid State Sci. Technol.</source> <volume>10</volume> (<issue>6</issue>), <fpage>063010</fpage>. <pub-id pub-id-type="doi">10.1149/2162-8777/ac0a40</pub-id>
</citation>
</ref>
<ref id="B97">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Lei</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Yang</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Xiong</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Wu</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Guo</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>G.-S.</given-names>
</name>
<etal/>
</person-group> (<year>2023</year>). <article-title>Surface engineering AgNW transparent conductive films for triboelectric nanogenerator and self-powered pressure sensor</article-title>. <source>Chem. Eng. J.</source> <volume>462</volume>, <fpage>142170</fpage>. <pub-id pub-id-type="doi">10.1016/j.cej.2023.142170</pub-id>
</citation>
</ref>
<ref id="B98">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Le Rhun</surname>
<given-names>G.</given-names>
</name>
<name>
<surname>Pavageau</surname>
<given-names>F.</given-names>
</name>
<name>
<surname>Wagu&#xe9;</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Perreau</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Licitra</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Frey</surname>
<given-names>L.</given-names>
</name>
<etal/>
</person-group> (<year>2022</year>). <article-title>Highly transparent PZT capacitors on glass obtained by layer transfer process</article-title>. <source>J. Mater. Sci. Mater. Electron.</source> <volume>33</volume> (<issue>36</issue>), <fpage>26825</fpage>&#x2013;<lpage>26833</lpage>. <pub-id pub-id-type="doi">10.1007/s10854-022-09347-7</pub-id>
</citation>
</ref>
<ref id="B99">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Li</surname>
<given-names>F.</given-names>
</name>
<name>
<surname>Cabral</surname>
<given-names>M. J.</given-names>
</name>
<name>
<surname>Xu</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Cheng</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Dickey</surname>
<given-names>E. C.</given-names>
</name>
<name>
<surname>LeBeau</surname>
<given-names>J. M.</given-names>
</name>
<etal/>
</person-group> (<year>2019</year>). <article-title>Giant piezoelectricity of Sm-doped Pb(Mg<sub>1/3</sub>Nb<sub>2/3</sub>)O<sub>3</sub>-PbTiO<sub>3</sub> single crystals</article-title>. <source>Science</source> <volume>364</volume> (<issue>6437</issue>), <fpage>264</fpage>&#x2013;<lpage>268</lpage>. <pub-id pub-id-type="doi">10.1126/science.aaw2781</pub-id>
</citation>
</ref>
<ref id="B100">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Li</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Hu</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Wei</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Meng</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>Zhang</surname>
<given-names>Q.</given-names>
</name>
<etal/>
</person-group> (<year>2023a</year>). <article-title>Oxygen plasma-assisted ultra-low temperature sol-gel-preparation of the PZT thin films</article-title>. <source>Ceram. Int.</source> <volume>49</volume> (<issue>7</issue>), <fpage>10864</fpage>&#x2013;<lpage>10870</lpage>. <pub-id pub-id-type="doi">10.1016/j.ceramint.2022.11.279</pub-id>
</citation>
</ref>
<ref id="B101">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Li</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Zhao</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Bai</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Ai</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Wen</surname>
<given-names>D.</given-names>
</name>
</person-group> (<year>2018</year>). <article-title>Fabrication technology and characteristics research of the acceleration sensor based on Li-doped ZnO piezoelectric thin films</article-title>. <source>Micromachines</source> <volume>9</volume> (<issue>4</issue>), <fpage>178</fpage>. <pub-id pub-id-type="doi">10.3390/mi9040178</pub-id>
</citation>
</ref>
<ref id="B102">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Li</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Sun</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Wen</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Lu</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>Z.</given-names>
</name>
</person-group> (<year>2013</year>). <article-title>Preparation and characterization of poly (vinylidene fluoride)/TiO2 hybrid membranes</article-title>. <source>Front. Environ. Sci. Eng.</source> <volume>7</volume> (<issue>4</issue>), <fpage>492</fpage>&#x2013;<lpage>502</lpage>. <pub-id pub-id-type="doi">10.1007/s11783-012-0407-x</pub-id>
</citation>
</ref>
<ref id="B103">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Li</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Hu</surname>
<given-names>Q.</given-names>
</name>
<name>
<surname>Zhang</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Ma</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Pan</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Zhao</surname>
<given-names>Y.</given-names>
</name>
<etal/>
</person-group> (<year>2022a</year>). <article-title>Piezoelectric nanogenerator based on electrospinning PVDF/cellulose acetate composite membranes for energy harvesting</article-title>. <source>Materials</source> <volume>15</volume>, <fpage>7026</fpage>. <pub-id pub-id-type="doi">10.3390/ma15197026</pub-id>
</citation>
</ref>
<ref id="B104">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Li</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Sun</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Tan</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Zhang</surname>
<given-names>H.</given-names>
</name>
<etal/>
</person-group> (<year>2023b</year>). <article-title>High-performance piezoelectric nanogenerators based on hierarchical ZnO@CF/PVDF composite film for self-powered meteorological sensor</article-title>. <source>J. Mater. Chem. A</source> <volume>11</volume> (<issue>25</issue>), <fpage>13708</fpage>&#x2013;<lpage>13719</lpage>. <pub-id pub-id-type="doi">10.1039/d3ta01886e</pub-id>
</citation>
</ref>
<ref id="B105">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Li</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Yang</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Zhang</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Lin</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Cao</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>L.</given-names>
</name>
<etal/>
</person-group> (<year>2022b</year>). <article-title>A droplet-based electricity generator for large-scale raindrop energy harvesting</article-title>. <source>Nano Energy</source> <volume>100</volume>, <fpage>107443</fpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2022.107443</pub-id>
</citation>
</ref>
<ref id="B106">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Liao</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Zhang</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Yao</surname>
<given-names>M. Y.</given-names>
</name>
<name>
<surname>Hua</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Yan</surname>
<given-names>F.</given-names>
</name>
</person-group> (<year>2015</year>). <article-title>Flexible organic electronics in biology: materials and devices</article-title>. <source>Adv. Mat.</source> <volume>27</volume> (<issue>46</issue>), <fpage>7493</fpage>&#x2013;<lpage>7527</lpage>. <pub-id pub-id-type="doi">10.1002/adma.201402625</pub-id>
</citation>
</ref>
<ref id="B107">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Liu</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Zeng</surname>
<given-names>F.</given-names>
</name>
<name>
<surname>Tang</surname>
<given-names>G.</given-names>
</name>
<name>
<surname>Pan</surname>
<given-names>F.</given-names>
</name>
</person-group> (<year>2013</year>). <article-title>Enhancement of piezoelectric response of diluted Ta doped AlN</article-title>. <source>Appl. Surf. Sci.</source> <volume>270</volume>, <fpage>225</fpage>&#x2013;<lpage>230</lpage>. <pub-id pub-id-type="doi">10.1016/j.apsusc.2013.01.005</pub-id>
</citation>
</ref>
<ref id="B108">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Liu</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Zhong</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Lee</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Lee</surname>
<given-names>S.-W.</given-names>
</name>
<name>
<surname>Lin</surname>
<given-names>L.</given-names>
</name>
</person-group> (<year>2018</year>). <article-title>A comprehensive review on piezoelectric energy harvesting technology: materials, mechanisms, and applications</article-title>. <source>Appl. Phys. Rev.</source> <volume>5</volume> (<issue>4</issue>). <pub-id pub-id-type="doi">10.1063/1.5074184</pub-id>
</citation>
</ref>
<ref id="B109">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Liu</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Chen</surname>
<given-names>BJATSN</given-names>
</name>
<name>
<surname>Ma</surname>
<given-names>H.</given-names>
</name>
</person-group> (<year>2020</year>). <article-title>SDCN: sensory data-centric networking for building the sensing layer of IoT</article-title>. <source>ACM Trans. Sens. Netw.</source> <volume>17</volume> (<issue>6</issue>), <fpage>1</fpage>&#x2013;<lpage>25</lpage>. <pub-id pub-id-type="doi">10.1145/3402452</pub-id>
</citation>
</ref>
<ref id="B110">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Liu</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Ouyang</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Chen</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Mo</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Peng</surname>
<given-names>Q.</given-names>
</name>
<name>
<surname>Jiang</surname>
<given-names>L.</given-names>
</name>
<etal/>
</person-group> (<year>2022c</year>). <article-title>Robust ferroelectricity enhancement of PZT thin films by a homogeneous seed layer</article-title>. <source>J. Mater. Sci.</source> <volume>57</volume> (<issue>41</issue>), <fpage>19371</fpage>&#x2013;<lpage>19380</lpage>. <pub-id pub-id-type="doi">10.1007/s10853-022-07835-z</pub-id>
</citation>
</ref>
<ref id="B111">
<citation citation-type="confproc">
<person-group person-group-type="author">
<name>
<surname>Liu</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Mao</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Long</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Pan</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Jiang</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Cao</surname>
<given-names>M.</given-names>
</name>
</person-group> (<year>2022a</year>). <article-title>Applications. Key technologies of IoT intelligent sensing terminal for smart energy</article-title>, <conf-name>2022 IEEE International Conference on High Voltage Engineering and Applications</conf-name>. <conf-date>25-29 Sept. 2022</conf-date>, <conf-loc>Chongqing, China</conf-loc>: <publisher-name>ICHVE</publisher-name>, <fpage>1</fpage>&#x2013;<lpage>4</lpage>.</citation>
</ref>
<ref id="B112">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Liu</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Chen</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Zhu</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Zhang</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Chen</surname>
<given-names>Y.</given-names>
</name>
<etal/>
</person-group> (<year>2023a</year>). <article-title>20.1: invited paper: research on oxide thin film transistors for wearable sensors</article-title>. <source>SID Symposium Dig. Tech. Pap.</source> <volume>54</volume> (<issue>S1</issue>), <fpage>151</fpage>&#x2013;<lpage>152</lpage>. <pub-id pub-id-type="doi">10.1002/sdtp.16249</pub-id>
</citation>
</ref>
<ref id="B113">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Liu</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Dzidotor</surname>
<given-names>G.</given-names>
</name>
<name>
<surname>Le</surname>
<given-names>T. T.</given-names>
</name>
<name>
<surname>Vinikoor</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Morgan</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Curry</surname>
<given-names>E. J.</given-names>
</name>
<etal/>
</person-group> (<year>2022b</year>). <article-title>Exercise-induced piezoelectric stimulation for cartilage regeneration in rabbits</article-title>. <source>Sci. Transl. Med.</source> <volume>14</volume> (<issue>627</issue>), <fpage>eabi7282</fpage>. <pub-id pub-id-type="doi">10.1126/scitranslmed.abi7282</pub-id>
</citation>
</ref>
<ref id="B114">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Liu</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Yiu</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Zhao</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Park</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Shi</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Huang</surname>
<given-names>X.</given-names>
</name>
<etal/>
</person-group> (<year>2023b</year>). <article-title>Soft, miniaturized, wireless olfactory interface for virtual reality</article-title>. <source>Nat. Commun.</source> <volume>14</volume>, <fpage>2297</fpage>. <pub-id pub-id-type="doi">10.1038/s41467-023-37678-4</pub-id>
</citation>
</ref>
<ref id="B115">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Lopez-Casta&#xf1;o</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Castillo</surname>
<given-names>L. F.</given-names>
</name>
<name>
<surname>Corchado</surname>
<given-names>J. M.</given-names>
</name>
</person-group> (<year>2021</year>). <article-title>Discovering the value creation system in IoT ecosystems</article-title>. <source>sensors</source> <volume>21</volume>, <fpage>328</fpage>. <pub-id pub-id-type="doi">10.3390/s21020328</pub-id>
</citation>
</ref>
<ref id="B116">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Luo</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Sun</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>Q.</given-names>
</name>
<name>
<surname>Niu</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>He</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>H.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>Flexible sweat sensors: from films to textiles</article-title>. <source>ACS Sensors</source> <volume>8</volume> (<issue>2</issue>), <fpage>465</fpage>&#x2013;<lpage>481</lpage>. <pub-id pub-id-type="doi">10.1021/acssensors.2c02642</pub-id>
</citation>
</ref>
<ref id="B117">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Luo</surname>
<given-names>J. T.</given-names>
</name>
<name>
<surname>Fan</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Zeng</surname>
<given-names>F.</given-names>
</name>
<name>
<surname>Pan</surname>
<given-names>F.</given-names>
</name>
</person-group> (<year>2009</year>). <article-title>Influence of Cr-doping on microstructure and piezoelectric response of AlN films</article-title>. <source>J. Phys. D Appl. Phys.</source> <volume>42</volume> (<issue>23</issue>), <fpage>235406</fpage>. <pub-id pub-id-type="doi">10.1088/0022-3727/42/23/235406</pub-id>
</citation>
</ref>
<ref id="B118">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Lutjes</surname>
<given-names>N. R.</given-names>
</name>
<name>
<surname>Zhou</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Antoja-Lleonart</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Noheda</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Ocel&#xed;k</surname>
<given-names>V.</given-names>
</name>
</person-group> (<year>2021</year>). <article-title>Spherulitic and rotational crystal growth of Quartz thin films</article-title>. <source>Sci. Rep.</source> <volume>11</volume> (<issue>1</issue>), <fpage>14888</fpage>. <pub-id pub-id-type="doi">10.1038/s41598-021-94147-y</pub-id>
</citation>
</ref>
<ref id="B119">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Lv</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Zhao</surname>
<given-names>G.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>Q.</given-names>
</name>
<name>
<surname>Yang</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Ma</surname>
<given-names>W.</given-names>
</name>
<etal/>
</person-group> (<year>2023b</year>). <article-title>Ionogel fiber-based flexible sensor for friction sensing</article-title>. <source>Adv. Mat. Technol.</source> <volume>8</volume> (<issue>10</issue>), <fpage>2201617</fpage>. <pub-id pub-id-type="doi">10.1002/admt.202201617</pub-id>
</citation>
</ref>
<ref id="B120">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Lv</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Qian</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Yang</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>D.</given-names>
</name>
<etal/>
</person-group> (<year>2022</year>). <article-title>Flexible all-inorganic Sm-doped PMN-PT film with ultrahigh piezoelectric coefficient for mechanical energy harvesting, motion sensing, and human-machine interaction</article-title>. <source>Nano Energy</source> <volume>97</volume>, <fpage>107182</fpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2022.107182</pub-id>
</citation>
</ref>
<ref id="B121">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Lv</surname>
<given-names>Q.</given-names>
</name>
<name>
<surname>Qiu</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Zhang</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Wen</surname>
<given-names>Q.</given-names>
</name>
<name>
<surname>Yu</surname>
<given-names>J.</given-names>
</name>
</person-group> (<year>2023a</year>). <article-title>The effect and mechanism for doping concentration of Mg-Hf on the piezoelectric properties for AlN</article-title>. <source>Mater. Res. Express</source> <volume>10</volume>, <fpage>065002</fpage>. <pub-id pub-id-type="doi">10.1088/2053-1591/acda13</pub-id>
</citation>
</ref>
<ref id="B122">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>M</surname>
<given-names>W. C.</given-names>
</name>
<name>
<surname>Muthu</surname>
<given-names>S. P.</given-names>
</name>
<name>
<surname>P</surname>
<given-names>R.</given-names>
</name>
</person-group> (<year>2020</year>). <article-title>Growth and electrical properties of self-flux method grown (1&#x2212;x)Bi1/2Na1/2TiO3&#x2212;xBaTiO3 single crystals across the morphotropic phase boundary</article-title>. <source>J. Mater. Sci. Mater. Electron.</source> <volume>31</volume> (<issue>12</issue>), <fpage>9894</fpage>&#x2013;<lpage>9903</lpage>. <pub-id pub-id-type="doi">10.1007/s10854-020-03534-0</pub-id>
</citation>
</ref>
<ref id="B123">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Madinei</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Khodaparast</surname>
<given-names>H. H.</given-names>
</name>
<name>
<surname>Adhikari</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Friswell</surname>
<given-names>M. I.</given-names>
</name>
</person-group> (<year>2016</year>). <article-title>Design of MEMS piezoelectric harvesters with electrostatically adjustable resonance frequency</article-title>. <source>Mech. Syst. Signal Process.</source> <volume>81</volume>, <fpage>360</fpage>&#x2013;<lpage>374</lpage>. <pub-id pub-id-type="doi">10.1016/j.ymssp.2016.03.023</pub-id>
</citation>
</ref>
<ref id="B124">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Manjakkal</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Dervin</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Dahiya</surname>
<given-names>R.</given-names>
</name>
</person-group> (<year>2020</year>). <article-title>Flexible potentiometric pH sensors for wearable systems</article-title>. <source>RSC Adv.</source> <volume>10</volume> (<issue>15</issue>), <fpage>8594</fpage>&#x2013;<lpage>8617</lpage>. <pub-id pub-id-type="doi">10.1039/d0ra00016g</pub-id>
</citation>
</ref>
<ref id="B125">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Manna</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Talley</surname>
<given-names>K. R.</given-names>
</name>
<name>
<surname>Gorai</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Mangum</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Zakutayev</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Brennecka</surname>
<given-names>G. L.</given-names>
</name>
<etal/>
</person-group> (<year>2018</year>). <article-title>Enhanced piezoelectric response of AlN via CrN alloying</article-title>. <source>Phys. Rev. Appl.</source> <volume>9</volume> (<issue>3</issue>), <fpage>034026</fpage>. <pub-id pub-id-type="doi">10.1103/physrevapplied.9.034026</pub-id>
</citation>
</ref>
<ref id="B126">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Mayamae</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Vittayakorn</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Sukkha</surname>
<given-names>U.</given-names>
</name>
<name>
<surname>Bongkarn</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Muanghlua</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Vittayakorn</surname>
<given-names>N.</given-names>
</name>
</person-group> (<year>2017</year>). <article-title>High piezoelectric response in lead free 0.9BaTiO3-(0.1-x)CaTiO3-xBaSnO3 solid solution</article-title>. <source>Ceram. Int.</source> <volume>43</volume>, <fpage>S121</fpage>&#x2013;<lpage>S128</lpage>. <pub-id pub-id-type="doi">10.1016/j.ceramint.2017.05.252</pub-id>
</citation>
</ref>
<ref id="B127">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Mayrhofer</surname>
<given-names>P. M.</given-names>
</name>
<name>
<surname>Riedl</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Euchner</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>St&#xf6;ger-Pollach</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Mayrhofer</surname>
<given-names>P. H.</given-names>
</name>
<name>
<surname>Bittner</surname>
<given-names>A.</given-names>
</name>
<etal/>
</person-group> (<year>2015</year>). <article-title>Microstructure and piezoelectric response of Y Al1&#x2212;N thin films</article-title>. <source>Acta Mater.</source> <volume>100</volume>, <fpage>81</fpage>&#x2013;<lpage>89</lpage>. <pub-id pub-id-type="doi">10.1016/j.actamat.2015.08.019</pub-id>
</citation>
</ref>
<ref id="B128">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Mishra</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Mohanty</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Nayak</surname>
<given-names>S. K.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>Study of nonisothermal crystallization kinetics of unstretched and uniaxially stretched electroactive PVDF composite films</article-title>. <source>Macromol. Chem. Phys.</source> <volume>224</volume> (<issue>2</issue>), <fpage>2200326</fpage>. <pub-id pub-id-type="doi">10.1002/macp.202200326</pub-id>
</citation>
</ref>
<ref id="B129">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Mondal</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Bardhan</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Das</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>Roy</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Ghosh</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Maity</surname>
<given-names>A.</given-names>
</name>
<etal/>
</person-group> (<year>2022</year>). <article-title>Natural clay-based reusable piezo-responsive membrane for water droplet mediated energy harvesting, degradation of organic dye and pathogenic bacteria</article-title>. <source>Nano Energy</source> <volume>104</volume>, <fpage>107893</fpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2022.107893</pub-id>
</citation>
</ref>
<ref id="B130">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Mondal</surname>
<given-names>M. A.</given-names>
</name>
<name>
<surname>Rehena</surname>
<given-names>Z. J.</given-names>
</name>
</person-group> (<year>2022</year>). <article-title>Priority-based adaptive traffic signal control system for smart cities</article-title>. <source>Sn Comput.Sci.</source> <volume>3</volume>, <fpage>417</fpage>. <pub-id pub-id-type="doi">10.1007/s42979-022-01316-5</pub-id>
</citation>
</ref>
<ref id="B131">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Monereo</surname>
<given-names>O.</given-names>
</name>
<name>
<surname>Boix</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Claramunt</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Prades</surname>
<given-names>J. D.</given-names>
</name>
<name>
<surname>Cornet</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Cirera</surname>
<given-names>A.</given-names>
</name>
<etal/>
</person-group> (<year>2011</year>). <article-title>Advanced performances in gas sensors: stretchable, flexible, wireless, wearable</article-title>. <source>Procedia Eng.</source> <volume>25</volume>, <fpage>1425</fpage>&#x2013;<lpage>1428</lpage>. <pub-id pub-id-type="doi">10.1016/j.proeng.2011.12.352</pub-id>
</citation>
</ref>
<ref id="B132">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Mrabet</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Belguith</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Alhomoud</surname>
<given-names>A. M.</given-names>
</name>
<name>
<surname>Jemai</surname>
<given-names>A. J. S.</given-names>
</name>
</person-group> (<year>2020</year>). <article-title>A survey of IoT security based on a layered architecture of sensing and data analysis</article-title>. <source>Sensors</source> <volume>20</volume>, <fpage>3625</fpage>. <pub-id pub-id-type="doi">10.3390/s20133625</pub-id>
</citation>
</ref>
<ref id="B133">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Murthy</surname>
<given-names>M. N.</given-names>
</name>
<name>
<surname>Ganesh</surname>
<given-names>V.</given-names>
</name>
<name>
<surname>Ravinder</surname>
<given-names>G.</given-names>
</name>
<name>
<surname>Anusha</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Chandrakala</surname>
<given-names>G.</given-names>
</name>
<name>
<surname>Sreelatha</surname>
<given-names>C. J.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>Sol&#x2013;gel synthesized ZnO thin films doped with Rb and Al for self-cleaning antibacterial applications</article-title>. <source>J. Sol-Gel Sci. Technol.</source> <volume>105</volume> (<issue>3</issue>), <fpage>683</fpage>&#x2013;<lpage>693</lpage>. <pub-id pub-id-type="doi">10.1007/s10971-023-06044-7</pub-id>
</citation>
</ref>
<ref id="B134">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Nair</surname>
<given-names>K. S.</given-names>
</name>
<name>
<surname>Varghese</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Chandran</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Hareesh</surname>
<given-names>U. N. S.</given-names>
</name>
<name>
<surname>Chouprik</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Spiridonov</surname>
<given-names>M.</given-names>
</name>
<etal/>
</person-group> (<year>2022</year>). <article-title>Synthesis of KNN nanoblocks through surfactant-assisted hot injection method and fabrication of flexible piezoelectric nanogenerator based on KNN-PVDF nanocomposite</article-title>. <source>Mater. Today Commun.</source> <volume>31</volume>, <fpage>103291</fpage>. <pub-id pub-id-type="doi">10.1016/j.mtcomm.2022.103291</pub-id>
</citation>
</ref>
<ref id="B135">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Nakajima</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Hanawa</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Tsuchiya</surname>
<given-names>T.</given-names>
</name>
</person-group> (<year>2017</year>). <article-title>Highly stable flexible thermistor properties of spinel Mn-Co-Ni oxide films on silver/carbon micro-pinecone array composite electrodes</article-title>. <source>J. Appl. Phys.</source> <volume>122</volume> (<issue>13</issue>). <pub-id pub-id-type="doi">10.1063/1.4994572</pub-id>
</citation>
</ref>
<ref id="B136">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Nakajima</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Tsuchiya</surname>
<given-names>T.</given-names>
</name>
</person-group> (<year>2015</year>). <article-title>Flexible thermistors: pulsed laser-induced liquid-phase sintering of spinel Mn&#x2013;Co&#x2013;Ni oxide films on polyethylene terephthalate sheets</article-title>. <source>J. Mater. Chem. C</source> <volume>3</volume> (<issue>15</issue>), <fpage>3809</fpage>&#x2013;<lpage>3816</lpage>. <pub-id pub-id-type="doi">10.1039/c5tc00327j</pub-id>
</citation>
</ref>
<ref id="B137">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Nakajima</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Tsuchiya</surname>
<given-names>T.</given-names>
</name>
</person-group> (<year>2020</year>). <article-title>Ultrathin highly flexible featherweight ceramic temperature sensor arrays</article-title>. <source>ACS Appl. Mater Interfaces</source> <volume>12</volume> (<issue>32</issue>), <fpage>36600</fpage>&#x2013;<lpage>36608</lpage>. <pub-id pub-id-type="doi">10.1021/acsami.0c08718</pub-id>
</citation>
</ref>
<ref id="B138">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Namikawa</surname>
<given-names>G.</given-names>
</name>
<name>
<surname>Shojiki</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Yoshida</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Kusuda</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Uesugi</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Miyake</surname>
<given-names>H.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>MOVPE growth of AlN and AlGaN films on N-polar annealed and sputtered AlN templates</article-title>. <source>J. Cryst. Growth</source> <volume>617</volume>, <fpage>127256</fpage>. <pub-id pub-id-type="doi">10.1016/j.jcrysgro.2023.127256</pub-id>
</citation>
</ref>
<ref id="B139">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Nasir</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Matsumoto</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Danno</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Minagawa</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Irisawa</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Shioya</surname>
<given-names>M.</given-names>
</name>
<etal/>
</person-group> (<year>2006</year>). <article-title>Control of diameter, morphology, and structure of PVDF nanofiber fabricated by electrospray deposition</article-title>. <source>J. Polym. Sci. B Polym. Phys.</source> <volume>44</volume> (<issue>5</issue>), <fpage>779</fpage>&#x2013;<lpage>786</lpage>. <pub-id pub-id-type="doi">10.1002/polb.20737</pub-id>
</citation>
</ref>
<ref id="B140">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Nesser</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Mahmoud</surname>
<given-names>H. A.</given-names>
</name>
<name>
<surname>Lubineau</surname>
<given-names>G.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>High-sensitivity RFID sensor for structural health monitoring</article-title>. <source>Adv. Sci.</source> <volume>10</volume>, <fpage>2301807</fpage>. <pub-id pub-id-type="doi">10.1002/advs.202301807</pub-id>
</citation>
</ref>
<ref id="B141">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Ni</surname>
<given-names>F.</given-names>
</name>
<name>
<surname>Zhu</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Xu</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>G.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Qian</surname>
<given-names>J.</given-names>
</name>
<etal/>
</person-group> (<year>2022</year>). <article-title>Manipulation of defects to achieve fast domain switching and enhance the piezoelectric properties of thin films</article-title>. <source>Appl. Surf. Sci.</source> <volume>604</volume>, <fpage>154517</fpage>. <pub-id pub-id-type="doi">10.1016/j.apsusc.2022.154517</pub-id>
</citation>
</ref>
<ref id="B142">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Niu</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Zhou</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Pan</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Zhao</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>L.</given-names>
</name>
</person-group> (<year>2022</year>). <article-title>Insight into the role of debris in the formation of polytetrafluoroethylene film via molecular dynamic simulation of debris adhesion</article-title>. <source>Polym. Eng. Sci.</source> <volume>62</volume> (<issue>11</issue>), <fpage>3672</fpage>&#x2013;<lpage>3683</lpage>. <pub-id pub-id-type="doi">10.1002/pen.26136</pub-id>
</citation>
</ref>
<ref id="B143">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Okayasu</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Watanabe</surname>
<given-names>K.</given-names>
</name>
</person-group> (<year>2016</year>). <article-title>A study of the electric power generation properties of a lead zirconate titanate piezoelectric ceramic</article-title>. <source>Ceram. Int.</source> <volume>42</volume> (<issue>12</issue>), <fpage>14049</fpage>&#x2013;<lpage>14060</lpage>. <pub-id pub-id-type="doi">10.1016/j.ceramint.2016.06.012</pub-id>
</citation>
</ref>
<ref id="B144">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Pandey</surname>
<given-names>R. K.</given-names>
</name>
<name>
<surname>Hossain</surname>
<given-names>M. D.</given-names>
</name>
<name>
<surname>Moriyama</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Higuchi</surname>
<given-names>M.</given-names>
</name>
</person-group> (<year>2014</year>). <article-title>Real-time humidity-sensing properties of ionically conductive Ni(ii)-based metallo-supramolecular polymers</article-title>. <source>J. Mater. Chem. A</source> <volume>2</volume> (<issue>21</issue>), <fpage>7754</fpage>&#x2013;<lpage>7758</lpage>. <pub-id pub-id-type="doi">10.1039/c4ta00884g</pub-id>
</citation>
</ref>
<ref id="B145">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Park</surname>
<given-names>I.-J.</given-names>
</name>
<name>
<surname>Jeong</surname>
<given-names>C.-Y.</given-names>
</name>
<name>
<surname>Cho</surname>
<given-names>I.-T.</given-names>
</name>
<name>
<surname>Lee</surname>
<given-names>J.-H.</given-names>
</name>
<name>
<surname>Cho</surname>
<given-names>E.-S.</given-names>
</name>
<name>
<surname>Kwon</surname>
<given-names>S. J.</given-names>
</name>
<etal/>
</person-group> (<year>2012</year>). <article-title>Fabrication of amorphous InGaZnO thin-film transistor-driven flexible thermal and pressure sensors</article-title>. <source>Semicond. Sci. Technol.</source> <volume>27</volume> (<issue>10</issue>), <fpage>105019</fpage>. <pub-id pub-id-type="doi">10.1088/0268-1242/27/10/105019</pub-id>
</citation>
</ref>
<ref id="B146">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Park</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Park</surname>
<given-names>Y. J.</given-names>
</name>
<name>
<surname>Chen</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Park</surname>
<given-names>Y.-K.</given-names>
</name>
<name>
<surname>Kim</surname>
<given-names>M.-S.</given-names>
</name>
<name>
<surname>Ahn</surname>
<given-names>J.-H.</given-names>
</name>
</person-group> (<year>2016</year>). <article-title>MoS2-Based tactile sensor for electronic skin applications</article-title>. <source>Adv. Mat.</source> <volume>28</volume> (<issue>13</issue>), <fpage>2556</fpage>&#x2013;<lpage>2562</lpage>. <pub-id pub-id-type="doi">10.1002/adma.201505124</pub-id>
</citation>
</ref>
<ref id="B147">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Patidar</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Sharma</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Zhuk</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Lorenzin</surname>
<given-names>G.</given-names>
</name>
<name>
<surname>Cancellieri</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Sarott</surname>
<given-names>M. F.</given-names>
</name>
<etal/>
</person-group> (<year>2023</year>). <article-title>Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS</article-title>. <source>Surf. Coatings Technol.</source> <volume>468</volume>, <fpage>129719</fpage>. <pub-id pub-id-type="doi">10.1016/j.surfcoat.2023.129719</pub-id>
</citation>
</ref>
<ref id="B148">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Petritz</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Karner-Petritz</surname>
<given-names>E.</given-names>
</name>
<name>
<surname>Uemura</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Sch&#xe4;ffner</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Araki</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Stadlober</surname>
<given-names>B.</given-names>
</name>
<etal/>
</person-group> (<year>2021</year>). <article-title>Imperceptible energy harvesting device and biomedical sensor based on ultraflexible ferroelectric transducers and organic diodes</article-title>. <source>Nat. Commun.</source> <volume>12</volume> (<issue>1</issue>), <fpage>2399</fpage>. <pub-id pub-id-type="doi">10.1038/s41467-021-22663-6</pub-id>
</citation>
</ref>
<ref id="B149">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Portilla</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Loganathan</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Faber</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Eid</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Hester</surname>
<given-names>J. G. D.</given-names>
</name>
<name>
<surname>Tentzeris</surname>
<given-names>M. M.</given-names>
</name>
<etal/>
</person-group> (<year>2023</year>). <article-title>Wirelessly powered large-area electronics for the Internet of Things</article-title>. <source>Nat. Electron.</source> <volume>6</volume> (<issue>1</issue>), <fpage>10</fpage>&#x2013;<lpage>17</lpage>. <pub-id pub-id-type="doi">10.1038/s41928-022-00898-5</pub-id>
</citation>
</ref>
<ref id="B150">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Qiao</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Zhang</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Huang</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Zhou</surname>
<given-names>H.</given-names>
</name>
</person-group> (<year>2018</year>). <article-title>3D printing individualized triboelectric nanogenerator with macro-pattern</article-title>. <source>Nano Energy</source> <volume>50</volume>, <fpage>126</fpage>&#x2013;<lpage>132</lpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2018.04.071</pub-id>
</citation>
</ref>
<ref id="B151">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Rim</surname>
<given-names>Y. S.</given-names>
</name>
<name>
<surname>Bae</surname>
<given-names>S.-H.</given-names>
</name>
<name>
<surname>Chen</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Yang</surname>
<given-names>J. L.</given-names>
</name>
<name>
<surname>Kim</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Andrews</surname>
<given-names>A. M.</given-names>
</name>
<etal/>
</person-group> (<year>2015</year>). <article-title>Printable ultrathin metal oxide semiconductor-based conformal biosensors</article-title>. <source>ACS Nano</source> <volume>9</volume> (<issue>12</issue>), <fpage>12174</fpage>&#x2013;<lpage>12181</lpage>. <pub-id pub-id-type="doi">10.1021/acsnano.5b05325</pub-id>
</citation>
</ref>
<ref id="B152">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Russell</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Shafiee</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Conley</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Sadeghi</surname>
<given-names>F.</given-names>
</name>
</person-group> (<year>2022</year>). <article-title>Evaluating load distribution at the bearing-housing interface using thin film pressure sensors</article-title>. <source>Tribol. Int.</source> <volume>165</volume>, <fpage>107293</fpage>. <pub-id pub-id-type="doi">10.1016/j.triboint.2021.107293</pub-id>
</citation>
</ref>
<ref id="B153">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Sabry</surname>
<given-names>R. S.</given-names>
</name>
<name>
<surname>Hussein</surname>
<given-names>A. D.</given-names>
</name>
</person-group> (<year>2019</year>). <article-title>PVDF: ZnO/BaTiO3 as high out-put piezoelectric nanogenerator</article-title>. <source>Polym. Test.</source> <volume>79</volume>, <fpage>106001</fpage>. <pub-id pub-id-type="doi">10.1016/j.polymertesting.2019.106001</pub-id>
</citation>
</ref>
<ref id="B154">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Safari</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Zhou</surname>
<given-names>Q.</given-names>
</name>
<name>
<surname>Zeng</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Leber</surname>
<given-names>J. D.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>Advances in development of Pb-free piezoelectric materials for transducer applications</article-title>. <source>Jpn. J. Appl. Phys.</source> <volume>62</volume> (<issue>SJ</issue>), <fpage>SJ0801</fpage>. <pub-id pub-id-type="doi">10.35848/1347-4065/acc812</pub-id>
</citation>
</ref>
<ref id="B155">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Saikh</surname>
<given-names>M. M.</given-names>
</name>
<name>
<surname>Hoque</surname>
<given-names>N. A.</given-names>
</name>
<name>
<surname>Biswas</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Rahman</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Das</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>Das</surname>
<given-names>S.</given-names>
</name>
<etal/>
</person-group> (<year>2021</year>). <article-title>Self-polarized ZrO2/Poly(vinylidene fluoride-co-hexafluoropropylene) nanocomposite-based piezoelectric nanogenerator and single-electrode triboelectric nanogenerator for sustainable energy harvesting from human movements</article-title>. <source>Phys. status solidi (a)</source> <volume>218</volume>, <fpage>2000695</fpage>. <pub-id pub-id-type="doi">10.1002/pssa.202000695</pub-id>
</citation>
</ref>
<ref id="B156">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Santos</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Neto</surname>
<given-names>J. P.</given-names>
</name>
<name>
<surname>Crespo</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Nunes</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Costa</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>Fonseca</surname>
<given-names>I. M.</given-names>
</name>
<etal/>
</person-group> (<year>2014</year>). <article-title>WO3 nanoparticle-based conformable pH sensor</article-title>. <source>ACS Appl. Mater. Interfaces</source> <volume>6</volume> (<issue>15</issue>), <fpage>12226</fpage>&#x2013;<lpage>12234</lpage>. <pub-id pub-id-type="doi">10.1021/am501724h</pub-id>
</citation>
</ref>
<ref id="B157">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Sapkota</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Hasan</surname>
<given-names>M. T.</given-names>
</name>
<name>
<surname>Martin</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Mahbub</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Shield</surname>
<given-names>J. E.</given-names>
</name>
<name>
<surname>Rangari</surname>
<given-names>V.</given-names>
</name>
</person-group> (<year>2022</year>). <article-title>Fabrication and magnetoelectric investigation of flexible PVDF-TrFE/cobalt ferrite nanocomposite films</article-title>. <source>Mater. Res. Express</source> <volume>9</volume> (<issue>4</issue>), <fpage>046302</fpage>. <pub-id pub-id-type="doi">10.1088/2053-1591/ac6151</pub-id>
</citation>
</ref>
<ref id="B158">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Sarkar</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Das</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>Saikh</surname>
<given-names>M. M.</given-names>
</name>
<name>
<surname>Biswas</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Das</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Das</surname>
<given-names>S.</given-names>
</name>
<etal/>
</person-group> (<year>2021</year>). <article-title>Development of a sustainable and biodegradable <italic>Sonchus asper</italic> cotton pappus based piezoelectric nanogenerator for instrument vibration and human body motion sensing with mechanical energy harvesting applications</article-title>. <source>ACS Omega</source> <volume>6</volume>, <fpage>28710</fpage>&#x2013;<lpage>28717</lpage>. <pub-id pub-id-type="doi">10.1021/acsomega.1c03374</pub-id>
</citation>
</ref>
<ref id="B159">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Sarkar</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Das</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>Saikh</surname>
<given-names>M. M.</given-names>
</name>
<name>
<surname>Biswas</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Roy</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Paul</surname>
<given-names>S.</given-names>
</name>
<etal/>
</person-group> (<year>2023b</year>). <article-title>High &#x3b2;-crystallinity comprising nitrogenous carbon dot/PVDF nanocomposite decorated self-powered and flexible piezoelectric nanogenerator for harvesting human movement mediated energy and sensing weights</article-title>. <source>Ceram. Int.</source> <volume>49</volume>, <fpage>5466</fpage>&#x2013;<lpage>5478</lpage>. <pub-id pub-id-type="doi">10.1016/j.ceramint.2022.10.070</pub-id>
</citation>
</ref>
<ref id="B160">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Sarkar</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Das</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>Saikh</surname>
<given-names>M. M.</given-names>
</name>
<name>
<surname>Roy</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Paul</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Hoque</surname>
<given-names>N. A.</given-names>
</name>
<etal/>
</person-group> (<year>2023a</year>). <article-title>Elevating the performance of nanoporous bismuth selenide incorporated arch-shaped triboelectric nanogenerator by implementing piezo-tribo coupling effect: harvesting biomechanical energy and low scale energy sensing applications</article-title>. <source>Adv. Compos. Hybrid Mater.</source> <volume>6</volume>, <fpage>232</fpage>. <pub-id pub-id-type="doi">10.1007/s42114-023-00807-0</pub-id>
</citation>
</ref>
<ref id="B161">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Sarkar</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Das</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>Sau</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Basu</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Das</surname>
<given-names>S.</given-names>
</name>
</person-group> (<year>2024</year>). <article-title>Micro-patterned BaTiO3@Ecoflex nanocomposite-assisted self-powered and wearable triboelectric nanogenerator with improved charge retention by 2D MoTe2/PVDF nanofibrous layer</article-title>. <source>J. Mater. Chem. C</source> <volume>12</volume>, <fpage>984</fpage>&#x2013;<lpage>1001</lpage>. <pub-id pub-id-type="doi">10.1039/D3TC03822J</pub-id>
</citation>
</ref>
<ref id="B162">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Satake</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Fujiwara</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Shiogai</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Seki</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Tsukazaki</surname>
<given-names>A.</given-names>
</name>
</person-group> (<year>2019</year>). <article-title>Fe-Sn nanocrystalline films for flexible magnetic sensors with high thermal stability</article-title>. <source>Sci. Rep.</source> <volume>9</volume> (<issue>1</issue>), <fpage>3282</fpage>. <pub-id pub-id-type="doi">10.1038/s41598-019-39817-8</pub-id>
</citation>
</ref>
<ref id="B163">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Satapathy</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Pawar</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Gupta</surname>
<given-names>P. K.</given-names>
</name>
<name>
<surname>Varma</surname>
<given-names>K. B. R.</given-names>
</name>
</person-group> (<year>2011</year>). <article-title>Effect of annealing on phase transition in poly(vinylidene fluoride) films prepared using polar solvent</article-title>. <source>Bull. Mater. Sci.</source> <volume>34</volume> (<issue>4</issue>), <fpage>727</fpage>&#x2013;<lpage>733</lpage>. <pub-id pub-id-type="doi">10.1007/s12034-011-0187-0</pub-id>
</citation>
</ref>
<ref id="B164">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Shalabi</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>Searles</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Takahata</surname>
<given-names>K.</given-names>
</name>
</person-group> (<year>2022</year>). <article-title>Switch mode capacitive pressure sensors</article-title>. <source>Microsystems Nanoeng.</source> <volume>8</volume> (<issue>1</issue>), <fpage>132</fpage>. <pub-id pub-id-type="doi">10.1038/s41378-022-00469-w</pub-id>
</citation>
</ref>
<ref id="B165">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Sharma</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Kumar</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Gupta</surname>
<given-names>V.</given-names>
</name>
<name>
<surname>Tomar</surname>
<given-names>M.</given-names>
</name>
</person-group> (<year>2019</year>). <article-title>Dielectric and ferroelectric studies of KNN thin film grown by pulsed laser deposition technique</article-title>. <source>Vacuum</source> <volume>160</volume>, <fpage>233</fpage>&#x2013;<lpage>237</lpage>. <pub-id pub-id-type="doi">10.1016/j.vacuum.2018.11.036</pub-id>
</citation>
</ref>
<ref id="B166">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Shi</surname>
<given-names>E.</given-names>
</name>
<name>
<surname>Yuan</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Shiring</surname>
<given-names>S. B.</given-names>
</name>
<name>
<surname>Gao</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Akriti</surname>
<given-names>G. Y.</given-names>
</name>
<name>
<surname>Su</surname>
<given-names>C.</given-names>
</name>
<etal/>
</person-group> (<year>2020</year>). <article-title>Two-dimensional halide perovskite lateral epitaxial heterostructures</article-title>. <source>Nature</source> <volume>580</volume> (<issue>7805</issue>), <fpage>614</fpage>&#x2013;<lpage>620</lpage>. <pub-id pub-id-type="doi">10.1038/s41586-020-2219-7</pub-id>
</citation>
</ref>
<ref id="B167">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Shi</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Xie</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Chen</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Zheng</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Wu</surname>
<given-names>B.</given-names>
</name>
<etal/>
</person-group> (<year>2023</year>). <article-title>Dopant tuned multi-functionality in barium titanate based lead-free piezoceramics</article-title>. <source>J. Alloys Compd.</source> <volume>942</volume>, <fpage>169092</fpage>. <pub-id pub-id-type="doi">10.1016/j.jallcom.2023.169092</pub-id>
</citation>
</ref>
<ref id="B168">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Shi</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Sun</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Huang</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Jiang</surname>
<given-names>P.</given-names>
</name>
</person-group> (<year>2018</year>). <article-title>Synergistic effect of graphene nanosheet and BaTiO3 nanoparticles on performance enhancement of electrospun PVDF nanofiber mat for flexible piezoelectric nanogenerators</article-title>. <source>Nano Energy</source> <volume>52</volume>, <fpage>153</fpage>&#x2013;<lpage>162</lpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2018.07.053</pub-id>
</citation>
</ref>
<ref id="B169">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Shin</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Jeong</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Kim</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Nam</surname>
<given-names>V. B.</given-names>
</name>
<name>
<surname>Yoon</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Jung</surname>
<given-names>J.</given-names>
</name>
<etal/>
</person-group> (<year>2020</year>). <article-title>Sensitive wearable temperature sensor with seamless monolithic integration</article-title>. <source>Adv. Mat.</source> <volume>32</volume> (<issue>2</issue>), <fpage>1905527</fpage>. <pub-id pub-id-type="doi">10.1002/adma.201905527</pub-id>
</citation>
</ref>
<ref id="B170">
<citation citation-type="confproc">
<person-group person-group-type="author">
<name>
<surname>Shirvanimoghaddam</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Johnson</surname>
<given-names>S. J.</given-names>
</name>
<name>
<surname>Lance</surname>
<given-names>A. M.</given-names>
</name>
</person-group> (<year>2016</year>). &#x201c;<article-title>Design of Raptor codes in the low SNR regime with applications in quantum key distribution</article-title>,&#x201d; in <conf-name>2016 IEEE International Conference on Communications (ICC)</conf-name>, <conf-loc>USA</conf-loc>, <conf-date>22-27 May 2016</conf-date> (<publisher-name>IEEE</publisher-name>), <fpage>1</fpage>&#x2013;<lpage>6</lpage>.</citation>
</ref>
<ref id="B171">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Siang</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Lim</surname>
<given-names>M. H.</given-names>
</name>
<name>
<surname>Salman</surname>
<given-names>L. M.</given-names>
</name>
</person-group> (<year>2018</year>). <article-title>Review of vibration-based energy harvesting technology: mechanism and architectural approach</article-title>. <source>Int. J. Energy Res.</source> <volume>42</volume> (<issue>5</issue>), <fpage>1866</fpage>&#x2013;<lpage>1893</lpage>. <pub-id pub-id-type="doi">10.1002/er.3986</pub-id>
</citation>
</ref>
<ref id="B172">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Silvano</surname>
<given-names>W. F.</given-names>
</name>
<name>
<surname>Marcelino</surname>
<given-names>R. J.</given-names>
</name>
</person-group> (<year>2020</year>). <article-title>Iota Tangle: a cryptocurrency to communicate Internet-of-Things data</article-title>. <source>Future Gener. Comput. Syst.</source> <volume>112</volume>, <fpage>307</fpage>&#x2013;<lpage>319</lpage>. <pub-id pub-id-type="doi">10.1016/j.future.2020.05.047</pub-id>
</citation>
</ref>
<ref id="B173">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Singh</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Choudhary</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Garg</surname>
<given-names>A.</given-names>
</name>
</person-group> (<year>2018</year>). <article-title>Flexible and robust piezoelectric polymer nanocomposites based energy harvesters</article-title>. <source>ACS Appl. Mater. Interfaces</source> <volume>10</volume>, <fpage>2793</fpage>&#x2013;<lpage>2800</lpage>. <pub-id pub-id-type="doi">10.1021/acsami.7b16973</pub-id>
</citation>
</ref>
<ref id="B174">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Song</surname>
<given-names>J.-Y.</given-names>
</name>
<name>
<surname>Yu</surname>
<given-names>P.-L.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>J.-C.</given-names>
</name>
</person-group> (<year>2022</year>). <article-title>Low-temperature bending fatigue of MXene/PDMS flexible pressure sensor</article-title>. <source>Adv. Mat.</source> <volume>9</volume> (<issue>32</issue>), <fpage>2201463</fpage>. <pub-id pub-id-type="doi">10.1002/admi.202201463</pub-id>
</citation>
</ref>
<ref id="B175">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Sonklin</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Munthala</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Leuasoongnoen</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Janphuang</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Pojprapai</surname>
<given-names>S.</given-names>
</name>
</person-group> (<year>2022</year>). <article-title>Effect of substrate-tilting angle-dependent grain growth and columnar growth in ZnO film deposited using radio frequency (RF) magnetron sputtering method</article-title>. <source>J. Mater. Sci. Mater. Electron.</source> <volume>33</volume> (<issue>21</issue>), <fpage>16977</fpage>&#x2013;<lpage>16986</lpage>. <pub-id pub-id-type="doi">10.1007/s10854-022-08576-0</pub-id>
</citation>
</ref>
<ref id="B176">
<citation citation-type="journal">
<collab>A strategy for obtaining AlN</collab> (<year>2023</year>). <article-title>A strategy for obtaining AlN heteroepitaxial films with high crystalline quality</article-title>. <source>Nat. Mater.</source> <volume>22</volume>, <fpage>816</fpage>&#x2013;<lpage>817</lpage>. <pub-id pub-id-type="doi">10.1038/s41563-023-01574-5</pub-id>
</citation>
</ref>
<ref id="B177">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Sugahara</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Alipour</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Hirose</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Ekubaru</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Nakamura</surname>
<given-names>J.-i.</given-names>
</name>
<name>
<surname>Ono</surname>
<given-names>H.</given-names>
</name>
<etal/>
</person-group> (<year>2020</year>). <article-title>Formation of metal-organic decomposition derived nanocrystalline structure titanium dioxide by heat sintering and photosintering methods for advanced coating process, and its volatile organic compounds&#x2019; gas-sensing properties</article-title>. <source>ACS Appl. Electron. Mater.</source> <volume>2</volume> (<issue>6</issue>), <fpage>1670</fpage>&#x2013;<lpage>1678</lpage>. <pub-id pub-id-type="doi">10.1021/acsaelm.0c00237</pub-id>
</citation>
</ref>
<ref id="B178">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Sun</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Chen</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Lu</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Zhang</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Cheng</surname>
<given-names>Z.</given-names>
</name>
</person-group> (<year>2019</year>). <article-title>Flexible piezoelectric energy harvester/sensor with high voltage output over wide temperature range</article-title>. <source>Nano Energy</source> <volume>61</volume>, <fpage>337</fpage>&#x2013;<lpage>345</lpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2019.04.055</pub-id>
</citation>
</ref>
<ref id="B179">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Sun</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Gao</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>A</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Fang</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Lu</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Yao</surname>
<given-names>D.</given-names>
</name>
<etal/>
</person-group> (<year>2023</year>). <article-title>Hydrophobic multifunctional flexible sensors with a rapid humidity response for long-term respiratory monitoring</article-title>. <source>ACS Sustain. Chem. Eng.</source> <volume>11</volume> (<issue>6</issue>), <fpage>2375</fpage>&#x2013;<lpage>2386</lpage>. <pub-id pub-id-type="doi">10.1021/acssuschemeng.2c06162</pub-id>
</citation>
</ref>
<ref id="B180">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Swagata</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Pradip</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Hoque</surname>
<given-names>N. A.</given-names>
</name>
<name>
<surname>Biswajoy</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Nayim</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Farha</surname>
<given-names>K.</given-names>
</name>
<etal/>
</person-group> (<year>2017</year>). <article-title>Electroactive and high dielectric folic acid/PVDF composite film rooted simplistic organic photovoltaic self-charging energy storage cell with superior energy density and storage capability</article-title>. <source>ACS Appl. Mat. Interfaces</source> <volume>9</volume>, <fpage>24198</fpage>&#x2013;<lpage>24209</lpage>. <pub-id pub-id-type="doi">10.1021/acsami.7b05540</pub-id>
</citation>
</ref>
<ref id="B181">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Tai</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Zhao</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Zheng</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Wu</surname>
<given-names>J.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>Establishing a relationship between the piezoelectric response and oxygen vacancies in lead-free piezoelectrics</article-title>. <source>ACS Appl. Mater. Interfaces</source> <volume>15</volume> (<issue>30</issue>), <fpage>36564</fpage>&#x2013;<lpage>36575</lpage>. <pub-id pub-id-type="doi">10.1021/acsami.3c06520</pub-id>
</citation>
</ref>
<ref id="B182">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Takahashi</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Tadokoro</surname>
<given-names>H.</given-names>
</name>
</person-group> (<year>1980</year>). <article-title>Crystal structure of form III of poly(vinylidene fluoride)</article-title>. <source>Macromolecules</source> <volume>13</volume> (<issue>5</issue>), <fpage>1317</fpage>&#x2013;<lpage>1318</lpage>. <pub-id pub-id-type="doi">10.1021/ma60077a057</pub-id>
</citation>
</ref>
<ref id="B183">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Tan</surname>
<given-names>G.</given-names>
</name>
<name>
<surname>Maruyama</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Kanamitsu</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Nishioka</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Ozaki</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Umegaki</surname>
<given-names>T.</given-names>
</name>
<etal/>
</person-group> (<year>2019</year>). <article-title>Crystallographic contributions to piezoelectric properties in PZT thin films</article-title>. <source>Sci. Rep.</source> <volume>9</volume> (<issue>1</issue>), <fpage>7309</fpage>. <pub-id pub-id-type="doi">10.1038/s41598-019-43869-1</pub-id>
</citation>
</ref>
<ref id="B184">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Tekcin</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Paker</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Bahadir</surname>
<given-names>S. K.</given-names>
</name>
</person-group> (<year>2022</year>). <article-title>UHF-RFID enabled wearable flexible printed sensor with antenna performance</article-title>. <source>AEU - Int. J. Electron. Commun.</source> <volume>157</volume>, <fpage>154410</fpage>. <pub-id pub-id-type="doi">10.1016/j.aeue.2022.154410</pub-id>
</citation>
</ref>
<ref id="B185">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Terai</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Haraguchi</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Ichinose</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Oota</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Yonezawa</surname>
<given-names>K.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>Structural and piezoelectric properties of AlN thin films grown by pressure gradient sputtering</article-title>. <source>Jpn. J. Appl. Phys.</source> <volume>62</volume> (<issue>SA</issue>), <fpage>SA1003</fpage>. <pub-id pub-id-type="doi">10.35848/1347-4065/ac762f</pub-id>
</citation>
</ref>
<ref id="B186">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Teymourian</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Barfidokht</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>J.</given-names>
</name>
</person-group> (<year>2020</year>). <article-title>Electrochemical glucose sensors in diabetes management: an updated review (2010&#x2013;2020)</article-title>. <source>Chem. Soc. Rev.</source> <volume>49</volume> (<issue>21</issue>), <fpage>7671</fpage>&#x2013;<lpage>7709</lpage>. <pub-id pub-id-type="doi">10.1039/d0cs00304b</pub-id>
</citation>
</ref>
<ref id="B187">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Toma</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Domokos</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Lung</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Marconi</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Pop</surname>
<given-names>M.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>Characterization of ZnO, Ga-doped ZnO, and Nd-Ga-doped ZnO thin films synthesized by radiofrequency magnetron sputtering</article-title>. <source>Anal. Lett.</source> <volume>57</volume>, <fpage>797</fpage>&#x2013;<lpage>811</lpage>. <pub-id pub-id-type="doi">10.1080/00032719.2023.2225199</pub-id>
</citation>
</ref>
<ref id="B188">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Tripathy</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Maria Joseph Raj</surname>
<given-names>N. P.</given-names>
</name>
<name>
<surname>Saravanakumar</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Kim</surname>
<given-names>S.-J.</given-names>
</name>
<name>
<surname>Ramadoss</surname>
<given-names>A.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>Tuning of highly piezoelectric bismuth ferrite/PVDF-copolymer flexible films for efficient energy harvesting performance</article-title>. <source>J. Alloys Compd.</source> <volume>932</volume>, <fpage>167569</fpage>. <pub-id pub-id-type="doi">10.1016/j.jallcom.2022.167569</pub-id>
</citation>
</ref>
<ref id="B189">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Trudeau</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Beaupr&#xe9;</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Bolduc</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Cloutier</surname>
<given-names>S. G.</given-names>
</name>
</person-group> (<year>2020</year>). <article-title>All inkjet-printed perovskite-based bolometers</article-title>. <source>npj Flex. Electron.</source> <volume>4</volume> (<issue>1</issue>), <fpage>34</fpage>. <pub-id pub-id-type="doi">10.1038/s41528-020-00097-2</pub-id>
</citation>
</ref>
<ref id="B190">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Tsakanikas</surname>
<given-names>V.</given-names>
</name>
<name>
<surname>Dagiuklas</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Iqbal</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Mumtaz</surname>
<given-names>S.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>An intelligent model for supporting edge migration for virtual function chains in next generation internet of things</article-title>. <source>Sci. Rep.</source> <volume>13</volume> (<issue>1</issue>), <fpage>1063</fpage>. <pub-id pub-id-type="doi">10.1038/s41598-023-27674-5</pub-id>
</citation>
</ref>
<ref id="B191">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Uslu</surname>
<given-names>B. &#xc7;.</given-names>
</name>
<name>
<surname>Okay</surname>
<given-names>E.</given-names>
</name>
<name>
<surname>EjjoCC</surname>
<given-names>D.</given-names>
</name>
</person-group> (<year>2020</year>). <article-title>Analysis of factors affecting IoT-based smart hospital design</article-title>. <source>J. Cloud Comp.</source> <volume>9</volume>, <fpage>67</fpage>. <pub-id pub-id-type="doi">10.1186/s13677-020-00215-5</pub-id>
</citation>
</ref>
<ref id="B192">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Wang</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>Z.</given-names>
</name>
</person-group> (<year>2016</year>). <article-title>A review of start-up circuits for low voltage self-powered DC-type energy harvesters</article-title>. <source>J.Circuits Syst.Comput.</source> <volume>25</volume> (<issue>07</issue>), <fpage>1630003</fpage>. <pub-id pub-id-type="doi">10.1142/s0218126616300038</pub-id>
</citation>
</ref>
<ref id="B193">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Wang</surname>
<given-names>D. W.</given-names>
</name>
<name>
<surname>Mo</surname>
<given-names>J. L.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>X. F.</given-names>
</name>
<name>
<surname>Ouyang</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Zhou</surname>
<given-names>Z. R.</given-names>
</name>
</person-group> (<year>2018</year>). <article-title>Experimental and numerical investigations of the piezoelectric energy harvesting via friction-induced vibration</article-title>. <source>Energy Convers. Manag.</source> <volume>171</volume>, <fpage>1134</fpage>&#x2013;<lpage>1149</lpage>. <pub-id pub-id-type="doi">10.1016/j.enconman.2018.06.052</pub-id>
</citation>
</ref>
<ref id="B194">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Wang</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Chen</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>C.-B.-W.</given-names>
</name>
<name>
<surname>Zhou</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>Y.-X.</given-names>
</name>
<etal/>
</person-group> (<year>2022</year>). <article-title>Synergetic chemo-piezodynamic therapy of osteosarcoma enabled by defect-driven lead-free piezoelectrics</article-title>. <source>Adv. Funct. Mat.</source> <volume>32</volume> (<issue>44</issue>), <fpage>2208128</fpage>. <pub-id pub-id-type="doi">10.1002/adfm.202208128</pub-id>
</citation>
</ref>
<ref id="B195">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Wang</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Wu</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Xin</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Zhou</surname>
<given-names>X.</given-names>
</name>
</person-group> (<year>2023a</year>). <article-title>A brief review on hydrophone based on PVDF piezoelectric film</article-title>. <source>Ferroelectrics</source> <volume>603</volume> (<issue>1</issue>), <fpage>150</fpage>&#x2013;<lpage>156</lpage>. <pub-id pub-id-type="doi">10.1080/00150193.2022.2159227</pub-id>
</citation>
</ref>
<ref id="B196">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Wang</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Asci</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Zeng</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Sonkusale</surname>
<given-names>S.</given-names>
</name>
</person-group> (<year>2023c</year>). <article-title>Zero-power screen printed flexible RFID sensors for Smart Home</article-title>. <source>J. Ambient Intell. Humaniz. Comput.</source> <volume>14</volume> (<issue>4</issue>), <fpage>3995</fpage>&#x2013;<lpage>4004</lpage>. <pub-id pub-id-type="doi">10.1007/s12652-022-04466-9</pub-id>
</citation>
</ref>
<ref id="B197">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Wang</surname>
<given-names>X.</given-names>
</name>
</person-group> (<year>2012</year>). <article-title>Piezoelectric nanogenerators&#x2014;harvesting ambient mechanical energy at the nanometer scale</article-title>. <source>Nano Energy</source> <volume>1</volume> (<issue>1</issue>), <fpage>13</fpage>&#x2013;<lpage>24</lpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2011.09.001</pub-id>
</citation>
</ref>
<ref id="B198">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Wang</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Ge</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Schubert</surname>
<given-names>D. W.</given-names>
</name>
</person-group> (<year>2023b</year>). <article-title>Superior sensitive, high-tensile flexible fabric film strain sensor</article-title>. <source>Compos. Part A Appl. Sci. Manuf.</source> <volume>172</volume>, <fpage>107610</fpage>. <pub-id pub-id-type="doi">10.1016/j.compositesa.2023.107610</pub-id>
</citation>
</ref>
<ref id="B199">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Wang</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Xu</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Dong</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Chen</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Lu</surname>
<given-names>Z.</given-names>
</name>
<etal/>
</person-group> (<year>2021</year>). <article-title>Ultrasonic activation of inert poly(tetrafluoroethylene) enables piezocatalytic generation of reactive oxygen species</article-title>. <source>Nat. Commun.</source> <volume>12</volume> (<issue>1</issue>), <fpage>3508</fpage>. <pub-id pub-id-type="doi">10.1038/s41467-021-23921-3</pub-id>
</citation>
</ref>
<ref id="B200">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Wen</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Shen</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Sun</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Huang</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Gu</surname>
<given-names>F.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>L.</given-names>
</name>
</person-group> (<year>2022</year>). <article-title>Defect regulation of AlN films based on Al-rich AlN targets</article-title>. <source>Semicond. Sci. Technol.</source> <volume>37</volume> (<issue>10</issue>), <fpage>105001</fpage>. <pub-id pub-id-type="doi">10.1088/1361-6641/ac889a</pub-id>
</citation>
</ref>
<ref id="B201">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Won</surname>
<given-names>S. S.</given-names>
</name>
<name>
<surname>Kawahara</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Glin&#x161;ek</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Lee</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Kim</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Jeong</surname>
<given-names>C. K.</given-names>
</name>
<etal/>
</person-group> (<year>2018</year>). <article-title>Flexible vibrational energy harvesting devices using strain-engineered perovskite piezoelectric thin films</article-title>. <source>Nano Energy</source> <volume>55</volume>, <fpage>182</fpage>&#x2013;<lpage>192</lpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2018.10.068</pub-id>
</citation>
</ref>
<ref id="B202">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Wu</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Wu</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Wu</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Xiao</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Zhu</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Pennycook</surname>
<given-names>S. J.</given-names>
</name>
</person-group> (<year>2016</year>). <article-title>Giant piezoelectricity and high Curie temperature in nanostructured alkali niobate lead-free piezoceramics through phase coexistence</article-title>. <source>J. Am. Chem. Soc.</source> <volume>138</volume> (<issue>47</issue>), <fpage>15459</fpage>&#x2013;<lpage>15464</lpage>. <pub-id pub-id-type="doi">10.1021/jacs.6b09024</pub-id>
</citation>
</ref>
<ref id="B203">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Wu</surname>
<given-names>F.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Zhang</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Jiang</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Wei</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Deng</surname>
<given-names>C.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>Self-powered ultra-flexible infrared sensor based on PVA-PEDOT: PSS/Ti3C2Tx composite film</article-title>. <source>Appl. Surf. Sci.</source> <volume>639</volume>, <fpage>158212</fpage>. <pub-id pub-id-type="doi">10.1016/j.apsusc.2023.158212</pub-id>
</citation>
</ref>
<ref id="B204">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Wu</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>Q.</given-names>
</name>
<name>
<surname>Xie</surname>
<given-names>X.</given-names>
</name>
</person-group> (<year>2015</year>). <article-title>Ocean wave energy harvesting with a piezoelectric coupled buoy structure</article-title>. <source>Appl. Ocean Res.</source> <volume>50</volume>, <fpage>110</fpage>&#x2013;<lpage>118</lpage>. <pub-id pub-id-type="doi">10.1016/j.apor.2015.01.004</pub-id>
</citation>
</ref>
<ref id="B205">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Xie</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Zhou</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Gao</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Zhou</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Liang</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Dong</surname>
<given-names>X.</given-names>
</name>
</person-group> (<year>2022</year>). <article-title>Ion-pair engineering-induced high piezoelectricity in Bi4Ti3O12-based high-temperature piezoceramics</article-title>. <source>ACS Appl. Mater. Interfaces</source> <volume>14</volume> (<issue>12</issue>), <fpage>14321</fpage>&#x2013;<lpage>14330</lpage>. <pub-id pub-id-type="doi">10.1021/acsami.1c19445</pub-id>
</citation>
</ref>
<ref id="B206">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Xie</surname>
<given-names>X. D.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>Q.</given-names>
</name>
</person-group> (<year>2015</year>). <article-title>Energy harvesting from a vehicle suspension system</article-title>. <source>Energy</source> <volume>86</volume>, <fpage>385</fpage>&#x2013;<lpage>392</lpage>. <pub-id pub-id-type="doi">10.1016/j.energy.2015.04.009</pub-id>
</citation>
</ref>
<ref id="B207">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Xu</surname>
<given-names>G.</given-names>
</name>
<name>
<surname>Luo</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>P.</given-names>
</name>
<name>
<surname>Xu</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Yin</surname>
<given-names>Z.</given-names>
</name>
</person-group> (<year>2000</year>). <article-title>Ferroelectric and piezoelectric properties of novel relaxor ferroelectric single crystals PMNT</article-title>. <source>Chin. Sci. Bull.</source> <volume>45</volume> (<issue>6</issue>), <fpage>491</fpage>&#x2013;<lpage>495</lpage>. <pub-id pub-id-type="doi">10.1007/bf02887091</pub-id>
</citation>
</ref>
<ref id="B208">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Yamamoto</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Harada</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Yamamoto</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Honda</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Arie</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Akita</surname>
<given-names>S.</given-names>
</name>
<etal/>
</person-group> (<year>2016</year>). <article-title>Printed multifunctional flexible device with an integrated motion sensor for health care monitoring</article-title>. <source>Sci. Adv.</source> <volume>2</volume> (<issue>11</issue>), <fpage>e1601473</fpage>. <pub-id pub-id-type="doi">10.1126/sciadv.1601473</pub-id>
</citation>
</ref>
<ref id="B209">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Yan</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Jeong</surname>
<given-names>Y. G.</given-names>
</name>
<name>
<surname>Kang</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Zhao</surname>
<given-names>Y.</given-names>
</name>
<etal/>
</person-group> (<year>2019</year>). <article-title>Performance enhancements in poly(vinylidene fluoride)-based piezoelectric nanogenerators for efficient energy harvesting</article-title>. <source>Nano Energy</source> <volume>56</volume>, <fpage>662</fpage>&#x2013;<lpage>692</lpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2018.12.010</pub-id>
</citation>
</ref>
<ref id="B210">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Yan</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Ma</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Cai</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Sun</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Zhang</surname>
<given-names>G.</given-names>
</name>
<name>
<surname>Song</surname>
<given-names>W.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>Self-powered and wireless physiological monitoring system with integrated power supply and sensors</article-title>. <source>Nano Energy</source> <volume>108</volume>, <fpage>108203</fpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2023.108203</pub-id>
</citation>
</ref>
<ref id="B211">
<citation citation-type="confproc">
<person-group person-group-type="author">
<name>
<surname>Yanagitani</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Jia</surname>
<given-names>J.</given-names>
</name>
</person-group> (<year>2019</year>). &#x201c;<article-title>ScAlN polarization inverted resonators and enhancement of kt2 in new YbAlN materials for BAW devices</article-title>,&#x201d; in <conf-name>2019 IEEE International Ultrasonics Symposium (IUS)</conf-name>, <conf-loc>USA</conf-loc>, <conf-date>6-9 Oct. 2019</conf-date> (<publisher-name>IEEE</publisher-name>), <fpage>894</fpage>&#x2013;<lpage>899</lpage>.</citation>
</ref>
<ref id="B212">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Yang</surname>
<given-names>F.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Long</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Zhang</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Sui</surname>
<given-names>J.</given-names>
</name>
<etal/>
</person-group> (<year>2021</year>). <article-title>Wafer-scale heterostructured piezoelectric bio-organic thin films</article-title>. <source>Science</source> <volume>373</volume> (<issue>6552</issue>), <fpage>337</fpage>&#x2013;<lpage>342</lpage>. <pub-id pub-id-type="doi">10.1126/science.abf2155</pub-id>
</citation>
</ref>
<ref id="B213">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Yang</surname>
<given-names>F.</given-names>
</name>
<name>
<surname>Yuan</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Wu</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Chen</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Hou</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>A.</given-names>
</name>
<etal/>
</person-group> (<year>2023</year>). <article-title>Energy storage performance of PZT/PZ composite films obtained by sol&#x2013;gel method</article-title>. <source>Phys. Status Solidi A</source> <volume>220</volume> (<issue>17</issue>), <fpage>2300233</fpage>. <pub-id pub-id-type="doi">10.1002/pssa.202300233</pub-id>
</citation>
</ref>
<ref id="B214">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Yang</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Cheng</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Lyu</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Shen</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Qiu</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Ji</surname>
<given-names>H.</given-names>
</name>
<etal/>
</person-group> (<year>2018</year>). <article-title>Tunable piezoelectric performance of flexible PVDF based nanocomposites from MWCNTs/graphene/MnO2 three-dimensional architectures under low poling electric fields</article-title>. <source>Compos. Part A Appl. Sci. Manuf.</source> <volume>107</volume>, <fpage>536</fpage>&#x2013;<lpage>544</lpage>. <pub-id pub-id-type="doi">10.1016/j.compositesa.2018.02.004</pub-id>
</citation>
</ref>
<ref id="B215">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Ye</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Chen</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Yu</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Tu</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Yan</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Zhao</surname>
<given-names>Y.</given-names>
</name>
<etal/>
</person-group> (<year>2021</year>). <article-title>High-performance piezoelectric nanogenerator based on electrospun ZnO nanorods/P(VDF-TrFE) composite membranes for energy harvesting application</article-title>. <source>J. Mater. Sci. Mater. Electron.</source> <volume>32</volume> (<issue>4</issue>), <fpage>3966</fpage>&#x2013;<lpage>3978</lpage>. <pub-id pub-id-type="doi">10.1007/s10854-020-05138-0</pub-id>
</citation>
</ref>
<ref id="B216">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Yen</surname>
<given-names>C.-K.</given-names>
</name>
<name>
<surname>Dutt</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Yao</surname>
<given-names>Y.-S.</given-names>
</name>
<name>
<surname>Wu</surname>
<given-names>W.-J.</given-names>
</name>
<name>
<surname>Shiue</surname>
<given-names>Y.-L.</given-names>
</name>
<name>
<surname>Pan</surname>
<given-names>C.-T.</given-names>
</name>
<etal/>
</person-group> (<year>2022</year>). <article-title>Development of flexible biceps tremors sensing chip of PVDF fibers with nano-silver particles by near-field electrospinning</article-title>. <source>Polymers</source> <volume>14</volume> (<issue>2</issue>), <fpage>331</fpage>. <pub-id pub-id-type="doi">10.3390/polym14020331</pub-id>
</citation>
</ref>
<ref id="B217">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Yu</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Xian</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Mu</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Hou</surname>
<given-names>X.</given-names>
</name>
<etal/>
</person-group> (<year>2023</year>). <article-title>Hybrid electromechanical properties of hetero-doped and homogeneously bonded dual-mode pressure sensor for indoor body area network node</article-title>. <source>Sci. China Inf. Sci.</source> <volume>67</volume> (<issue>1</issue>), <fpage>112401</fpage>. <pub-id pub-id-type="doi">10.1007/s11432-023-3801-1</pub-id>
</citation>
</ref>
<ref id="B218">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Yuan</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Zhang</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Yang</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Wu</surname>
<given-names>F.</given-names>
</name>
<name>
<surname>Xiao</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Sun</surname>
<given-names>H.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>Enhanced piezoelectric properties of poly(vinylidene fluoride)/lead zirconate titanate (PVDF/PZT) fiber films fabricated by electrospinning</article-title>. <source>J. Electron. Mater.</source> <volume>52</volume>, <fpage>7193</fpage>&#x2013;<lpage>7207</lpage>. <pub-id pub-id-type="doi">10.1007/s11664-023-10631-3</pub-id>
</citation>
</ref>
<ref id="B219">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Yue</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>N.</given-names>
</name>
<name>
<surname>Su</surname>
<given-names>T.</given-names>
</name>
<name>
<surname>Cheng</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Lei</surname>
<given-names>D.</given-names>
</name>
<etal/>
</person-group> (<year>2023</year>). <article-title>Self-powered nanofluidic pressure sensor with a linear transfer mechanism</article-title>. <source>Adv. Funct. Mat.</source> <volume>33</volume> (<issue>13</issue>), <fpage>2211613</fpage>. <pub-id pub-id-type="doi">10.1002/adfm.202211613</pub-id>
</citation>
</ref>
<ref id="B220">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Zakria</surname>
<given-names>H. S.</given-names>
</name>
<name>
<surname>Othman</surname>
<given-names>M. H. D.</given-names>
</name>
<name>
<surname>Kamaludin</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Jilani</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Omar</surname>
<given-names>M. F.</given-names>
</name>
<name>
<surname>Ayub</surname>
<given-names>M.</given-names>
</name>
<etal/>
</person-group> (<year>2023</year>). <article-title>Removal of bisphenol A from synthetic and treated sewage wastewater using magnetron sputtered CuxO/PVDF thin film photocatalytic hollow fiber membrane</article-title>. <source>J. Water Process Eng.</source> <volume>51</volume>, <fpage>103425</fpage>. <pub-id pub-id-type="doi">10.1016/j.jwpe.2022.103425</pub-id>
</citation>
</ref>
<ref id="B221">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Zang</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Huang</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Di</surname>
<given-names>C.-a.</given-names>
</name>
<name>
<surname>Zhu</surname>
<given-names>D.</given-names>
</name>
</person-group> (<year>2016</year>). <article-title>Device engineered organic transistors for flexible sensing applications</article-title>. <source>Adv. Mat.</source> <volume>28</volume> (<issue>22</issue>), <fpage>4549</fpage>&#x2013;<lpage>4555</lpage>. <pub-id pub-id-type="doi">10.1002/adma.201505034</pub-id>
</citation>
</ref>
<ref id="B222">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Zha</surname>
<given-names>X.-H.</given-names>
</name>
<name>
<surname>Ma</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Luo</surname>
<given-names>J.-T.</given-names>
</name>
<name>
<surname>Fu</surname>
<given-names>C.</given-names>
</name>
</person-group> (<year>2023</year>). <article-title>Enhanced piezoelectric response of AlN via alloying of transitional metals, and influence of type and distribution of transition metals</article-title>. <source>Nano Energy</source> <volume>111</volume>, <fpage>108390</fpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2023.108390</pub-id>
</citation>
</ref>
<ref id="B223">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Zhang</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Yuan</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Zhu</surname>
<given-names>Q.</given-names>
</name>
<name>
<surname>Sun</surname>
<given-names>H.</given-names>
</name>
</person-group> (<year>2023c</year>). <article-title>Large-scale fabrication and performance improvement of polyvinylidene fluoride piezoelectric composite films</article-title>. <source>Ceram. Int.</source> <volume>49</volume> (<issue>16</issue>), <fpage>27255</fpage>&#x2013;<lpage>27265</lpage>. <pub-id pub-id-type="doi">10.1016/j.ceramint.2023.05.280</pub-id>
</citation>
</ref>
<ref id="B224">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Zhang</surname>
<given-names>M.-H.</given-names>
</name>
<name>
<surname>Shen</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Zhao</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Dai</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Yao</surname>
<given-names>F.-Z.</given-names>
</name>
<name>
<surname>Wu</surname>
<given-names>B.</given-names>
</name>
<etal/>
</person-group> (<year>2022a</year>). <article-title>Deciphering the phase transition-induced ultrahigh piezoresponse in (K,Na)NbO3-based piezoceramics</article-title>. <source>Nat. Commun.</source> <volume>13</volume> (<issue>1</issue>), <fpage>3434</fpage>. <pub-id pub-id-type="doi">10.1038/s41467-022-31158-x</pub-id>
</citation>
</ref>
<ref id="B225">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Zhang</surname>
<given-names>Q.</given-names>
</name>
<name>
<surname>S&#xe1;nchez-Fuentes</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>G&#xf3;mez</surname>
<given-names>A.</given-names>
</name>
<name>
<surname>Desgarceaux</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Charlot</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>G&#xe0;zquez</surname>
<given-names>J.</given-names>
</name>
<etal/>
</person-group> (<year>2019</year>). <article-title>Tailoring the crystal growth of quartz on silicon for patterning epitaxial piezoelectric films</article-title>. <source>Nanoscale Adv.</source> <volume>1</volume> (<issue>9</issue>), <fpage>3741</fpage>&#x2013;<lpage>3752</lpage>. <pub-id pub-id-type="doi">10.1039/c9na00388f</pub-id>
</citation>
</ref>
<ref id="B226">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Zhang</surname>
<given-names>Q.</given-names>
</name>
<name>
<surname>Xu</surname>
<given-names>M.</given-names>
</name>
<name>
<surname>Zhou</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Shihao</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Zhang</surname>
<given-names>L.</given-names>
</name>
<etal/>
</person-group> (<year>2023b</year>). <article-title>A flexible organic mechanoluminophore device</article-title>. <source>Nat. Commun.</source> <volume>14</volume>, <fpage>1257</fpage>. <pub-id pub-id-type="doi">10.1038/s41467-023-36916-z</pub-id>
</citation>
</ref>
<ref id="B227">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Zhang</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Zheng</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Lu</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Xie</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Chen</surname>
<given-names>D.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>J.</given-names>
</name>
<etal/>
</person-group> (<year>2021a</year>). <article-title>A micromachined resonant micro-pressure sensor</article-title>. <source>IEEE Sensors J.</source> <volume>21</volume> (<issue>18</issue>), <fpage>19789</fpage>&#x2013;<lpage>19796</lpage>. <pub-id pub-id-type="doi">10.1109/jsen.2021.3091843</pub-id>
</citation>
</ref>
<ref id="B228">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Zhang</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Chen</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Shen</surname>
<given-names>Z.</given-names>
</name>
</person-group> (<year>2023a</year>). <article-title>Internet use, market transformation, and individual tolerance: evidence from China</article-title>. <source>Humanit. Soc. Sci. Commun.</source> <volume>10</volume>, <fpage>273</fpage>. <pub-id pub-id-type="doi">10.1057/s41599-023-01781-0</pub-id>
</citation>
</ref>
<ref id="B229">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Zhang</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Li</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Peng</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Yan</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Hong</surname>
<given-names>Y.</given-names>
</name>
<etal/>
</person-group> (<year>2023d</year>). <article-title>Active self-assembly of piezoelectric biomolecular films via synergistic nanoconfinement and <italic>in-situ</italic> poling</article-title>. <source>Nat. Commun.</source> <volume>14</volume> (<issue>1</issue>), <fpage>4094</fpage>. <pub-id pub-id-type="doi">10.1038/s41467-023-39692-y</pub-id>
</citation>
</ref>
<ref id="B230">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Zhang</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Pan</surname>
<given-names>Q.</given-names>
</name>
<name>
<surname>Hong</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Shan</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Peng</surname>
<given-names>Z.</given-names>
</name>
<etal/>
</person-group> (<year>2022b</year>). <article-title>Van der Waals Exfoliation Processed Biopiezoelectric Submucosa Ultrathin Films</article-title>. <source>Adv. Mat.</source> <volume>34</volume> (<issue>26</issue>), <fpage>2200864</fpage>. <pub-id pub-id-type="doi">10.1002/adma.202200864</pub-id>
</citation>
</ref>
<ref id="B231">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Zhang</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Lu</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Cai</surname>
<given-names>R.</given-names>
</name>
<name>
<surname>Tan</surname>
<given-names>W.</given-names>
</name>
</person-group> (<year>2021b</year>). <article-title>Rapid water-responsive shape memory films for smart resistive bending sensors</article-title>. <source>Nano Today</source> <volume>38</volume>, <fpage>101202</fpage>. <pub-id pub-id-type="doi">10.1016/j.nantod.2021.101202</pub-id>
</citation>
</ref>
<ref id="B232">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Zhao</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Han</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Xing</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Lin</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Yu</surname>
<given-names>L.</given-names>
</name>
<name>
<surname>Cao</surname>
<given-names>X.</given-names>
</name>
<etal/>
</person-group> (<year>2020b</year>). <article-title>Fabrication and application of flexible AlN piezoelectric film</article-title>. <source>Semicond. Sci. Technol.</source> <volume>35</volume> (<issue>3</issue>), <fpage>035009</fpage>. <pub-id pub-id-type="doi">10.1088/1361-6641/ab6bb0</pub-id>
</citation>
</ref>
<ref id="B233">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Zhao</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Zhang</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>Chen</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Zhang</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>X.</given-names>
</name>
</person-group> (<year>2012</year>). <article-title>Hydrophilicity and crystallization behavior of PVDF/PMMA/TiO2(SiO2) composites prepared by <italic>in situ</italic> polymerization</article-title>. <source>J. Polym. Res.</source> <volume>19</volume> (<issue>5</issue>), <fpage>9862</fpage>. <pub-id pub-id-type="doi">10.1007/s10965-012-9862-0</pub-id>
</citation>
</ref>
<ref id="B234">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Zhao</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>B.</given-names>
</name>
<name>
<surname>Hojaiji</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>Z.</given-names>
</name>
<name>
<surname>Lin</surname>
<given-names>S.</given-names>
</name>
<name>
<surname>Yeung</surname>
<given-names>C.</given-names>
</name>
<etal/>
</person-group> (<year>2020a</year>). <article-title>A wearable freestanding electrochemical sensing system</article-title>. <source>Sci. Adv.</source> <volume>6</volume> (<issue>12</issue>), <fpage>eaaz0007</fpage>. <pub-id pub-id-type="doi">10.1126/sciadv.aaz0007</pub-id>
</citation>
</ref>
<ref id="B235">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Zhou</surname>
<given-names>W.</given-names>
</name>
<name>
<surname>He</surname>
<given-names>Q.</given-names>
</name>
<name>
<surname>Ye</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Ye</surname>
<given-names>C.</given-names>
</name>
<name>
<surname>Wu</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Chu</surname>
<given-names>J.</given-names>
</name>
</person-group> (<year>2021</year>). <article-title>Recent advances in flexible sweat glucose biosensors</article-title>. <source>J. Phys. D Appl. Phys.</source> <volume>54</volume> (<issue>42</issue>), <fpage>423001</fpage>. <pub-id pub-id-type="doi">10.1088/1361-6463/ac14ef</pub-id>
</citation>
</ref>
<ref id="B236">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Zhou</surname>
<given-names>X.</given-names>
</name>
<name>
<surname>Parida</surname>
<given-names>K.</given-names>
</name>
<name>
<surname>Halevi</surname>
<given-names>O.</given-names>
</name>
<name>
<surname>Liu</surname>
<given-names>Y.</given-names>
</name>
<name>
<surname>Xiong</surname>
<given-names>J.</given-names>
</name>
<name>
<surname>Magdassi</surname>
<given-names>S.</given-names>
</name>
<etal/>
</person-group> (<year>2020</year>). <article-title>All 3D-printed stretchable piezoelectric nanogenerator with non-protruding kirigami structure</article-title>. <source>Nano Energy</source> <volume>72</volume>, <fpage>104676</fpage>. <pub-id pub-id-type="doi">10.1016/j.nanoen.2020.104676</pub-id>
</citation>
</ref>
<ref id="B237">
<citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname>Zu</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Wu</surname>
<given-names>H.</given-names>
</name>
<name>
<surname>Wang</surname>
<given-names>Q. M.</given-names>
</name>
</person-group> (<year>2016</year>). <article-title>High-temperature piezoelectric crystals for acoustic wave sensor applications</article-title>. <source>IEEE Trans. Ultrasonics, Ferroelectr. Freq. Control</source> <volume>63</volume> (<issue>3</issue>), <fpage>486</fpage>&#x2013;<lpage>505</lpage>. <pub-id pub-id-type="doi">10.1109/tuffc.2016.2527599</pub-id>
</citation>
</ref>
</ref-list>
</back>
</article>